Advanced MM, MtM and Beyond CMOS Manufacturing Workshop

Challenges, Strategies, R&D Topics Dirk Beernaert, European Commission

Brussels, 16 December 2010

Outline



A look at the higher policy level

 Micro- and Nanoelectronics – A changing landscape  Micro- and Nano-electronics – EU policy and funding  Objectives of the Workshop  Summary

From 10 year Lisbon Strategy … to EUROPE 2020

•

UPDATE VISION TO POST-CRISIS WORLD

•

IMPROVE DELIVERY

EUROPE 2020: A EU strategy for smart, sustainable and inclusive growth

• Smart Growth:

knowledge and innovation economy

• Sustainable growth:

greener and competitive economy

• Inclusive growth:

high employment, knowledge people and social and territorial cohesion

5 EU Targets

– translated into national ones

7 Flagship initiatives

– EU & national action

COMMUNICATION FROM THE COMMISSION COM(2010) 2020

http://ec.europa.eu/eu2020/pdf/COMPLET%20EN%20BARROSO%20%20%20007%20-%20Europe%202020%20 %20EN%20version.pdf

Europe 2020: 5 EU Headline Targets

(translated in national and regional ones)

By 2020:

•

75 % (now 69) employment rate (% of population aged 20-64 years)

•

3% (now 1,8) Investment in R&D (% of EU’s GDP)

• “ 20/20/20” climate/energy targets met

(incl. 30% emissions reduction if conditions are right)

• < 10% (now 15) early school leavers

degree

& min. 40% (now 31) hold tertiary • 20 million less people (now 80) should be at risk of

poverty

Europe 2020

3 priorities, 7 flagship initiatives Communication COM(2010)2020 of 3.3.2010

A strategy for smart , sustainable and inclusive growth

•Innovation

Union

•Youth on the move •A Digital

Agenda for Europe

•Resource efficient Europe •An industrial

policy for the globalisation era

•An Agenda for new skills and jobs •European Platform against Poverty

http://ec.europa.eu/eu2020



EU2020 Flagship

TOWARDS AN INNOVATION UNION

Communication COM(2010)546 of 6.10.2010

Innovation Union ageing population.

will

advance scientific

boundaries, increase European competitiveness and help solve societal challenges such as climate change, energy and food security, health and an  Around 16,000 participants from research organisations, universities and industry, including about 3,000 SMEs, will receive funding. It is expected to create more than 165.000 jobs.

From idea to the market

Excellent Knowledge Base Access to finance Innovation Market

European innovation partnerships & international cooperation

EU2020 Flagship

The Innovation Union: targets

• Strengthen knowledge base, complete ERA – joint programming, education, skills, mobility researchers, cross border

cooperation, research infrastructures, …

• Improving framework conditions for business to innovate – single EU Patent, access to capital (VC), risk sharing, standards setting,

pre-commercial innovation procurement, …

• Set up 'European Innovation Partnerships' – Societal priorities and competiveness ! Development and deployment of

the technologies. Link research and innovation

• Better use of financial EU instruments to support innovation – structural and social funds

, rural development funds, R&D framework programme , CIP … EIB … and

streamline administrative

procedures …

• Strengthen partnerships in knowledge triangle (education, business,

research and innovation) and between knowledge clusters

– people, institutions, infrastructures, regions, …

http://ec.europa.eu/research/innovation-union

Industrial Policy for the Globalisation Era

EU2020 Flagship Communication COM(2010)614 of 28.10.2010

Putting Competitiveness and Sustainability at Centre Stage.

• Ensuring timely modernisation of industry – Innovation, knowledge and capital intensive industries • Master Globalisation: – emerging market competition, international value chains, raw materials, energy, new Framework conditions for global competitiveness incl. SMEs • Strengthen the single market and access to finance • Achieving a low-carbon resource efficient economy • Respond to emerging societal challenges: – security, health, aging, mobility • Strengthen industrial innovation performance • Key Sector initiatives – Transport, energy, environment • Exploit cooperation between (regional)

innovation clusters

EU2020 Flagship Fast and ultra fast internet access

A Digital Agenda for Europe

Every European Digital !

