Transcript Document 7869089

SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Practical Implementation of Interface A
on a Novellus Gamma 2130 photoresist
strip tool
Jaideep Jain
Sr. Director, Software and Controls Engineering
Novellus Systems, Inc.
Russell Fleming
Sr. Manager, Advanced Equipment and Process Control
Novellus Systems, Inc.
Dave Faulkner
EVP, Sales and Marketing
Cimetrix, Inc.
11 April 2005
SEMICON Europa 2005
- Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Agenda
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Prototype Description
Gamma 2130
System Overview
Lessons Learned
Conclusions
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Interface A Prototype Description
• COMPLIANCE
– Full Compliance with all Interface A / EDA standards
– E-120, E120.1, E-125, E125.1, E-132, E132.1, E134, E134.1
• PERFORMANCE
– Performance optimized to exceed SEMI requirements
– High speed DCIM (Data Collection Interface Module)
• CONFIGURABILITY
– Flexible, scalable Equipment Modeler & Runtime Engine
– Flexible data input (including add-on sensors and other nonWindows platforms)
– Unique solutions for security, buffering, and synchronization
– Tools for design, deployment, roundtrip testing,
configuration management and maintenance
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Gamma 2130
Best of Breed for 300mm Strip
A Robust, Production-Worthy 300mm Plasma Strip System
• Highest productivity
– >20% higher than the nearest
competitor
• Process flexibility
– Wide array of strip applications
– Demonstrated extendibility to 45nm
• Production-proven reliability
– >93% availability at multiple
customers
• Large installed base
– PTOR at large logic, memory and
foundry fabs
• World wide support infrastructure
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
CIMPortal System Architecture
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Interface A Prototype System Overview
TCP/IP
Data
Collection
Novellus Real Time
Controller
Athena™ Server
Novellus GUI
Athena™ Knowledge Base
Cimetrix FA S/W
CIMPortal EDA Server
E134 DCP
Consumer
E132, E125,
E134
Equipment Control System
Proprietary TCP/IP Connection
EDA Client Emulator
CIMPortal Client Tools
CIMPortal Administration Tools
CIMPortal Database Client
CIMPortal Text Client
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Data Collection Concept
Fab Host
Fab Host
HSMS
Interface A
CIMPortal
Host 1-n
Multihost
CIMConnect
DCIM
GEM
Translation
CIMConnect API
CIM300 API
Equipment Control
System
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Lessons Learned
• Integration difficulties with existing standards
– E116 is difficult to map from GEM to E125 because of each EPT
object having its own single event for the state machine
– It would be nice to have SemiObjTypeInstance for
SubstrateLocation, EPTTracker, and BatchLoc objects that are
static objects. The type would include a ObjID for the static
object and an SemiObjTypeRef to the SEMIObjType of the object
• Data Collection Plans
– Current restriction of attaching an event to a state machine could
lead to the creation of many state machines or of not mapping
events currently provided through GEM to E125
– UID for elements could hinder using "common components" for
tools from the same vendor if not implemented correctly
– Equipment suppliers and IC makers need to work together to
decide on the type of data available for collection. Tool suppliers
should provide tested built-in plans that balance data quality and
tool performance while providing the most amount of data to the
IC maker
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Lessons Learned
• Security
– Security for SSL is complex and difficult to use given the required
human interaction to create and maintain certificates
– E132 does not be define how to use SSL certificates (time, validation,
etc.)
– Certificate server implementation should use standards to prevent
multiple implementation formats
• Performance
– Size of E125 metadata structure response can be enormous (1-n MB,
3 times size of model XML file) so this should be done sparingly
– 1,600 parameters on this tool equates to over 26,000 lines (1.3 MB) of
XML in the model. Care must be taken to ensure that the models are
accurate and up to date
– IC makers should work with the equipment suppliers to determine poll
rates that are not faster than the tool’s control system can supply fresh
data
– Tool design should provide capabilities to buffer or throttle data such
that over sampling of data does not overwhelm the tool and affect tool
performance
– Data gathering technique has a larger impact on performance than
data serialization
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Conclusions
• Novellus & Cimetrix successfully demonstrated a
fully working EDA interface
• Performance was not a problem with single or
two clients
– Tested at 1Hz and 10Hz with one and two clients
– 1000 VIDs at 1Hz or 100 VIDs at 10Hz showed
minimal CPU usage
• No major issues with the EDA standards were
identified
• Many good suggestions were identified and given
to ISMI
• Novellus plans for Interface A deployment during
2005
11 April 2005
SEMICON Europa 2005 - Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
Thank you!
