Transcript Document 7445402

製造執行系統
Manufacturing Execution System : MES
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
產業活動
策略規劃
行 銷
品
工程與研發
生產規劃
質
廠區控制
工
程
（生產）工廠自動化
配 送
維修與服務
Jon Chang
May. 2005 P. ‹#›
行
政
支
援
與
管
理
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
產業電子化活動
供應商之
供應商
採購
供應商
May. 2005 P. ‹#›
顧客
營業
營業
營業
工程研發
工程研發
工程研發
生產
行政支援
Jon Chang
主企業
配銷
採購
生產
行政支援
配銷
採購
生產
行政支援
顧客之
顧客
配銷
電子化應用系統 (I)
供應商之
供應商
PES/CSM
供應商
May. 2005 P. ‹#›
顧客
EC/QR
EC/QR
EC/QR
CE/PDM
CE/PDM
CE/PDM
MES
ERP
Jon Chang
主企業
SCM
PES/CSM
MES
ERP
SCM
PES/CSM
MES
ERP
顧客之
顧客
SCM
電子化應用系統 (II)
Knowledge Management
Quick
Response
(QR)
Enterprise Resource Planning
(ERP)
Supply Chain Management (SCM)
e-Commerce
(EC)
Customer
Relation
Management
(CRM)
e-Commerce
(EC)
Procurement
Execution
System
(PES)
Enterprise Information Management (PIM)
Product Data
Management
(PDM)
。
CAD
May. 2005 P. ‹#›
CAE
Component &
Supplier
Management
(CSM)
Enterprise
Document
Management
(EDM)
Engineering
Jon Chang
Quick
Response
(QR)
Manufacturing
CAPP
CAM
MES
MCS
Customer
Relation
Management
(CRM)
電子化應用系統 (III)
基礎發展環境
企業智財BIC / 知識管理KM
供應面
供應鏈管理
SCM
需求面
企業資源規劃
ERP
顧客關係管理
CRM
工程資料管理
PDM
製造執行系統
MES
Jon Chang
May. 2005 P. ‹#›
電子商務平台/網站應用程式伺服軟體/應用程式伺服軟體
EC Platform / WEB Application Server/ Application Server
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
What is IC industry
Jon Chang
May. 2005 P. ‹#›
IC Manufacturing Process (I)
Metal-2
W
W
W
W
W
W
IMD-1
Metal-1
W
ILD
W
Poly
Poly
P SD
P SD
P SD
NSD
NSD
NSD
Trench oxide
VTP
NAPT
PAPT
Pwell
Nwell
P Substrate
Jon Chang
May. 2005 P. ‹#›
IC Manufacturing Process (II)
說明
流程
薄膜
薄膜(Thin_film)
黃光
植入
圖釋
FILM
Wafer
黃光(PHOTO)
FILM
Wafer
1.光罩(MASK)
2.光阻(Coater)
3.曝光(Exposure)
4.顯影(Development)
蝕刻
Wafer
1.化學氣相沉積(CVD)
2.金屬濺鍍(PVD)
3.擴散(Diffusion)
光阻
FILM
Wafer
蝕刻(ETCH)
1.濕蝕刻(Wet-ETCH)
2.乾蝕刻(DRY-ETCH)
光阻去除(PR remove)
光阻去除
Jon Chang
May. 2005 P. ‹#›
將光阻去除後就是我們所需的
圖形(PATTERN)
光罩
光阻
FILM
Wafer
IC Manufacturing Process (III)
AlCu 12KA
PESiN 6KA
PEOX 4KA
4KA
SiN 750A
M8 (Cu)
M8 (9K) USG 7.5KA (9.9KA)
SiN 300A
1200A
SiN 500A
Via7
USG 7.2KA
(IMD7=6.5KA)
for V7=0.36*0.36
M7 (3.5K) FSG 2.3KA (4.2KA)
SiN 300A
SiN 500A
M3 (Cu)
M3 (3.5K) FSG 2.3KA (4.2KA)
SiN 300A
900A
Via2
SiN 500A
M2 (Cu)
FSG 4.9KA
M2 (3.5K) FSG 2.3KA (4.2KA)
SiN 300A
900A
SiN 500A
M1 (Cu)
Via1
FSG 4.9KA
M1 (2.6K) FSG 1.7KA (2.9KA)
SiN 300A
600A
HDP PSG5.5KA
W-Plug
SiN 400A
STI
Jon Chang
May. 2005 P. ‹#›
(IMD1~6=4.5KA)
IC Manufacturing Process (IV)
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
IC Manufacturing Process Management (1)
 整合4M (Man, Machine, Material and Method)
以最短的時間及最少的成本產出最好品質的產品.
