Transcript Document

Aka Optical-MEMS
Adding light to MEMS
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MOEMS
MOEMS - viewed as a
subset of MEMS
• Micro: small scale; similar to IC feature size
• Opto: optical (photonics) technology
• Electro: electronics & electrical power
• Mechanical: adds mechanical motion
• System: integrated; can be a System-on-Chip
Adds one more level of complexity
Especially for packaging
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Adding light is a big multiplier
Imaging
Medicine
Biotech
MEMS
Physics
OE
Analytical
Chemistry
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OM
Optics
Photonics
MOEMS Applications
• Digital projection; business, HDTV, cinema - major market
• Light & image tracking
• Adaptive mirrors, attenuators
• Adjustable lenses
• Sensing; thermomechanical
• Spectroscopy; analysis, increasingly important
• Photonic switching; especially Internet
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DISPLAY Technology; TV, projectors, cinema
Texas
Instruments
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Optoelectronics Switching
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M
O
E
M
S
1,400,000 mirrors in one module
Video Demos: 3 types of devices
Video may not run
unless file is
downloaded
Texas
Instruments
DLPTM
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MEMS/MOEMS Summary
• Incredibly versatile
• Powerful enabler!
• Will embrace all sciences & technologies
• Still embryonic in many areas
• Bio-med-MEMS has a very big future
• Timetable is hard to predict
• Growth is assured by diversity & enablement
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