Transcript 3D displays
Optical MEMS Laboratory - OML Prof. Dr. Hakan Ürey Koç University, Electrical Engineering RESEARCH AREAS •2D/3D Display and Imaging Systems •MEMS/NEMS sensors and actuators •Micro-optics and screen technologies •Optical system design Infrastructure OML is well-equipped for electrical, optical, mechanical design, test, and characterization Test Area Measurement Cleanroom Office Area Test Area Meeting Room Infrastructure OML is well-equipped for electrical, optical, mechanical design, test, and characterization Office Area Measurement Cleanroom Test Area Fabrication Cleanroom Projects -Industrial Funding (>10 projects) • • Microvision (USA, since 2002), Aselsan (TR), Fraunhofer IPMS • (DE), OPET (TR), Inventram (TR), Fotoniks (TR) • • - EC Funded Projects (7 projects) • ERC-Advanced (2014-2019) • FP7 STREP projects (MEMFIS, • HELIUM3D) • • FP7 IAPP Project • FP6 Networks (NEMO, 3DTV, MINOS) - TÜBİTAK (8 projects) • 5 projects completed • 3 projects on-going 3D displays (3D laser TV, wearable displays, head-worn projection displays); Pico-projectors and Laser scanners (world leader in MEMS scanners); Micro-optics (head-up-displays, exit pupil expanders); MEMS Spectrometers (MEMS-based Fourier transform infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers); Thermal imaging (MEMS based thermal detector array with optical readout; CMOS optical ROIC); Portable Nano-Biosensor (MEMS sensor array for multianalyte screening for diagnostics applications). Patents and Spin-Offs • Patent Licensing Agreements (consists a portfolio of about 25 patents) – Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel micro-optical screens – Fraunhofer IPMS (DE): MEMS spectrometers – Aselsan Inc. (TR): Thermal imaging sensor array – Inventram Inc. (TR): Biosensors for point-of-care diagnostics of multiple diseases. – Opet Inc. (TR): Tagging and identification of functional fluids • Spin-off companies from the lab – Tarabios (bio-tech) – Quantag (energy) OML Research on Emerging Display Tech., 3D, AR, and Human-Computer Interaction Wearable Displays Eyewear displays Pico-projectors 3D Picop Dynamic Pupil Tracker AR Bidirectional Screens Multi-viewer 3D 3D HMPD 3D Telepresence OML Research on MEMS Laser Scanners for Displays and Imaging Outer frame Comb-drive (Electromagnetic, MEMS) Yalcinkaya, JMEMS, 2006 Inner flexure Outer flexure (Electrostatic MEMS) Arslan, JMEMS, 2010 (Rotary Electrostatic, MEMS) Baran, JMEMS, 2012 (Thin Film Magnetic, FR4) Yalcinkaya, Sens&Act:A, 2007 (Piezoelectric, MEMS) Baran, JMEMS, 2012 (Microlens array on 2D MEMS Stage Gokce, JMEMS, 2010 (Integrated Electromagnetic, FR4) Isikman, Phot. Tech. Lett., 2009 Biosensors for POC Diagnostics: Immunosassay, Viscosity & Coagulation Tests READER Cartridge Optical Read-out Oscillating Cantilever Lock-in Amplifier Phase and Amplitude read-out Reader Ni Si CARTRIDGE Current Signal Generator Amplifier MEMS Chip Frequency Shift [ppm] 10000 1000 100 10 1 0,01 Coil for magnetic actuation Virus Detection Hep A Antigen 1 Hep A Antigen 2 Hep C Antigen Hep A Negative Control Hep C Negative Control 0,1 1 10 Concentration [ng/ml] Timurdogan et al, Biosens & Bioelec, 2011 Coagulation Measurement 100 Cakmak et al, Methods, 2013 150um Laser Spot Thermal Imaging Using Thermo-Mechanical Pixels and Optical Readout Single pixel 1st order Sensor Input Array (35um and 50um pixel sizes) Image and video acquisition using discrete optics MEMS/CMOS Integration 100 200 300 400 500 600 700 OML Research on MEMS FT Spectrometers FP7-Strep Project: MEMFIS Partners: Bruker, KOC, FhG-IPMS, VIGO, SOPRALAB, CTR, Teknikon IR Source fRES =462Hz Reference Laser -1st 0th PD 1st MEMS device Elliptic reflectors Sample Plane IR Detector Ataman, JMM, 2006 - Seren, JMEMS, 2012 Ferhanoglu, Opt. Exp., 2010 3µ m 70µ 70µ 217µ 217µ Comb m actuators m on the springs 364µ 438µ m 658µ 511µ658µ 585µ m m Grating fingers Summary • We’re open to collaboration in photonics, MEMS, and humancomputer interaction related projects • Photonics KET2014, suitable topics: – Biophotonics for screening of diseases – Sensing for safety and security • FET-Open projects • You can visit our lab today (Eng Z16) Contact: Prof. Dr. Hakan Urey E-mail: [email protected] Group Web Site: http://mems.ku.edu.tr