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Jon Chang
May. 2005 P. ‹#›
Cost
Cycle Time
Yield
Productivity
IC Manufacturing Process Management (2)
 There are 30-50 basic routes for production FAB
 There are 500-1000 product routes in one FAB
 There are 3000 tools monitoring routes in one FAB
 There are 500-1000 production tools in one FAB
 There are 1K wafers start in one FAB
 There are daily 80K track-in-out in one FAB
 There are daily 15M transactions in one FAB
 There are average daily 600 people operation in one FAB
 There are daily 1-2K tool monitoring operation in one FAB
 There are average 10K control/dummy wafers in one FAB
 There are average 14K SPC charts used in one FAB
 There are 20K real-time tool monitoring charts in one FAB
 There are average 4000 tool alarms in one FAB
 There are average 2K final wafer test data files generated
Jon Chang
May. 2005 P. ‹#›
IC Manufacturing Process Management (3)
Human
Tool
Material
Knowledge
Quality
Technology
 Why we need MES ?





Jon Chang
May. 2005 P. ‹#›
More technologies
More tighten process control
More cost for any production lost
More demand for cycle time management
More automation operation is required
IC Manufacturing Process Management (4)
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
IC Manufacturing Process Management (4)
Quick Response to
Business Change
Cycle
Jon Chang
May. 2005 P. ‹#›
Semiconductor challenge in ITRS
Complexity Management
Rapid changes to business needs and demands.
Increasing process and product complexity.
Larger wafers and carriers.
Increased reliance on factory information and control systems.
Factory and Process Optimization
Increased customer expectation to meet on time deliver.
Increased urgency for improved factory effectiveness.
High factory yield at start-up.
Reduce wafer and product costs.
Extendibility, Flexibility and Scalability
Reuse of factory information and control systems.
Factory systems that support rapid process and technology changes.
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
Improvement for Semiconductor challenge in ITRS
Cost per unit area of silicon—Manufacturing cost per unit area of
silicon is a easure of productivity. The capital cost of a factory has
grown significantly each year, from $50M US in the 1980s to over $3B US
in 2003.2
Time to ramp a factory to high-volume production with high
yields—Decreasing time to ramp a factory to high volume production
and high yield has more economic impact than reducing operating costs.
New factories must be built and ramped to mature production at a much
faster rate as reflected in Tables 86 and 89. Existing factories must be
upgraded faster without impacting ongoing production.
Increasing flexibility to accommodate technology and business
changes—Technology advances and the globalization of manufacturing
enterprises have led to a decrease in cost for electronic components.
This enables new markets to open and creates the need to increase the
pace of new product introduction. The flexibility to accommodate these
changes in business expectations must improve without significant cost
impacts.
Jon Chang
May. 2005 P. ‹#›
KPI in ITRS – Factory Operation
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – Production Equipment
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – FICS
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – Facility
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – Metrology
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – Process Integration
Jon Chang
May. 2005 P. ‹#›
KPI in ITRS – Yield Learning
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
KPI in ITRS – Yield Enhancement
Jon Chang
May. 2005 P. ‹#›
[Source : ITRS 2003]
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
MES
Jon Chang
May. 2005 P. ‹#›
MES definition
 manufacturing execution system: Software systems designed to integrate with
enterprise systems to enhance the shop floor control functionality that is usually
inadequate in ERP systems. MES provides for shop floor scheduling, production
and labor reporting, integration with computerized manufacturing systems such
as automatic data collection and computerized machinery.
