Transcript Workaround for users using XPA marks & having layers built on top of them Ping Ding January 2011

Workaround for users using XPA marks & having layers built
on top of them
Ping Ding
January 2011
• ASML corrected a long standing problem, 8um error in y
with XPA alignment marks on 1/6/11, by modifying delta
shift machine constants
• For users who already built layers by aligning to XPA
marks and need to continue processing more layers, the
next two pages provide snapshots on actions to take to
avoid 8um alignment error relative to previous layers
• The procedure described in the next two pages are not
applicable to users who have not started building devices
yet
Confidential
Implement Correction in Batch Control
Click on Alignment to get to the next page
Confidential
Enter Delta Shift Correction
Default parameters:
0 for Y of both M1 & M2
Confidential
Parameters to change:
Enter -0.8 for Y of both M1 & M2