Transcript CHEMICAL SENSING USING MEMS - The University of Oklahoma

CHEMICAL SENSING USING
MEMS
Micro Electro Mechanical Systems
• Micro-Electro-Mechanical Systems
(MEMS) is the integration of mechanical
elements, sensors, actuators, and
electronics on a common silicon
substrate through micro-fabrication
technology.
• Electronics are fabricated using
integrated circuit (IC) process and the
micromechanical components are
fabricated using compatible
micromachining.
• Microelectronic integrated circuits can
be thought of as the "brains" of a
system.
courtsey www.memsnet.org
Applications
• Biotechnology
-- Polymerase Chain Reaction (PCR) microsystems for DNA amplification
and identification.
-- Micromachined Scanning Tunneling Microscopes (STMs).
-- Biochips for detection of hazardous chemical and biological agents.
• Communications
-- Improved components (tunable capacitor, inductor) will significantly
improve communication system.
-- Also total circuit area, power consumption and cost can be reduced.
• Accelerometers
-- MEMS accelerometers are quickly replacing conventional
accelerometers for crash air-bag deployment systems in
automobiles.
-- MEMS accelerometers are small, more efficient and cheap.
courtsey www.memsnet.org
Robust Exhaust Gas Sensing System
• MEMs based chemical sensor
system for monitoring key
exhaust species. (NOx, CO,
O2 ).
• Applications
--NOx measurements of diesel
engines.
-- Jet engine emissions
monitoring for NASA.
-- U.S. Air Force for
performance measurements
(thrust and combustion
efficiency) in exhaust of
vectored jet engines with
afterburner.
-- Potential application to
indoor air quality monitoring in
buildings and vehicles
http://sbir.gsfc.nasa.gov/SBIR/suc
cesses/ss/3-065text.html
MEMS Tongue
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The researchers combined MEMS with budding
chemical-engineering technologies to create the
tongue.
The artificial taste buds are mounted on a silicon
chip using MEMS technology, with a CCD imager
feeding data to a pattern-recognition learning
algorithm.
They used accelerometer MEMS technique to
make an array of miniature test tubes, where they
can identify substance in real time.
Substance can be identified with tiny detection
beads that change color.
Along with that they use CCD camera to track the
bead's color, along with pattern-recognition
software to reveal the elements of the substance
under test based on the color changes in the
beads.
http://www.eetimes.com/story/OE
G19981109S0019
Helpful for my Research
• We are measuring the ambient air during
thunderstorm, but the apparatus we using is
pretty big. It will be very useful if we have a small
apparatus and can put it in a airplane and fly it
near the storm.
• We also measuring human breath, we get breath
samples from different Hospitals. Some times
the breath sample are too old and are of no use.
So again if we can go there and measure that,
and this can be done if apparatus is small.