Transcript MEMS Micro-Electo-Mechanical Systems

MEMS
Micro-Electo-Mechanical
Systems
What is MEMS?
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Micro-Electro-Mechanical Systems
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is the integration of elements, sensors, actuators, and electronics
on a common silicon substrate through micro-fabrication
technology, a manufacturing technology for making microscopic
devices
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Other Materials used in MEMS
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Gallium Arsinide
Titanium Nickel
Piezoelectric Materials
How MEMS are made!
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There are three main building blocks in MEMS
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Deposition process
 The ability to deposit thin films of
material
Lithography
 is typically the transfer of a pattern to a
photosensitive material by selective
exposure to a radiation source such as
light
Etching Process
 Wet etching where the material is
dissolved when immersed in a chemical
solution
 Dry etching where the material is
sputtered or dissolved using reactive
ions or a vapor phase etchant
Pictures of MEMS
Expected
Characteristics of MEMS
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In the future, MEMS
Technology compared to
Conventional Technology
should have these
effects:
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Cost reduction
Increase functionality
Improve reliability
Decrease size
Decrease mass