Annual Report At NREL.ppt
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Transcript Annual Report At NREL.ppt
Annual Report
Extention to PVSCAN
Artak Hambarian
NREL, August, 2007
Outline
The goal of the project
Preliminary calculations (excel)
Block diagram
Components:
+ Mechanics;
+ Optics;
+ Analog Electronics;
+ Digital Electronics/Data Streaming;
+ Motion Control;
+ Software.
Providers
Current Status
The goal of the project
To achieve rapid polar scanning of
semiconductor wafers up to 300
mm (12”) in diameter for
specularity detection with resolution
of 10µ in the first phase, and 1-2µ
in the second phase
In the second phase PL and OBIC
can be added, Cartesian scan
employed.
Preliminary calculations
Modes of polar scan: constant
angular velocity (CAV); constant
linear velocity (CLV).
CAV: the number of dots on ONE
loop defines the data acquisition
rate at a given rpm.
CLV: the number of dots on the
LARGEST loop defines the data
acquisition rate at a given rpm.
CAV and CLV
Number of points = N
Number of points = N/2
Preliminary calculations (excel)
Wafer size, mm
RPM
Resolution, micron
Scan time, minutes
Total information, bytes
Information flow rate, 2 ch., B/s
Readout frequency, Hz
300
3,000
10.0
5.0
5,654,866,776
9,424,778
4,712,389
300
3,000
3.3
15.0
50,893,800,988
28,274,334
14,137,167
300
3,000
1.1
45.0
458,044,208,893
84,823,002
42,411,501
Preliminary calculations (excel) 2
Wafer size, mm
RPM
Resolution, micron
Scan time, minutes
Total information, bytes
Information flow rate, 2 ch., B/s
Readout frequency, Hz
300
3,000
10.0
5.0
5,654,866,776
9,424,778
4,712,389
300
3,000
3.3
15.0
50,893,800,988
28,274,334
14,137,167
300
2,200
1.1
61.4
458,044,208,893
62,203,535
31,101,767
Block Diagram
Linear stage, encoder, r
Optical probe
Analog
amplifier
wafer
Spindle, j
encoder
Motion
Control
ADC, Data
streaming,
PC, User
Innterface,
Drivers,
VI-s.
Components
Mechanics: table, granite substrate,
spindle, vacuum chuck, linear stage.
Optics: optical probe
Motion Control: encoders, multipliers,
processor
Analog Electronics: amplifiers
Digital Electronics/Data Streaming: ADCs, Counter, Processor, PXI/…e.
Software: User Interface, VI-s, drivers,
PC transformation, pattern recognition,
storage management, etc.
Mechanics, requirements
Mechanical design
Mechanics: table support
Mechanics
Table:
- designed by AUA and YPI;
- to be manufactured by YPI
Other components: granite
substrate, spindle, vacuum chuck,
linear stage:
- designed by AUA and YPI;
- to be manufactured by AeroTech
Inc, Pittsburg, PA.
Optics
Optical probe, in process, to be
designed and manufactured by
NREL.
Laser:
- CW
- Stability
- Noise
Photodetectors (PD): low noise,
high speed avalanche PD.
Analog Electronics: amplifiers
Thermal Stability
Noise
Input/output impedances to deal
with capacities of the photodiodes.
Output impedances to deal with
ADC (50 W input through coaxial cable).
Trans-Impedance Preamplifier
Motion Control, Data streaming,
Synchronization
Mouse
Keyboard
Monitor
Chassis NI PXIe-1062Q
Controller
PXI
Express
NI PXIe-8105
24 Bit Coordinates
Rotation
DAQ Stop Pulse
PMAC
I/O Module
PXI
Express
NI PXIe-6259
and
Motion
Encoder Signal
Systems
Multiplier
Pulses From
Rotation System
Counter Module
PXI
NI PXI-6602
Pulses From Radial
Motion System
Synch.
and
Clocking
Digitizer Module 1
PXI
NI PXI-5142
Signal 1.1
From
4 Photo
Sensors
Analogue Signal
Signal 1.2
Signal 2.1
Amplifier
Digitizer Module 2
NI PXI-5142
Signal 2.2
PXI
PXI Express / PXI
DAQ Start Pulse
Radial
Motion Control
Performs the displacement and takes the signal
about the displacement from encoders
Provides displacement pulses at clock
frequency (40 MHz, through multiplier) and
absolute coordinate at lower frequency (4 kHz).
Communicates through PCI or PXI bus.
Performs backlash and other software driven
controls.
Data streaming
Analog to digital conversion (ADC)
Counts of steps and synchronization
Digital signal processing for:
- interleaving: omission of signals that do
not carry information
- on-fly pattern recognition (here or in the
main processor)
- laser noise cancelling
- Other noise reduction algorithms (in
process)
Data streaming
Mouse
Keyboard
Monitor
Chassis NI PXIe-1062Q
Controller
PXI
Express
NI PXIe-8105
24 Bit Coordinates
Rotation
DAQ Stop Pulse
PMAC
I/O Module
PXI
Express
NI PXIe-6259
and
Motion
Encoder Signal
Systems
Multiplier
Pulses From
Rotation System
Counter Module
PXI
NI PXI-6602
Pulses From Radial
Motion System
Synch.
and
Clocking
Digitizer Module 1
PXI
NI PXI-5142
Signal 1.1
From
4 Photo
Sensors
Analogue Signal
Signal 1.2
Signal 2.1
Amplifier
Digitizer Module 2
NI PXI-5142
Signal 2.2
PXI
PXI Express / PXI
DAQ Start Pulse
Radial
Data streaming
The sampling rate of analogue signals is
assumed to be from 2.5Ms/sec to
40Ms/sec
ADC resolution is 14 bit, we use only 8 bit.
for four sensors requires from
4x8bitx2.5Ms/sec = 80Mbit/sec to
4x8bitx40Ms/sec = 1.28Gbit/sec
summary capacity of communication
channel and signal processing speed
Data streaming
The system is based on PXI express
/ PXI components mounted into the
NI PXIe-1062Q chassis
consists of:
- two NI PXI-5142 digitizers,
- NI PXI-6602 counter,
- NI PXIe-6259 Input/Output
module and
- NI PXIe-8105 controller.
ADC-s, NI PXI-5142 digitizers
Each of the two digitizers receives two amplified analogue
signals from photo sensors
On board signal processing
gain control, offset control, frequency translation, filtering,
decimation and interleaving
On board DSP
The filtering is employed in level selection
operation during the high precision
scanning, which has the reason not to
record the data points when scanned
segment is clear from defects.
By choosing the threshold level equal to
the background noise it will be possible to
discard all not necessary sampled data
points.
On board DSP
The interleaving process allows to
combine the necessary data points into
data packets by means of the initial
buffering and then to transmit packets at
lower data rate without transmission of
zero information bytes.
It strongly decreases the data
transmission rate through the PXIe/PXI
bus
Synchronization - I/O PXIe-6259
module
Laser
CW
Stability
Noise
Noise cancelling algorithm.
Software
User Interface
Polar Cartesian transformation
VI-s for interleaving
On-fly pattern recognition and
indication
Storage management (making
smaller files for storage)
Simultaneous various size files
creation for easy zooming.
User Interface
System Integration
Excel