 MES is a term used to describe systems that track and manage all aspects of a
job in real time while it is in the execution phase or in process It may include
resource management, capacity scheduling, maintenance management,
statistical quality control, laboratory information management, process
management, data collection, plant wide document management and process
optimisation. MES is focused on the short term and may link to ERP/MRPII
software for higher level planning and control tasks.
 Enables network managers to gather control data from the shop floor into
coherent and relevant information. Key functions include data acquisition,
dispatching, document control, scheduling, resource allocation, product history,
operational analysis, and management of labor, maintenance, processes, and
quality.
 製造執行系統是一從接到訂單從事生產開始到產品完成，傳送產品在生產線上生
產的即時資訊 給使用者監看。它將工廠生產的即時和準確資料回應於報表或其他
方式上，呈現的結果會隨著 現在情況的不同迅速改變，其目的在於降低沒有附加
價值的活動，如機台當機等，並提高有效 的生產。MES可以將讓產品準時交貨，
提高庫存週轉率，增加總生產盈餘，和加速資金的流動， 當生產活動發生緊急事
件時，他還提供現場緊急狀態的資訊，並可經由兩條以上的管道通知使用者
Jon Chang
May. 2005 P. ‹#›
MES History
1960年代的晚期到1970年代初期
從會計系統衍生出物料需求規劃（MRP），此系統用來協助工廠對物料需求做好規劃。
1970年的晚期到1980年代初期
電腦對資料的處理能力越來越強，MRP則衍生為MRPII，此MRPII則包含了現場報表系統（Shop Floor
Reporting System）、採購系統（Purchasing System）與其他相關功能。在這段期間，許多公司開始認為他
們需要其他系統去管理更多事物，因MRPII不強調預測及需求分配上的管理，對現場的管理功能也較缺乏；
為了改善這些缺失，預測、配銷資源規劃（Distributed Resource Planning；DRP）、MES（強調WIP追蹤）
與單一功能的系統（如品管功能）等相關系統就應運而生，但這些系統卻未完全整合，所以系統間資料
的交換非常困難。
1980年的晚期至1990年初期
這些系統開始嘗試藉著擴大功能來解決「資訊孤島的問題」。於是MRPII變成企業資源規劃（Enterprise
Resource Planning, ERP）、DRP衍生為供應鏈管理，而現場管理功能則變為整合性的MES。到了1990年代
後期，傳統製造系統之間的界線就變得很模糊，如ERP逐漸含有現場管理功能。
以上資料整理自【MESA International White Paper No. 5, 1997】。
Jon Chang
May. 2005 P. ‹#›
MES History
Jon Chang
May. 2005 P. ‹#›
Jon Chang
May. 2005 P. ‹#›
Jon Chang
May. 2005 P. ‹#›
MES Response
ERP
Planning
Level
(Enterprise Resource
Planning)
MES
Execution
Level
(Manufacturing
Execution System)
SCADA
(Supervisory Control
and Data Acquisition)
Supervisory
Level
DCS
(Distributed
Control System)
Control
Level
PLC
(Programmable
Logic Controller)
Jon Chang
May. 2005 P. ‹#›
ms
seconds
hours
days
weeks
month
years
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
MES core functions
Jon Chang
May. 2005 P. ‹#›
MES assist functions
Jon Chang
May. 2005 P. ‹#›
MES functions
維修保養
管理
生產產品
追蹤
資源使用及
追縱
作業員
管理
原物料(特氣
化)需求
產能效率管理
追蹤及控制
生產指令及
操作程序
規劃及排程
MES
系統
產品規格管理
資料管理
自動化
SPC
品質管理
工程資料收集
Jon Chang
May. 2005 P. ‹#›
現場生產排單
自動化介面及
pc連線
MES
資料連結
How MES help
Manufacturing Flow + Process Criteria
Resource (人, 設備, Cassette..)
