Transcript Millbrook MiniSIMS alpha (web version)

An Introduction
to SIMS and
the MiniSIMS alpha
© Millbrook Instruments Limited
Blackburn, UK
www.millbrook-instruments.com
www.minisims.com
Secondary Ion Mass
Spectrometry (SIMS)
&
The Millbrook MiniSIMS
The SIMS Process
simulation courtesy of Dr Postawa Zbigniew
at the Jagiellonian University in Poland
A Conventional SIMS System
The MiniSIMS Instrument
Design Objectives
• Increase routine use of Surface Analysis
– more affordable
– more accessible
• Not a replacement for conventional SIMS
– not state-of-the-art performance
– restricted analysis conditions
Transform one of these …..
….. into one of these.
Operational Strengths
•
Low Capital & Running Costs
•
Fast, On-Site Analysis
•
Compact Design, Single Electrical Supply
•
Full Automation & Control for Ease of Use
•
High Reliability
•
Rapid Sample Throughput
•
Simplified Data Interpretation
•
Remote Control via Internet
Static SIMS
(Surface Analysis)
Static SIMS
(Surface Analysis)
Characterisation of Layer
Structurally significant peaks
Characterisation of Layer
Structurally significant peaks
Light Element Detection
Dynamic SIMS
(Depth Analysis)
Dynamic SIMS
(Depth Analysis)
Before Annealing
After Annealing
Copper
has
diffused
into
silicon
oxide
Profile Before Annealing
Profile After Annealing
Imaging SIMS
(Spatial Analysis)
Imaging SIMS
(Spatial Analysis)
Distribution of Organic Film
• Incomplete coverage
of both organic and
inorganic components
in a battery electrode
• CxHyOz- (blue) and
Li+(red) on Al+ (green)
• Image size
4.5 mm x 4.5 mm
Distribution of Metal
Overlayer
• Uneven coverage
of the silver
coating on the
contacts of a
semiconductor
connection frame
• Cu+ (red) and Ag+
(green)
• Image size
3.0 mm x 3.0 mm
Typical Applications
for the MiniSIMS alpha
• Repetitive analysis (quality monitoring)
• Large area organic surface contamination
• Fast imaging of millimetre scale areas
• 3 dimensional analysis of multi-layer structures
• Comparative rather than quantitative analysis
Typical Application Areas
• Surface Coatings
• Catalysts
• Surface Treatments
• Adhesives
• Electronic
Components
• Lubricants
• Semiconductors
• Packaging
Materials
• Electrodes & Sensors
• Corrosion Studies
Alternatives to a MiniSIMS ?
•
No Other Benchtop SIMS Instrument
• Conventional SIMS Systems
– much more complex and expensive
• Contract Analysis Laboratories
– not convenient, contamination during transport
• Other Surface Analysis Techniques
– generally less sensitive
Comparison of
SEM / EDS and SIMS
Advantages of SEM / EDS
• High magnification physical image
• Quantitative elemental information
Advantages of SIMS
• Surface specific analysis
• Organic structure identification
• Profiling for depth distribution
• Light element detection
For many applications surface sensitivity is needed…
509 m
Not
Not100
10 x
EDX
typically
1 micron
But 1000
x –sampling
SIMS candepth
offer is
true
surface
analysis
Conclusions
• SIMS & EDS give complementary information
• SIMS has advantages for
– Organic surface contamination
– 3 dimensional analysis of multi-layer structures
• SEM / EDS has advantages for
– High magnification physical imaging
– Quantitative analysis
Summary
MiniSIMS Summary
• SIMS is a powerful technique for the 3-D analysis
of the surfaces of materials and thin films
• Information easily available by SIMS may be
difficult or impossible by any other technique
• SIMS is especially valuable for the detection of:– organic species (e.g. silicones, fluorocarbons)
– light elements (lithium, beryllium, boron …)
– group IA & IIA metals, group VII halides
MiniSIMS Summary
• SIMS is a fast analysis technique, especially
for imaging applications
• MiniSIMS alpha is most applicable for
running routine repetitive analyses
• Desktop MiniSIMS means SIMS is now
affordable and accessible to all