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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity Revision Plans for SEMI E10 / E35 / E58 / E79 / E116 / E124 David L. Bouldin Texas Instruments Incorporated [email protected] Revision Plans for SEMI E10 SEMI E10-0304E Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) E10 Revision Task Force (TF) working on revision to: • Convert the multi-path cluster tool RAM metrics into official E10 metrics vs. supplementary ones. • Harmonize terminology between E10 and E79. Plan to Yellow Ballot during Spring 2007 cycle. July 12, 2006 SEMICON West 2006 STEP 2 Revision Plans for SEMI E35 SEMI E35-0305 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Equipment COO TF working on revision to: • Add new content on how to handle calculating COO for measurement, inspection, and test equipment. • Add more inputs/guidance related to environmental, health, and safety (EHS) cost elements. Plan to Yellow Ballot during Fall 2006 cycle. July 12, 2006 SEMICON West 2006 STEP 3 Revision Plans for SEMI E58 SEMI E58-0703 Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1-0697 (Reapproved 0703) SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services No active TF currently working on revision. Due for mandatory 5-year review in 2008. July 12, 2006 SEMICON West 2006 STEP 4 Revision Plans for SEMI E79 SEMI E79-0304 Specification for Definition and Measurement of Equipment Productivity Equipment Productivity Metrics TF revising to: • Redefine “virtual machines” with reference to fundamental quantities: theoretical production time, equipment uptime, and total time, but without changing calculation results. • Harmonize terminology between E10 and E79. • Make significant editorial changes for clarity and consistency. Yellow Balloted during SEMICON 2006 cycle. July 12, 2006 SEMICON West 2006 STEP 5 Revision Plans for SEMI E116 SEMI E116-0706 Provisional Specification for Equipment Performance Tracking and SEMI E116.1-0706 Specification for SECS-II Protocol for Equipment Performance Tracking TF completed original standards in 2002 and 2003. TF completed latest revisions in early 2006 and discharged. Due for mandatory 5-year review in 2011. July 12, 2006 SEMICON West 2006 STEP 6 Revision Plans for SEMI E124 SEMI E124-1103 Provisional Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated FactoryLevel Productivity Metrics No active TF currently working on revision, but plan to reactivate Factory Productivity Metrics TF to: • Remove Provisional status. • Harmonize terminology with E10 and E79. Due for mandatory 5-year review in 2008. July 12, 2006 SEMICON West 2006 STEP 7 SEMI NA Metrics Technical Committee NA METRICS COMMITTEE (SC129) C: David Bouldin – TI C: Tom Pomorski – Brooks Automation C: TBD TE: Carolyn Busing – Self TA: TBD SE: Susan Turner – SEMI Equipment COO TF L: Daren Dance – WWK L: David Bouldin – TI E35 Measurement Systems Analysis TF L: TBD L: TBD Equipment Documentation TF L: David Bouldin – TI L: Kevin Lanham – TEL July 12, 2006 Metrics Education/Adoption SC L: Tom Pomorski – Brooks Automation L: Lisa Pivin – Intel STEPs Equipment Productivity Metrics TF L: Tom Pomorski – Brooks Automation E79 Film Mechanical Testing TF L: Andrew McKerrow – TI L: TBD SEMICON West 2006 STEP E10 Revision TF L: Sal DiIorio – Semi-Tech Group L: Michael Werre – Intel C L TF SE TA TE SC VC Legend Chair/Co-Chair Leader Task Force Standards Engineer Technical Architect Technical Editor Subcommittee Vice Chair ESD/ESC TF L: Arnold Steinman – Ion Systems E10 Factory Level Prod. Metrics TF (Inactive) L: Ron Billings – FABQ/ Ga. Tech. L: Jim Irwin – Irwin Consulting E124 RF Diagnostics TF L: John Pace – Si Automation L: John Caughman – ORNL L: Jeff Lexa – Bird EMC TF L: Vladimir Kratz – Credence L: Mark Frankfurth – Cymer International Environmental Contamination Control TF L: Jürgen Frickinger– Fraunhofer-IISB L: Mikio Furukawa – Shin-Etsu Polymer L: Rob Henderson – Yield Service Int’l 8