Material Flow
MES
Production Objects
生產/效率/品管
Fab Off-line
Fab In-line
Fab Off-line
Management
Operations
Analysis
• UPF 標準化, 合理化
• WIP 在製品管理
• 減少 MO - 機台連線自動化
• 人機效能分析
• 良率統計
• 減少人力 - 傳輸搬運自動化
• 產能分析
• 機台管理
• 製造效率控制 (派工)
• 生產效率分析
• Cycle Time管理
• 製程條件控制 (光罩,Recipe)
• 成本分析
• 工單管理
• 即時品檢 – IPQC/OQC
• QA 管理
• 材料管理
• 提高設備/資產使用率
• 良率提昇
• 現場產品狀況
Jon Chang
May. 2005 P. ‹#›
How MES help
Challenge if Without MES
With MES’s Help
• Run Cards 記錄所有事件
• 所有資料存入電腦, 方便資料擷取及管理
• 人工控制所有生產活動
• 電腦控制 (或建議) 所有生產活動
 生產流程控制靠Run Card
 簡化操作流程並防止錯誤發生
 人工機台操作
 自動化並防止 Miss Operation
 人工製程條件控制
 Recipe/Mask, Data Feedback/Forward
 生產資料收集困難, 無即時 SPC 管制
 資料自動收集, 分類, 送給 SPC 管制
 品質管制不即時,需人工重新輸入
 電腦即時管制, 並採取 Actions
 派工困難
 有效率的派工邏輯
 材料管理
 材料比對及管理
• 無即時現場管理資訊 (在製品,機台,人)
• Real-time Fab-wide 管理
• 生產效率分析困難
• Real-time 資料隨時可作分析
• 工程資料分析困難
• 節省資料整理時間
• 管理報表產生困難
• Information at your fingertip
Jon Chang
May. 2005 P. ‹#›
Manufacturing Function Group in semiconductor(1)
 PART management





BOM, Process management (tool, equipment)
SPEC management (quality spec in each process, queue time)
Technology Management
Tool management
Layout management
 Scheduling and Dispatching management

Priority management (Link with SCM)
 Capacity Planning
 Dispatching agent
 Track-In-Out management

Recipe management
 Tool ALM management
 Equipment management
 Process control management
Jon Chang
May. 2005 P. ‹#›
Manufacturing Function Group in semiconductor(2)
 Automatic Tool Control
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Integrated Material, MES and Tool
Automatic data collection (MFG data and ENG data)
Tool control (track-in, process, track-out)
Real-time tool monitoring
Real-time process monitoring
 WIP tracking and decision support system
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
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Detail WIP tracking (WIP-Tool-Human-Time-Event)
Tool Utilization (OEE)
Super Hot Lot Management
Hold Lot management
Alarm management
 Data quality control
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
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
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Jon Chang
May. 2005 P. ‹#›
Queue time management
Rework Management
SPC control
OCAP
Yield analysis
Manufacturing Function Group in semiconductor (3)
 Tool Management

Tool ID, Capability
 Tool constraint
 Tool Layout (link with AMHS)
 AMHS management
 Human Management

Security
 Certification
 Time management
 Material Management

FOUP
 AMHS (MCS management)
 GAS/ Chemistry
 Integration

SCM integration (scheduling)
 PDM integration (PART)
 Engineering Data Integration
Jon Chang
May. 2005 P. ‹#›
MES benefit
Benefit Type
General Benefits
Project-Specific
Benefits
Qualitative Benefits
Jon Chang
May. 2005 P. ‹#›
