Transcript Slide 1

National Nanofabrication Centre
Centre for Nano Science and Engineering
IISc, Bangalore, India
Clean room administrative committee Meeting
TUMS Murthy
Jan 29 , 2013
TUMS Murthy
Cleanroom Admin Commitee Meeting
1
Action Points
Sl.No
Item
Owner
Status
1
a. To invite Chandrasekhar for the fire
drill at CeNSE and seek his help for
demonstrating fire fighting
equipments
b. To check with the original
manufacturer of the sensors for the
exact cost.
c. To provide a statistics on the annual
downtime for cleanroom
All the alarms installed to be checked
on Friday 11th Jan 2013 with the help
of third party
To solve the issue for Tecport sputter 2
Dr TUMS Murthy
a. Done
b.
Mr.Adinarayana Murthy
Done
a. To include Anelva RF sputtering
usage statistics also.
b. To include a slide about the
industry users using the cleanroom
c. To provide a report on the Oxford
workshop held at CeNSE
a. To include EVG bonder usage
statistics also.
b. To provide a report on the
Lithography workshop held at CeNSE
c. To check if litho wet benches can be
delivered by next week.
d. To update the trend charts with the
latest data.
Dr.Vijayaraghavan
a. Done
Dr.Gopal Hegde
a. Done
b. Done
c. To be supplied next week. Invoice
received.
d. Being Done
2
3
4
5
TUMS Murthy
Dr.Vijayaraghavan/Prof Anilkumar
Cleanroom Admin Commitee Meeting
Jan 29, 2013
2
Action Points
Sl.No Item
Owner
Status
6
To make a database of the industry
users using our facilities at CeNSE
Dr.Sanjiv Shrivastava
Done along with Dr.Girish Kunte
7
To correct the number of hits on
twiki page
Sreelekshmy
8
a. To add a poster with the list of
names of industries that has been
using the facility
b. To provide an update on the
income from industry users and to
give a projection on the expected
usage for next year.
Dr.Girish Kunte
Ongoing.
Alternate solution: Another plugin
for Usage statistics available. In the
process of installing it.
a.
b. Done
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
3
Operations
• Issue of training new users raised by Profs.
Ambarish and Manoj Varma
– Training slots are being reserved for equipment
having high demand
– New users encouraged to observe operation of
equipment outside their slots
– Independent users not allowed to book more than
a specified number of slots during normal shift
• Manual control, feature not automated
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
4
Operations
• Clean room AMC implementation has started
– PCW line in the clean room showing signs of
rusting at welded joints on the outside. Nano
Clean ( Madhu & Co) asked to come up with
solutions
– Proposal for passivation and biocidal treatment of
PCW line has been requested from NALCO, a well
know company of water treatment and
distribution.
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
5
Fire Drill
• Fire safety and Evacuation exercise was
conducted on 24th Jan.
• Lessons learnt
– PA systems of Cleanroom and Nano building need
linking
– Alarm as well as announcements were not audible in
many places
– Safety sweep of the building involved more than 10
people. Need strategy to tackle emergencies at night
• External agencies’ involvement to be worked out
• Fire fighting ring is yet to be handed over to
institute (CCMD ??)
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
6
Other issues
• Previous proposal for Medical Insurance to
NNfC, MNCF and other project employees not
approved. What next ??
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
7
Nitrogen Consumption
• Current status
– Liquid N2 consumption = 1129 litres/day .
Equivalent Gas 800 m3 /day
– Used as Liquid N2 = 20 litres/day ( ~ 14 m3/day)
– Estimated usage by equipment = 700 m3/day ( To
be validated)
– Unaccounted 100 m3/day, equal to 140 litres/day
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
8
Nitrogen consumption
• Total consumption 800 m3/day
• Major users are
– Dry etch
– Diffusion
– Litho
– Thin films
– N2 Guns
– Gas cabinets
– Others
TUMS Murthy
60 m3
80 m3
20 m3
45 m3
25 m3
400 m3
70 m3
Cleanroom Admin Commitee Meeting
Jan 29, 2013
9
Nitrogen consumption
• Gas Cabinet consumption has to be reduced
or eliminated
– Reduced gas cabinet flow to 30 liters/min from 40
– Saving 100 m3/day = 140 litres/day (verified)
• Change alarm setting to reduce the flow
further as a first step
• Replace Nitrogen with CDA as a next step.
TUMS Murthy
Cleanroom Admin Commitee Meeting
Jan 29, 2013
10