Transcript Slide 1
SEMICON West 2006 STEP
Methods to Measure/Improve
Equipment Productivity
Revision Plans for
SEMI E10 / E35 / E58 / E79 /
E116 / E124
David L. Bouldin
Texas Instruments Incorporated
[email protected]
Revision Plans for SEMI E10
SEMI E10-0304E
Specification for Definition and Measurement of
Equipment Reliability, Availability, and Maintainability
(RAM)
E10 Revision Task Force (TF) working on revision
to:
• Convert the multi-path cluster tool RAM metrics
into official E10 metrics vs. supplementary ones.
• Harmonize terminology between E10 and E79.
Plan to Yellow Ballot during Spring 2007 cycle.
July 12, 2006
SEMICON West 2006 STEP
2
Revision Plans for SEMI E35
SEMI E35-0305
Guide to Calculate Cost of Ownership (COO) Metrics for
Semiconductor Manufacturing Equipment
Equipment COO TF working on revision to:
• Add new content on how to handle calculating COO for
measurement, inspection, and test equipment.
• Add more inputs/guidance related to environmental,
health, and safety (EHS) cost elements.
Plan to Yellow Ballot during Fall 2006 cycle.
July 12, 2006
SEMICON West 2006 STEP
3
Revision Plans for SEMI E58
SEMI E58-0703
Automated Reliability, Availability, and Maintainability
Standard (ARAMS): Concepts, Behavior, and Services
and
SEMI E58.1-0697 (Reapproved 0703)
SECS-II Protocol for Automated Reliability, Availability,
and Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
No active TF currently working on revision.
Due for mandatory 5-year review in 2008.
July 12, 2006
SEMICON West 2006 STEP
4
Revision Plans for SEMI E79
SEMI E79-0304
Specification for Definition and Measurement of
Equipment Productivity
Equipment Productivity Metrics TF revising to:
• Redefine “virtual machines” with reference to fundamental
quantities: theoretical production time, equipment uptime,
and total time, but without changing calculation results.
• Harmonize terminology between E10 and E79.
• Make significant editorial changes for clarity and
consistency.
Yellow Balloted during SEMICON 2006 cycle.
July 12, 2006
SEMICON West 2006 STEP
5
Revision Plans for SEMI E116
SEMI E116-0706
Provisional Specification for Equipment Performance
Tracking
and
SEMI E116.1-0706
Specification for SECS-II Protocol for Equipment
Performance Tracking
TF completed original standards in 2002 and 2003.
TF completed latest revisions in early 2006 and
discharged.
Due for mandatory 5-year review in 2011.
July 12, 2006
SEMICON West 2006 STEP
6
Revision Plans for SEMI E124
SEMI E124-1103
Provisional Guide for Definition and Calculation of Overall
Factory Efficiency (OFE) and Other Associated FactoryLevel Productivity Metrics
No active TF currently working on revision, but plan
to reactivate Factory Productivity Metrics TF to:
• Remove Provisional status.
• Harmonize terminology with E10 and E79.
Due for mandatory 5-year review in 2008.
July 12, 2006
SEMICON West 2006 STEP
7
SEMI NA Metrics Technical Committee
NA METRICS COMMITTEE (SC129)
C: David Bouldin – TI
C: Tom Pomorski – Brooks Automation
C: TBD
TE: Carolyn Busing – Self
TA: TBD
SE: Susan Turner – SEMI
Equipment COO TF
L: Daren Dance – WWK
L: David Bouldin – TI
E35
Measurement
Systems Analysis TF
L: TBD
L: TBD
Equipment
Documentation TF
L: David Bouldin – TI
L: Kevin Lanham – TEL
July 12, 2006
Metrics
Education/Adoption SC
L: Tom Pomorski – Brooks Automation
L: Lisa Pivin – Intel
STEPs
Equipment Productivity
Metrics TF
L: Tom Pomorski – Brooks Automation
E79
Film Mechanical
Testing TF
L: Andrew McKerrow – TI
L: TBD
SEMICON West 2006 STEP
E10 Revision TF
L: Sal DiIorio – Semi-Tech Group
L: Michael Werre – Intel
C
L
TF
SE
TA
TE
SC
VC
Legend
Chair/Co-Chair
Leader
Task Force
Standards Engineer
Technical Architect
Technical Editor
Subcommittee
Vice Chair
ESD/ESC TF
L: Arnold Steinman – Ion Systems
E10
Factory Level Prod.
Metrics TF (Inactive)
L: Ron Billings – FABQ/ Ga. Tech.
L: Jim Irwin – Irwin Consulting
E124
RF Diagnostics TF
L: John Pace – Si Automation
L: John Caughman – ORNL
L: Jeff Lexa – Bird
EMC TF
L: Vladimir Kratz – Credence
L: Mark Frankfurth – Cymer
International Environmental
Contamination Control TF
L: Jürgen Frickinger– Fraunhofer-IISB
L: Mikio Furukawa – Shin-Etsu Polymer
L: Rob Henderson – Yield Service Int’l
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