Lampoly etch profiles Courtesy of Rishi Kant (Coral name: rik) Performed: 11/18/08 Wafer: Silicon substrate patterned with a thermal oxide hard mask (6000 angstroms. | slideum.com

Lampoly etch profiles Courtesy of Rishi Kant (Coral name: rik) Performed: 11/18/08 Wafer: Silicon substrate patterned with a thermal oxide hard mask (6000 angstroms.

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Transcript Lampoly etch profiles Courtesy of Rishi Kant (Coral name: rik) Performed: 11/18/08 Wafer: Silicon substrate patterned with a thermal oxide hard mask (6000 angstroms.