A vibrant digital single market Communication COM(2010)245 of 19.05.2010

Interoperability and standards Trust and security Enhancing digital literacy, skills and inclusion Research and innovation ICT-enabled benefits for EU society http://ec.europa.eu/information_society/digital-agenda

Outline presentation

 A look at the higher policy level 

Micro- & Nano-electronics – the global situation

 Micro- & Nano-electronics – EU policy plus FP & ENIAC  Objectives of the Workshop

Semiconductors as key enabling industry - Internet Services Providers - Games Service Providers WW$6300B / Europa $1600B - Broadcast - Telecom Operators Automotive - Industrial - Defense Medical - Space Electronics WW$1500B / Europa $315B

Semiconductors provide the knowledge & technologies that generate some 10% of global GDP.

2007 World GDP=65200BUS$ (ppp based) Semiconductors $256B / Europa $41B Source: IMF, ESIA, WSTS, Decision

The Supply Chain Today

Communications Industrial and Medical Global electronic market supply chain revenue 2008 ~1430B$ Systems 2009 ~1380B$ 2010 ~1440B$ 2008 ~275B$ Devices 2009 ~250B$ 2010 ~280B$ Equipment 2008 ~31B$ 2009 ~17B$ 2010 ~26B$ Material ~20B$

Source: Gartner, Ic Insights (2008-2009)

Military, Civil Aerospace, Security Data Processing Consumer Automotive

But Fab Cost Entry Barrier Explodes !

Source: IC-Insights, 01/2008

Changing business models

Global Consolidation: Number of Logic IDMs with Fabs.

European Chip makers are moving up the value chain :

From the hardware supply side into the final application

Delivery network Gateway mgmt Legislator regulations Service provider Content provider Content protection System integrator Application System mgmt Infrastructure Chip maker Software Semi equipment Wafer foundry Semi materials

IBS 2009, ST 2010

The evolving SC value chain / landscape

From a linear chain...

Eq.& Materials IDM Academia, Scientific Research Institu tions DISTI (branded) OEM Service providers (virtual) Network op.

(Consumer) Retail Businesses, Consumers, Authorities Source: ESIA ...

to a

networked

model

Academia, Scientific Research Institu tions Eq.& Materials IDM S/C Mfg Services:

• Foundry • SATS

Fabless

• • • •

IP Providers: IP blocks Software

(firmware, stacks, middleware, OS

) Design houses EDA ODM DISTI EMS Logistics service providers Module makers (branded) OEM Content Industry:

•

Providers

•

Aggregators

•

Service prov.

Service providers/ (virtual) network op.

(Consumer) Retail Distrib.

Businesses, Consumers, Authorities

Intel Dublin

Recommendations & Actions

Mastering Innovation

R&D

Give priority to the European-wide micro- / nanoelectronics R&D in framework programmes, public private partnerships (EUREKA, ETPs, JTIs), national programmes

Develop a European industrial innovation policy with nano- / microelectronics at its core Lead markets

Stimulate ‘market pull’ across Europe in chosen lead markets Health and wellness; transport and mobility; security and safety; energy and environment; communication; infotainment

Manufacturing

Launch a strategic European industry plan that aims at revitalising sc manufacturing capabilities in Europe.

Upgrading /converting of existing fabs.

Developing technology and manufacturing capabilities for devices in areas where Europe has strengths.

Education

Make micro- and nanoelectronics in education an objective Stimulate science and technology; awareness of the micro-/nano electronics innovation potential; foreign talent; research infrastructure as invention incubators Shaping the Future Source: ESIA

Nanoelectronics: Challenges ”Small, smaller, smarter” •

Keep research, manufacturing, integration & system competence in Europe?

IPR, lead markets, user-supplier relationships, regional innovation clusters.

•

Our part of global value chain:

equipment, manufacturing (incl. 450mm), SMEs

Policy & more efforts to keep Europe attractive for investments in semiconductor research & manufacturing and for its application in key lead markets

.

High on EU 2020 Agenda

Outline presentation

 A look at the higher policy level  Micro- & Nano-electronics – the global situation  Micro- & Nano-electronics – EU policy plus FP & ENIAC  Objectives of the Workshop

What can the European Commission do ?



policy



funding

EU levers for sustainable growth and jobs

Why an industrial policy for Nanoelectronics NOW?

financial & economic crises (B € losses – lack of capital for risk taking!) - globalisation (loss of jobs, loss of value added, loss of government income!) - fierce and growing competition from industry clusters in other regions driven by increased political and financial support .

“If Europe wants to achieve global competitiveness it has to have direct access to

state of the art processing technology and manufacturing

competencies.

Therefore the European Community should extend their Industrial Policy Framework by similar programs as in the Rest of the World in order to keep Europe’s Innovation driven Industry sustainably and globally competitive.”