Source: TIBCO Software
Description
Improve yield
Reduce cycle time
Production floor management
Improve throughput
Improve equipment utilization
Eliminate/Reduce manual errors
Improve customer satisfaction
Improve overall effectiveness
Improve competitiveness
MES benefit
The potential gain by implementing MES addresses
the need for immediate current, on-line information
that allows users of the MES system to make the best
informed decisions regarding the application of
inventory, plant resources and people:
•Reduces manufacturing cycle times
•Reduces WIP Inventory
•Reduces paperwork between shifts
•Eliminates lost paperwork/blueprints
•Improves customer services
•Reduces or eliminates data entry
•Reduces lead time
•Improves product quality
•Empowers plant operations people
•Responds to unanticipated events
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
MES 架構
MES的架構
關連式資料庫 (Relational Database)：
MES 的最大特色就是資料庫，因它記錄著整廠的生產資訊，包括：統計品管分析、設備和人力追蹤（Labor
Tracking）、物料追蹤（Material Tracking）、實驗室資料（Laboratory Data）、製程資料（Process Data）、工
廠文件（PlantDocument）等。這些資訊可提供給各部門做成報表，進行分析，然而製作報表或進行分析的工具
往往與MES數不同一系統。欲能提供簡單快速且能跨平台存取功能的資料庫類別，非關連式資料庫莫屬。
圖形使用者介面（Graphical User Interface；GUI）：
圖形使用者介面的應用，提供使用者一個容易使用的環境。
開放式系統架構（Open System Architecture）：
在開放式系統下才能不受電腦廠商 的技術牽絆，而且能使企業內『新』『舊』的電腦技術相容。開放式系統提
供了標準的介面、跨平台的應用程式，且資料可跨平台的交換。
主從架構（Client/Server Architecture） ：
這種架構比大型主機架構更節省成本。
系統訂做工具（System Customization Tools）：
每一企業對MES功能要求情況各有不 同，MES廠商除了提供標準的功能模組外，還需提供一套良好訂做工具，
根據客戶個別需要，快速符合顧客需求。
整合性工具（Integration Tools） ：
企業內可能存在許多系統；如分散式控制系統 (Distributed Control System)、工廠支援系統(Plant Support System)
、MRP II與ERP，MES 必需提供介面來連接這些系統，使資料能夠互通。
Reference From: Joe deSpautz, "Quantifying the benefits of automation", ISA Transaction, No.33, 1994, pp.107-102.
Jon Chang
May. 2005 P. ‹#›
MES 架構
FACTORYworks
Factory Modeling
EDC/SPC
Report
WIP Management
Process Plan
EDA
EQP Management
Security Control
Monitoring
Message Bus
SEMI
Dev
Area
Applications
NT Clients
• Semi-auto EDC
Bus
• Recipe
Management
rules
• Dispatch/What is next
• Event/Alarm Management
• Preventive Maintenance
• Lot Schedule/Based on C/T
• Carrier Management
• Reticle Usage forecast
• EEN/ECN
• Reticle Management
Jon Chang
May. 2005 P. ‹#›
SECS I/F
Tool
Intelligent
IUI +
User
Web UI
Interface
MES 架構
MES Server
TCS(Cell Level)
AMHS Integrator
E5/E30/E37
E42/E58
E40/E90
E87/E90
E5/E37
E82
TAP300 + Process
Equipment
OHV
IntraBay
Xfer Eqp
E5 : SECS-II,
E30 :GEM
E37 : HSMS Generic Services
E40 : Standard for Processing Management(PJM)
E42 : Recipe Management Standard
E58 : ARMAS
E87 : Carrier Management
E90 : Substrate tracking
E94 : Control Job Management
May. 2005 P. ‹#›
Stocker
FOUP
E84
Jon Chang
E5/E37
E88
InterBay
Xfer Eqp
E82 : IBSEM
E84 : Parallel I/O Interface
E88 : Stocker SEM
