Transcript SPRAY COATER REPORT Pierre Ponce 4/15/2010 Operation • The AccuMist nozzle is NOT centered when the head is at the 0 angle position – Tested.

SPRAY COATER REPORT
Pierre Ponce
4/15/2010
Operation
• The AccuMist nozzle is NOT centered when
the head is at the 0 angle position
– Tested using Center Test Recipe.
– Centered when the indicator is halfway b/w 0 and
the next tick towards the back of the machine.
• Center test also fails unless the swivel arm if
first homed and then moved to parkposition.
Recipes P16-P32
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Resist Blend  SPR220-7:MEK:EL (1:8:5)
All wafers are clean, flat silicon (L-test)
150C singe oven before spraying
Chuck at 65C and wafers sit for 30 seconds before
each (CCW spin, CW spin) pair of coats
Chuck spins at 80 RPMs
After recipe ends, vacuum hotplate at 90C for 120secs
(done at svgcoat)
Swivel arm height fixed at 800000
Swivel arm speed profile derived from Matlab script
(13 steps from edge to edge), starting at 265 steps/sec
Variables
• Nozzle pressure (400, 600, 800, 1200, 1600
mTorr)
• Number of passes (6, 10, 12)
• Dispense rate (10, 6, 5 uL/s)
Observations
• #Passes  (or Dispense rate )
 Standard deviation 
• Pressure   Roughness  (maybe)
• Pressure   Center thickness 
• Pressure   Edge thickness 
• Spin rate   Edge roughness 
– (tested 1 wafer at 50 RPM, recipe P31)
• High speed at edge seems bad for roughness…
Possible solutions
– 1. Less chuck spin rpm and/or
– 2. Scale down swivel arm speed
Next Tests
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Less RPMs
Reduce arm speed by 0%, 25%, 50%
Fix #passes to 12
Use 1200 mTorr as min pressure up to 1600
Raise chuck temperature to 75C
Standard topography tests (are there standard
topography wafers available?)