Dr. J. Knorr

Urgent need for a competitive industrial policy, a project plan with detailed Objectives and estimated amount of resources !

Industrial Policy

Key Enabling Technologies Communication COM(2009)512 of 30.9.2009

Micro- and nanoelectronics, including semiconductors Photonics Preparing for our future: Developing a common strategy for key enabling technologies in the EU Advanced materials Biotechnology Nanotechnology Advanced manufacturing Systems http://ec.europa.eu/enterprise/sectors/ict/key_technologies

Identified Key Enabling Technologies (KET)

Communication COM(2009)512 of 30.9.2009

• • •

Importance of KETs

Driving

our competitiveness, our innovation potential and

knowledge-based economy

delivering new goods and services

Modernization of the industrial and research base

Creating regional knowledge

eco-systems

incl. clusters of

SMEs.

Defining KETs

• • • • • • •

Knowledge intensive R&D intensive Capital intensive (Multi-)Skill intensive Enable innovation, Multipliers Systemic relevance Nanotech, Micro- and Nanoelectronics ,

Photonics, Advanced Materials, Biotech    

High Level Group (25#): industries

, incl.

SMEs, research community member states EIB Make policy recommendations using existing instruments existing state aid rules, improve access to finance Make policy recommendation for EU2020, flagships and FP 8 Shared long term vision and A sense of partnership http://ec.europa.eu/enterprise/sectors/ict/key_technologies

Key enabling technologies and their contribution to Europe’s grand societal challenges

FP7-CIP/ICT Budget Profile: 70% increase in period 2011-13

M €

2007 2008 2009 2010 2011 2012 2013 TOTAL PF7 ICT 1.189

1.217

1.227

1.241

1.382

1.582

1.760

9.597

CIP 58 52 105 113 120

Financial support – FP7: master & shape research & development – CIP: ensure wider uptake & better use of research – + Regional and Structural Funds,…

135 149 732

Nanoelectronics ”Small, smaller, smarter”

- Advanced communication & computing components enabling pervasive applications Lower cost, higher performance and more functionality Enabled by Smart design and Smart manufacturing of Smart Components

Digital Society

•

Power consumption More than Moore: Diversification

Sensors Analog/RF Passives HV Power Biochips Actuators

130nm 90nm 65nm 45nm 32nm 22nm Information Processing Digital content SoC environment Non-digital SoC & SiP

Advanced Nanoelectronics Technology

• To stimulate

interaction of system and technology

to better explore European system competences.

• To address

energy efficiency

for mobile applications needs • Nanoelectronics products as

system enablers and solution providers

or sustainable manufacturing.

for global challenges as aging society, global warming, growing population • To prepare for

“beyond” traditional shrinking

(ITRS roadmap) 35 nm Gate Length

Manufacturing and Equipment assessment and Access

– Access to

nano-manufacturing and to advanced technologies

to be assured in Europe. – Access to world wide European suppliers, especially SMEs, need to be stimulated.

equipment

market for – Access to design tools fabrication and multi-project wafers for education, PhD and SMEs.

Semiconductor Equipment for Wafer Bonding with Plasma Activation EV Group, CEA-LETI, Soitec Ruthenium Atomic Vapor Deposition Competitiveness in Nanoelectronic Device Generations AIXTRON, Fraunhofer IISB, Infineon Munich Low Energy and Dose Implant Test SEMILAB, Fraunhofer IISB, ST Microelectronics Crolles II, NXP Crolles R&D Metrology Using X-Ray Techniques Jordan Valley, CEA-LETI, STMicroelectronics Crolles II, NXP Crolles R&D 3D Integration of Bulk Si Wafers EV Group, CEA-LETI, STMicroelectronics Crolles II

Very Advanced NanoE Components 2011-12

(Call 8: 26/07/11 - 17/01/12)

Topics and Target Outcome:

a) - Very advanced Si and non-Si switches, memories and interconnects (perf/ee) - Co-integration of non-Si, charge, spin, photon based devices on Si b) - Combined modelling, technology+ design work at circuit, device, material level for monolith and 3D integr of BeyondC + very adv. MtM on Si backbone

c) - Mfg solutions for integration/interfacing of Beyond CMOS + MtM with NanoCMOS - E&M solutions to manufacture and measure 1D + 3D Si, E&M assessment including 450 mm d)

- CSAs to

support 450 mm coordination

, develop strategies, attract young ones and link up globally to support IP creation and manufacture in Europe

