Transcript What is WAFERMAP?

WAFERMAP
• Award
software package
Wewinning
add
imports
• customer
Collect, edit,
visualize and analyze measured
upon request
physical
parameters on semiconductor wafers
• Import data from
various metrology tools
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Ellipsometers
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4 point probes
Supported
File Formats
- Thickness gauges
WAFERMAP
• 9 different visualization plots from 1D to 3D
• Data operations and filtering
• File comparison
• Statistical Process Control SPC
- Browser
- Trend chart
• Inter-application Communication (Active X)
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WAFERMAP
New Release: Version 3.0
New features:
• New easy to use XML-based Boin file format
• Multiple wafers and multi-measurements in
one file
• Import of multi-measurement wafers at once
• Free rotation of 3D plots
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WAFERMAP
New Release: Version 3.0
New features:
• Export of *.jpg and *.bmp
• Export of *.html
• … and many more
WAFERMAP
• Compare your measurements
• Work off-line
• Work outside the clean room
 WAFERMAP is your choice
WAFERMAP
References – Partial List of WAFERMAP Customers
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Advanced Micro Devices
ASM
Atmel
Canon
Hitachi
Hypernex
Infineon
Intel
Jordan Valley SC
LSI Logic
Mattson Technology
Motorola/ Freescale
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Nicolet
Osram
Philips, Philips Analytical
Mitsubishi
Seagate
Sematech
ST Microelectronics
Sumitomo Eaton Nova
Silicon Valley Group
Thermawave
Tokyo Electron
Tru-Si
Varian
WAFERMAP
References – OEM Customers
• Cyrium
• Sigmatech
• Foothill Instruments
• SOPRA
• Jenawave
• Technos
• Jordan Valley
• Tepla AG
• KLA - Tencor
• Thermawave
• LayTec
• Thermo Electron
• Napson
• Carl Zeiss

Sell WAFERMAP as
analysis and visualization tool
together with your equipment
Thank you very much
for your interest in
WAFERMAP