Transcript SEMI S2 Revision Management

SEMI TECHNICAL EDUCATION PROGRAM –
SEMI S2 and What is New For 2006
SEMI S2 Revision Management
SEMICON West 2006
James Beasley
Intel Assignee to International SEMATECH
ESH Division
Background – SEMI S2 Revision
• SEMI regulations require review of EHS
Guidelines every 5 years
• Technical and editorial changes can be
approved by the EHS Committee on any
ballot cycle
– 7 ballot cycles a year
2
Jan 1, 2006
Event, Venue information
Problem Statement
• After the publication of SEMI S2-0200 equipment and end
users became frustrated with the EHS Committee’s
perceived inability to control revision of SEMI S2
– S2-93A, S2-0200, S2-0200E, S2-0302, S21102, S2-0303, S2-0703
• Difficult to control purchase and configuration specs
• MESSC was asked in September 2002 to develop a
solution to allow the EHS committee to manage technical
changes to SEMI S2
– Solution would be consistent with SEMI Regulations
– Editorial changes could continue with letter changes, i.e.
S2-93, S2-93A, etc.
3
Jan 1, 2006
Event, Venue information
Proposed Solutions
• Option 1: Effectivity and Withdrawal Dates
– Line item change processed under the current methods
with the exception that the balloted line item would also
have an "Effectivity Date" and "Withdrawal Date" identified
as part of the balloted text.
– Once the line-item has passed the ballot, the document
will be updated, HOWEVER, the original text would
remain in the original document until the balloted
"Withdrawal Date".
– No impact on existing Standards regulations.
EXAMPLE:
Line item change to Section X.Y.Z
Section X.Y.Z {Existing Text} This section will be withdrawn on MM/YYYY
Section X.Y.Z.A {Balloted Change} This section has an Effectivity Date of
MM/YYYY and will replace the existing X.Y.Z text.
4
Jan 1, 2006
Event, Venue information
Proposed Solutions
• Option 2: Publish balloted and approved changes
as Related Information attached to current
revision of S2
– Would have required implementation of a
regulation change
– Voting on each item twice raised the possibility
that a particular change may not be accepted
for the overall text of the revised document
• This option was not selected
5
Jan 1, 2006
Event, Venue information
Dates of Effectivity for S2 Revisions
• Benefit of “Dates of Effectivity” approach
– EHS Committee determines the effectivity date of
balloted text without impeding the regular process of
balloting and approving changes within existing
SEMI regulations
– Approved Changes are easily available for industry
readiness
• 6 changes were successfully integrated into
S2-0703 with Delayed Effectivity (new version
S2-0706)
6
Jan 1, 2006
Event, Venue information