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MGI Electronics Easy Reader/Sorter
History
Specifications
Reliability Data
Service
The Future of Automation
Company Profile
In 1967 MGI was founded by Robert M. Butler to offer the first substrate (silicon wafer) handling solutions to the semiconductor industry.
In 1976 MGI unveiled model 677. The industries first automated substrate (silicon wafer) handling solution.
In 1986, MGI unveiled the Phoenix mass wafer transfer system where electrically operated stepper motors permitted precise movement without the possibility of introducing particulate contamination that sometimes can occur with pneumatic systems. The stepper motor system dramatically reduced the level of particle counts and offered smoother, more reliable operation.
The Future of Automation
Company Profile
Since then numerous upgrades and new models, all of them fully electric, with a wider range of options and accessories have kept MGI the world leader in wafer transfer systems. All of the current systems are software controlled and interface with computers to download data to automate the fabrication process even further.
The Current generation of wafer transfer systems are completely robotic with optical recognition, automatic sensing and console viewing of all data for system operation.
The Future of Automation
Specifications
• • • • •
WPH on batch transfer is 2,100 Wafers.
WPH on Align, Map &OCR Read is 1,000 Wafers.
WPH on Align,Map & OCR Read & Sort is 270 Wafers Dimensions: 38” L x 23.5 D” x 35”H.
Dimensions 200mm: 49” L x 22.250 D x 43” T
• • •
UPTIME = 99.6% MTBF = 2,000 Hours MTTR = .5 Hours
The Future of Automation
Reliability Data
Particle Check
Test
Contact Free Read Time (mappting+alignment+OCR) Batch Wafer Transfer Mono Wafer Transfer Pick & Place Wafer Scratch Test: Include Batch Transfer and Mono Transfer Scribe Read Misread Wafer ID's
Specs
No Particles should be added (zero adders) .16 um 24 Bare Si wafers < 3 Minutes 24 Bare Si wafers < 60 Seconds 6 Bare Si wafers < 2 Minutes No cross or double slotting of any wafers Minimum 25 wafers No Scratches allowed on any wafers 24 Bare Si wafers. Read accuracy > 95% 24 Bare Si wafers. Wafer ID misread < 1%
The Future of Automation
Service
ONE YEAR WARRANTY EXCLUDING WAFER CONTACT PARTS EXTENDED WARRANTY AVAILABLE INSTALLATION AND TRAINING 24 HOUR TOLL FREE SERVICE 800-TEL-SERV
The Future of Automation
MGI SRT09043V8-X-U
For More information contact your local MGI Electronics sales representative or call 1-800-TEL-SERV A current listing of our products is available at www.mgielectronics.com
The Future of Automation