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MGI Electronics Easy Reader/Sorter

History

Specifications

Reliability Data

Service

The Future of Automation

Company Profile

In 1967 MGI was founded by Robert M. Butler to offer the first substrate (silicon wafer) handling solutions to the semiconductor industry.

In 1976 MGI unveiled model 677. The industries first automated substrate (silicon wafer) handling solution.

In 1986, MGI unveiled the Phoenix mass wafer transfer system where electrically operated stepper motors permitted precise movement without the possibility of introducing particulate contamination that sometimes can occur with pneumatic systems. The stepper motor system dramatically reduced the level of particle counts and offered smoother, more reliable operation.

The Future of Automation

Company Profile

 Since then numerous upgrades and new models, all of them fully electric, with a wider range of options and accessories have kept MGI the world leader in wafer transfer systems. All of the current systems are software controlled and interface with computers to download data to automate the fabrication process even further.

 The Current generation of wafer transfer systems are completely robotic with optical recognition, automatic sensing and console viewing of all data for system operation.

The Future of Automation

Specifications

• • • • •

WPH on batch transfer is 2,100 Wafers.

WPH on Align, Map &OCR Read is 1,000 Wafers.

WPH on Align,Map & OCR Read & Sort is 270 Wafers Dimensions: 38” L x 23.5 D” x 35”H.

Dimensions 200mm: 49” L x 22.250 D x 43” T

• • •

UPTIME = 99.6% MTBF = 2,000 Hours MTTR = .5 Hours

The Future of Automation

Reliability Data

Particle Check

Test

Contact Free Read Time (mappting+alignment+OCR) Batch Wafer Transfer Mono Wafer Transfer Pick & Place Wafer Scratch Test: Include Batch Transfer and Mono Transfer Scribe Read Misread Wafer ID's

Specs

No Particles should be added (zero adders) .16 um 24 Bare Si wafers < 3 Minutes 24 Bare Si wafers < 60 Seconds 6 Bare Si wafers < 2 Minutes No cross or double slotting of any wafers Minimum 25 wafers No Scratches allowed on any wafers 24 Bare Si wafers. Read accuracy > 95% 24 Bare Si wafers. Wafer ID misread < 1%

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Service

 ONE YEAR WARRANTY EXCLUDING WAFER CONTACT PARTS  EXTENDED WARRANTY AVAILABLE  INSTALLATION AND TRAINING  24 HOUR TOLL FREE SERVICE 800-TEL-SERV

The Future of Automation

MGI SRT09043V8-X-U

For More information contact your local MGI Electronics sales representative or call 1-800-TEL-SERV A current listing of our products is available at www.mgielectronics.com

The Future of Automation