2011 60M€ STREPs, IPs, CSAs

ENIAC Joint Undertaking as Public-Private Partnership Industry and R&D actors

Design Technologies Semiconductor Process & Integration Equipment, Materials & Manufacturing

Executive Dir. and secretariat

Commission and Public Authorities

Contracted public funding for cooperative projects in Nanoelectronics 400 350 300 250 200 150 100 50 0 ENIAC - National ENIAC - JU CATRENE FP others FP - nanoelectronics FET 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

First half of FP7 & first 3 calls of Eniac (2007-10): More than 500 M€ invested by EC in Semiconductors cooperative R&D systems excluded ! Photonics and Micro-/Nano-

Outline presentation

 A look at the higher policy level  Micro- & Nano-electronics – the global situation  Micro- & Nano-electronics – EU policy plus FP & ENIAC 

Objectives of the Workshop

Potential issues in the Manufacturing Workshop

Not exhaustive, just to sharpen the minds • Next generation of manufacturing plants

(MM)

• automation • clean room, green, energy, water, waste, … • 450 mm – upgrade in 300mm fabs - … • introduction next generation technology

(equipment, materials, EUV-e-beam,…..)

• Next generation manufacturing plants (

MtM, smart components - SoC)

•

300 mm, upgrade of existing fabs

• 3 D • flexibility, product mix,… • introduction next generation technologies ( • product specific issues

dimension, …)

• Next generation manufacturing plants

(MtM, SiP, integrated smart systems)

• packaging • 3D packaging • test, • system integration • Prototyping issues, foundry issues, …

Objectives of the Workshop

• Discuss Mfg Strategies of the SC Industry under changing R&D and

business models

• Learn about specific (adv. MtM, adv. MM/BC) challenges for all parts

of the value chain

• Discuss possible derived R&D topics • Define collaboration schemes (multi-disciplinarity, system level

integration)

•Produce, distribute Workshop report describing discussions and results •Use results as input for FP7 ICT WP2013, for FP8 and also for Eniac

Summary

• At Policy level understanding is developed that R&D and Innovation are the basis for prospering economies and societies • The SC industry has changed its R&D and business models •The public research programmes need use the opening opportunities by linking new policy and new industrial challenges

Specifics in the area of nanoelectronics manufacturing:

Find a balance between advancement of MM and diversification and development of new MtM technologies.

This workshop should discuss the different

strategies

of industry and Research and related

challenges

and

R&D topics

.

THANK YOU

[email protected]

Information Society and Media: http://ec.europa.eu/information_society http://cordis.europa.eu/fp7/ict/nanoelectronics/mission_en.html

European research on the web: http://cordis.europa.eu

http://www.eniac.eu

Innovation Union

European Innovation Partnerships EU2020 Flagship Communication COM(2010)546 of 6.10.2010

• Strenghten the knowledge base – Education & Skills - Completing ERA – Mobility of researchers – Cross-border operation – Research Infrastructure • A better equilibrium between Research & Innovation – Strong societal priorities – Reinforce industrial competitiveness • A good usage of financial instruments – Venture capital, risk sharing – Pre-commercial procurement for innovation – Structural funds & social funds to promote R&I – Framework, CIP

http://ec.europa.eu/research/innovation-union

EU2020 Flagship

Innovation Union

European Innovation Partnerships

• European Innovation Partnerships (EIPs) – challenge driven, stakeholder commitment, EU added value – Across the whole research and innovation chain – Strong focus on results, outcomes and impacts • 1 pilot – Active and healthy ageing • Potential others: – Smart Cities – Water-Efficient Europe – Supply of raw materials – Smart mobility – Agriculture

An industrial policy for the globalisation era

EU2020 Flagship Communication COM(2010)614 of 28.10.2010

• A new approach: – Policies directly targeting cost, price and innovative competitiveness of industry & sectors – Specific focus on key sectors (transport, energy, environment,…) – Promoting industrial innovation, closer linkage

to industrial research

A Digital Agenda for Europe

The Research & Innovation Pillar

• The Commission will leverage more private investment through – pre-commercial procurement and public-private partnerships – structural funds – 20% yearly increase of ICT R&D budget (at least for FP7) • The Commission will also – reinforce coordination and pooling of resources with Member States and industry – focus on demand- and user-driven partnerships – put measures for 'light and fast' access to EU funds – support joint ICT research infrastructures and innovation clusters,

eInfrastructures and cloud computing strategy

– develop new generation of web-based applications and services by supporting

standards and open platforms

• The Member States should – double annual public spending on ICT R&D in ways that leverage an equivalent

increase in private spending

– engage in large scale pilots in areas of public interest

••• 40

Advanced Nanoelectronics Technology

ITRS-ERD vision of the role of Beyond CMOS and More than Moore elements to form future extended CMOS platforms.

