Transcript Slide 1

Design of a Computer Controlled Test System for a SOI-MEMS
Resonator Gas Sensor for High Temperature Characterization
Electrical Engineering Department
Presenter: Robert MacKinnon Jr.
Advisor: Prof. Mustafa Guvench
Coauthor: Joshua Ward
MEMS wire bonding diagram
Frequency Response of a
SOI-MEMS Resonator
Magnitude(yellow) & Phase(blue)
This project involves the development of a computer-controlled test
system to measure and characterize the response of a Silicon on
Insulator (SOI) Micro-Electro-Mechanical Resonator (MEMR) to various
gas mixtures and concentrations. This miniature device, developed by
Professor Guvench of the University of Southern Maine, will be
ultimately be used for gas sensing and frequency control applications
in high temperature environments. The chip will be packaged in
combination with a thermocouple and heater element to facilitate
testing of the chip for high temperature characterization. The control
system developed employs Lab View as the software platform for
interfacing, communication, data acquisition and control. A PID
control loop has been developed within the master Lab View program
to measure, monitor and maintain the temperature of the chip at a
predetermined test temperature. An IOtech Personal DAQ/Series 3000
data acquisition module is used to coordinate communication
between the Lab View Program and all inputs and outputs for the test
system. The Lab View program also controls the injection time and
flow rate of the gases and measures the frequency response of the
resonator. The mechanical portions of the test system were designed
to facilitate both redundancy and ease of replacement should
maintenance become necessary.
Thick Film Heater, temperature
as a function of power
Lab View Master Virtual
Instrument
The project was funded by grants from:
NASA, Maine Space Grant Consortium and USM Faculty Senate
SOI- MEMS chip, size 5 mm x
5 mm wire bonded to a 44-pin JLDCC gold package
Computer Controlled Test
System