MES 架構
Jon Chang
May. 2005 P. ‹#›
MES 架構
Database
Server
(MMDB/SPCDB)
CIM Framework CIM Framework
MM
Server
Orbix
Orbix
AIX / HACMP
AIX / HACMP
AIX / HACMP
AMHS MCS
Standby
Orbix
AMHS MCS
Server
Orbix
AIX / HACMP
AIX / HACMP
RTM
server
RMS
server
PMS
server
CIM Framework
AIX / HACMP
ALM
server
RTMDB
FIRSTDB
CIMDB
CIMDB
(Hot-Standby)
EMR
LES/eSPC
EES ODS
HP 8400
HP 8400
HP 8400
Orbix
Dispatching
Server
(RTD)
Sun
Dispatching
Server
(ISS report)
Sun
EES
Cluster
SM/SCH
Server
Ext I/F
RPTDB &
Replication
ECS
server
MES
HACMP Cluster #2
HACMP Cluster #1
DBS TCS
DBS
DBS
TCSservers
servers MMS
TCS
servers
TCS
servers
servers
servers
servers
(01-125)
server
SDEV F/W
GMP
Loader
COMet
Reporting
DB Server
i-EDA
Server
AIX
AIX
OSS server
Orbix
ADODB
server
Shared
Storage
Shared
Storage
CFM loader CFM server
MDB server
(f14sch01) (f14cfm01)
NT or Win2000/PC
OMI
SCH Client
SM Client
ECS
GUI
RTM
GUI
Orbix COMet
APC300
GUI
ALM
GUI
PMS
GUI
SDEV F/W
Orbix
SiView MainStarter
Jon Chang
May. 2005 P. ‹#›
NT or Win2000/PC
RMS
GUI
MMS
GUI
CFM300
Report
Viewer
SPC Pro
OSS
GUI
iEDA
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES operation
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
MES framework
EDCsrv
PRPsrv
TrackOut
TrackOut
Develop
MonitorAlarms
Collectdata
TrackIn
Display WI
Dispatch
TrackOut
TrackIn
WIPsrv
Exposure
Coat
SetUpEqp
EQPsrv
CollectData
MDLsrv
TrackIn
CATsrv
SetUpEqp
OPRsrv
(MBX)
Eqp Manager
Lot 1234
Lot 4567
Lot 5678
Lot 34324
Lot 84567
Lot 54877
Equipment Communications
…………………………………..
Intelligent Client
Jon Chang
May. 2005 P. ‹#›
SpcClient/RuleSrv
How does MES function with operation
Track In
Lot List:
Lot01 Lot02 Lot03
Input Lot Id, EQ Id
Display Operations
Temp: 75 C
Time: 120 min
* Data Collection
Track Out Info.
Data Collection
Next Step
Next Location
Input Data
Track Out
Input Lot Id, Qty
Process Start
Lot01
Process End
Lot Unload Lot Load into EQ Setup EQ
from EQ & Setup Parameter
Lot01
Lot03
Lot02
Jon Chang
May. 2005 P. ‹#›
Lot01
Transfer Lot to Next Location
How does MES function with operation
Track In
Lot List:
Lot01 Lot02 Lot03
Input Lot Id, EQ Id
Display Operations
Temp: 75 C
Time: 120 min
* Data Collection
Track Out Info.
Data Collection
Next Step
Next Location
Input Data
Track Out
Input Lot Id, Qty
Process Start
Lot01
Process End
Lot Unload Lot Load into EQ Setup EQ
from EQ & Setup Parameter
Lot01
Lot03
Lot02
Jon Chang
May. 2005 P. ‹#›
Lot01
Transfer Lot to Next Location
How does MES function with operation
In-Line
Staging
Area
Staged Lots
P
R
O
C
E
S
S
S
T
E
P
Scrap
EQP4
#1
Yield%
EQP5
#2
Jon Chang
May. 2005 P. ‹#›
Arrival Time
WAIT
State
Equipment
S
T
Process
E
Start Time
P
EQP1
EQP2
Track-Out
C
Y
C
L
E
RUN
Track-In State
EQP3
Next Process Step
Staging Area
T
I
M
E
WAIT
State.