• Future developments in

extended-CMOS vision

markets.

Beyond CMOS and More than Moore as an

. No disconnection from the advanced silicon CMOS in order to keep impact of its results on the applications and • Needs of

hybridizing silicon

with molecular switches, ferromagnetic logic, spin devices and sensors in order to enable heterogeneous and morphic system architectures. •

Integrate-ability

of novel technology with CMOS and their

reliability

become key factors.

Semiconductors as key enabling industry Communications –

wired and wireless, mobile, RF connectivity solutions (Bluetooth, GPRS..), telecommunications, traditional telecom equipment, home networking equipment

Consumer -

entertainment, radio, TV, VCR, personal or home appliance, cameras, games, etc.

Industrial & Instrument

- lab, test, control and measurements

Automotive

– powertrain, safety management, body and convenience, engine controls entertainment...

Semiconductors are for the Information Society what grain was for the agrarian, and iron & steel were for the industrial society…

Computer & Office -

mainframe, peripheral office equipment and personal computers Shanghai Museum of Urban Development, 2004

Source WSTS

Europe 2020 – Innovation Challenge

(European Commission (2010); Communication from the Commission: EUROPE 2020 - A strategy for smart, sustainable and inclusive growth; COM(2010) 2020; Brussels, 03/03/2010) For effective deployment of KETs, it is, amongst other aspects, important to: (a) focus on an increased technology transfer and EU-wide supply chains; (b) focus on increased joint strategic programming and demonstration projects; (c) combine the deployment of KETs and climate change policy ; (d) promote demand through public procurement and via the Lead Market Initiative (e.g. protective textiles); (e) exchange experiences and best practices between Member States and at international level; (f) stimulate increased financial investment via EIB’s loan policy and venture capital financing; and (g) upgrade skills and provide appropriate training and education.

(h) equal and global playing fields (i) cooperation between knowledge clusters

The changing global landscape for the SC industry

•

Rapidly changing global landscape for the Semiconductor industry

– Since 10 years, Europe is steadily loosing market shares – – – Slowing down of market growth in value terms Increasing demand from consumer applications creates market potential while generating SC price decrease Increased pace of innovation & electronic product penetration – – – Skyrocketing cost increases are forcing alliances: CAPEX 20% sales Deverticalisation of the value chain and financial markets The landscape is driving the industry to 3 different manufacturing models, while maintaining and enhancing its process expertise is key • • • Memories and microprocessors manufacturing Logic products manufacturing More than Moore manufacturing

Summary of Trends & Convergence of Interests

Alternative scenarios based on an assessment of selected competitiveness factors Global Strength of European End-User Industry

Global industry leadership, Electronics value added driven

R&D Spending

R&D & innovation policies, research investment targets

Pre-competitive Co-operation / Partnership Effectiveness

Joint research and design centres, framework programmes, technology

Globally Effective EU Monetary Policies

Stability of exchange rates relative to other currencies

Educational System Reinforcement

Curricula, industry-university research, exchange programmes, brain retention

Strength of European Internal Market

End-user / consumer demand in Enlarged 25 EU Internal Market

Free & Fair Trade Policy

Reciprocal world free trade Environment, elimination of tariffs

European Labour Policies

Sectoral flexibility of working hours and employment conditions

Target Investment Support / Incentives Levels

Tax havens, access to capital, property incentives

EU Legislative Environment

Environment, safety & health, customs & security, IP rights

ICTs require raw materials:

The dynamics of two decades of computer chip technology development and their mineral and element impacts.

In the 1980s, computer chips were made with a palette of twelve minerals or their elemental components. A decade later, sixteen elements were employed. Today, as many as sixty different minerals (or their constituent elements) are used in fabricating the high-speed, high-capacity integrated circuits that are crucial to this technology.

Source: CT IC

Key enabling technologies and their contribution to Europe’s grand societal challenges

Get involved !

in 2011!

A strategy for

Europe 2020

smart , sustainable and inclusive growth FP8 / CIP II Key Enabling Technologies Regional Policy for Smart Growth (Structural Funds) Trade / External Policies/ Single Market

Multi-Annual Financial Framework 2014+