MEMS Micro-Electo-Mechanical Systems By: Kelly Grahmann Meen 3344

What is MEMS?

 Micro-Electro-Mechanical Systems  is the integration of elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for making microscopic devices  Other Materials used in MEMS  Gallium Arsinide  Titanium Nickel  Piezoelectric Materials

How MEMS are made!

 There are three main building blocks in MEMS    Deposition process  The ability to deposit thin films of material Lithography  is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation source such as light Etching Process   Wet etching where the material is dissolved when immersed in a chemical solution Dry etching where the material is sputtered or dissolved using reactive ions or a vapor phase etchant

Pictures of MEMS

Expected

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Characteristics of MEMS

In the future, MEMS Technology compared to Conventional Technology should have these effects:  Cost reduction  Increase functionality  Improve reliability  Decrease size  Decrease mass

References

       http://www.pcmag.com/encyclopedia_term/0,2542,t=micr oelectromechanical+systems&i=46791,00.asp

http://www.stormingmedia.us/96/9694/A969424.html

http://www.swri.edu/3pubs/brochure/D64/MEMS/home.ht

m http://www.smalltimes.com/document_display.cfm?docu

ment_id=1566 http://www.memsnet.org/mems/what-is.html

http://www.wikipedia.org

http://www.thinfilmmfg.com/subscribers/Subscriber02/me ms10Apr02.htm