11 April 2005
SEMICON Europa 2005
- Munich, Germany
SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
E132 Standards Compliance
11 April 2005
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E132 - Equipment Client Authentication and Authorization
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Authentication services
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Authorization services
11.2
Access control via Access Control List (ACL)
11.2.9
Role-based authorization
11.2.10 Authorization privileges
12.3.2
Security administration operations
12.3.2.1 GetDefinedPrivileges
12.3.2.2 GetACL
12.3.2.3 AddACLEntry
12.3.2.4 DeleteACLEntry
12.3.2.5 GetActiveSessions
12.3.2.6 SetMaxSessions
12.3.2.7 GetMaxSessions
12.4
Equipment console administration interface
13.2
Authenticated session management
13.2.3
PersistSession
13.2.4
SessionPing
13.2.5
CloseSession
13.2.6
EstablishSession
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All communication and authenticated session state models
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Client Interface
15.1.1
SessionPing
15.1.2
SessionFrozen
15.1.3
SessionClosed
Implemented in Prototype
SEMICON Europa 2005 - Munich, Germany
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SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
E134 Standards Compliance
11 April 2005
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E134 - Data Collection Management
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Data Collection Management Interface
9.1.2.2
DefinePlan
9.1.2.3
GetDefinedPlanIds
9.1.2.4
GetPlanDefinition
9.1.2.5
ActivatePlan
9.1.2.6
GetActivePlanIds
9.1.2.7
DeactivatePlan
9.1.2.8
DeletePlan
9.1.2.9
GetParameterValues
9.1.2.10
GetObjTypeInstanceIds
9.1.2.11
GetCurrentPerformanceStatus
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Data Collection Plan Privileges
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Data Collection Plan Definition
11.1.2.2
intervalInMinutes (i.e., buffering)
11.1.2.2
isPersistent
11.1.3
EventRequest
11.1.4
ExceptionRequest
11.1.5
TraceRequest
11.1.5.1
collectionCount
11.1.5.1
groupSize
11.1.5.1
isCyclical
11.1.5.5
startOn Triggers
11.1.5.5
stopOn Triggers
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Data Collection Plan State Models
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Operational Performance Monitoring
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Data Representation
14.1.3
Event Report
14.1.4
Exception Report
14.1.5
Trace Report
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Data Collection Plan Notifications
15.1.4
NewData
15.1.5
PerformanceWarning
15.1.6
PerformanceRestored
15.1.7
DCPDeactivation
15.1.8
DCPHibernation
Feature Description
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SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
E125 Standards Compliance
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E125 - Equipment Self Description (ESD)
9.1
Metadata Access
9.1
EquipmentMetadataManager
9.1.2.1 GetUnits
9.1.2.2 GetTypeDefinitions
9.1.2.3 GetStateMachines
9.1.2.4 GetSEMIObjTypes
9.1.2.5 GetExceptions
9.1.2.6 GetEquipmentStructure
9.1.2.7 GetEquipmentNodeDescription
9.1.2.9 GetLatestRevision
9.1.2.10 NotifyOnRevisions
9.2
MetadataClient
9.2.2.1 MetadataRevised
10.1
Management of Equipment Metadata
10.2
Equipment Physical Structure as defined by E120 / E120.1
10.3
Equipment Node Description
10.4
Parameters
10.5
Types
10.6
Units
10.7
Exceptions
10.8
State Machines
10.9
ObjTypes
Feature Description
Implemented in Prototype
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SEMI Standards Workshop on e-Manufacturing and e-Diagnostics
E125 & 300mm Standards Compliance
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E120 – Common Equipment Model
7.3
CEM object definitions made available electronically to the factory host
8.5.4.1 Equipment Class
8.5.4.2 Module Class
8.5.4.3 Subsystem Class
8.5.4.4 IODevice Class
8.5.4.5 Material Location Class
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Standard
E37 High-Speed SECS Message Services (HSMS)
E40 Standard for Processing Management
E84 Specification for Enhanced Carrier Handoff
E87 Specification for Carrier Management
E90 Specification for Substrate Tracking
E94 Provisional Specification for Control Job Management
11 April 2005
SEMICON Europa 2005 - Munich, Germany
Implemented in Prototype
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