Process
End Time
SiView DEMO - BR
Jon Chang
May. 2005 P. ‹#›
SiView DEMO – Tool status
Jon Chang
May. 2005 P. ‹#›
SiView DEMO – WIP tracking
Jon Chang
May. 2005 P. ‹#›
SiView DEMO – WIP tracking
Jon Chang
May. 2005 P. ‹#›
SiView DEMO – SPC
Jon Chang
May. 2005 P. ‹#›
SiView DEMO – Decision Support
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES operation
 MES 技術
 MES 與其它e 化系統的整合
Jon Chang
May. 2005 P. ‹#›
MES 技術
 Message Bus (TIBCO, XML, SOAP, Rosetanet)
 Database (Oracle, SQL, DB2, Informix)
 Client/Server architecture (Client -> MM server)
 GUI development library
 Tool control development
 SEMI SECS/GEM/XML standards
 Decision support system (smart dispatching system)
Jon Chang
May. 2005 P. ‹#›
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES operation
 MES 技術
 MES 與其它e 化系統的整合
 MES 未來發展方向
Jon Chang
May. 2005 P. ‹#›
MES and E-commerce
TSMC Online
Services & Technologies
Production Information
an overview of services and
technologies
an array of up-to-date logistic
status reports
Design Portal
Technical Documents
an integrated environment for
IC design assistance
Business Transactions
book product names, submit
service requests, and access
CyberShuttleTM services
Assembly & Test
Jon Chang
May. 2005 P. ‹#›
information on sort, assembly
and final test services.
a virtual document center for
providing one click download
Quality & Reliability
policy and reviews on the
process quality and reliability
information
Customer Satisfaction
status tracking for customer
corrective action request
MES and ERP
Customers
ESCM Customer
Interfacing (real-time)
Judged
Demand
Forecast
Demand
Forecast
Demand-to-Support
Purchase
Order
ESCM Planning
(batch run)
Demand
Planning
Allocation
Planning
Support
plan
CASD
Support
Commitment
Capacity
Plan
Allocation
Capacity
Manage
Modeling
-ment
Adjusted
CASD
Capacity
ATP Request/ (NSD)
Consumed
Plan
Consumption
ATP
PO entry
and change
Order
Management
Output
Planning
ATP
MPS
Manufactur
ing
Planning
Order-to-Confirm
Delivery
Confirmation
Order-to-Ship
Jon Chang
May. 2005 P. ‹#›
ATP
ATP Plan
Actual
Delivery
MES and PDM
Customer
MT Form
(Mask Tooling)
FSR Form
(Foundry Service
Request)
Customer Engineer
ENG1 / RD
Book TM number
Maintain
Technology Infor.
Product Engineer
EBO
EBO system
Issue MT/TIP
Issue
Engineering Notice
Maintain
holadable stage
PE Infor.
maintenance
MES system
Customer lot
handling
request
Jon Chang
May. 2005 P. ‹#›
Issue lot
handling request
: PDM
system
: other
system
Outline
 產業Operation
 產業e化架構
 Manufacturing Sequence Flow
 Why MES (factory operation point of view)
 Why MES (Industry point of view)
 MES 定義
 MES 功能
 MES 架構
 MES operation
 MES 技術
 MES 與其它e 化系統的整合
 MES 未來發展方向
Jon Chang
May. 2005 P. ‹#›
Future Direction of MES
 Scalability (support considerable transaction for bigger
FABs and detail information)
 System centric operation instead of human-centric
operation (knowledge operation)
 Simulation Capability is embedded for knowledge creation
 Industry information sharing instead local information
sharing (Virtual FAB support)
 Friendly decision support system
 Exception handling become only thing for human operation
Jon Chang
May. 2005 P. ‹#›
Future Direction of MES
knowledge base
man-machine
communication
operator
history
logging
process
data base
simulation
instructor
maintenance
engineer
actualization
process data
plant
Jon Chang
May. 2005 P. ‹#›
Future Direction of MES
Jon Chang
May. 2005 P. ‹#›
Q&A
Jon Chang
May. 2005 P. ‹#›