Transcript PRESENTATION NAME

MEMS TECHNOLOGY
BY
S.APPA RAO
INTRODUCTION

MEMS: micro-electro-mechanical systems
 Combination
of mechanical functions
(sensing,moving,heating) and electrical
functions (switching ,deciding) on the same
chip using micro fabrication technology.
MEMS
PROCESS
PowerPoint

Same as the process steps used for making
conventional electronic circuits
FABRICATION PROCESS:
DEPOSITION:
 CHEMICAL DEPOSITION
Chemical vapour deposition
 PHYSICAL DEPOSITION
Sputtering
LITHIOGRAPHY:
 Application
of photo resist
 Optical
exposure to print an image of the mask
onto the resist
 Immersion
in an aqueous developer solution to
dissolve the exposed resist
ETCHING:
•DRY ETCHING
•WET ETCHING
MATERIALS FOR MEMS:
 Materials
are the basic things required to
develop micro sensors
 Metals
 Polymers
 Ceramic
materials
 Semiconductors
 Composite materials
MICRO MACHINING TECHNOLOGY:
 Process
of shaping silicon or other materials to
realise 3-D mechanical in miniature form and
the mechanical devices that are compatible
with the micro electronic devices
TYPES OF MICROMACHINING:

BULK micromachining:

SURFACE micromachining:

LIGA process:
MEMS ACCELEROMETRER:
CONVENTIONAL ACCELEROMETER SENSOR
• Made of bulky and heavy metal parts
• Require high operating voltage/current
• Needs careful maintenance
• Highly expensive not throwaway type
PIEZO-RESISTIVE ACCELEROMETER:
LAYOUT OF THE RESISTOR:
MASKS that are used 4 ACCELEROMETER:
FABRICATION PROCESS:
Contd….
INTERFACE ELECTRONIC CKT
MEMS ACCELEROMETER
ADVANTAGES:

Significantly lower manufacturing costs

Small inertial mass

Particularly realized in the area of:
– sensors
– signal switching
TECHNICAL LIMITATIONS:

Imprecise fabrication methods

Expensive and complex packaging

CAD Design tool inaccuracies
APPLICATIONS:

Accelerometers in consumer electronics
devices such as game controllers

Communications

biotechnology
FUTURE:

As with all emerging technologies, the MEMS
industry had been predicted to revolutionize
technology and our lives.

It has the potential to change our daily life as
much as computer