Transcript Slide 1

National Nanofabrication Centre
Centre for Nano Science and Engineering
IISc, Bangalore, India
Cleanroom administrative committee Meeting
TUMS Murthy
28 Jan 2014
Action points
Action
Who
Status
To consult acoustic experts
to reduce noise from roof
top scrubbers
RD
Open
Application of User
agreement
All Managers
Done
Investigate Dektak stylus
breakage
Dr. Savitha
Equipment Tech during
adjustment of stage
TUMS MURTHY
Jan 28, 2014
Reports
• User statistics
TUMS MURTHY
Jan 28, 2014
“HITS” & “Misses” of 2013
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Jan 28, 2014
“Hits” of 2013
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Completed 2 years of operation
60-70 active users in a month
Average equipment down-time <10%
Most equipment available from 6 am to
midnight
• Implemented User Agreement with penalties
for non-adherence to procedures and
protocols
TUMS MURTHY
Jan 28, 2014
HITS contd…
• Equipment added
– Raith Pioneer
– Karl Suss Aligner
– RTP
– 2 wet benches
– PLD
– Dektak surface profiler (with stylus)
TUMS MURTHY
Jan 28, 2014
Hits Contd….
• Utilities
– Implementation of AMCs for all major systems and
the Cleanroom
– Closed the fab for annual maintenance
– Dry etch modified and dedicated to Litho
– Wet exhaust ducts redone with more robust
material
– Protocol established to maintain PCW quality
– Fire drill conducted for all CeNSE
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Jan 28, 2014
Hits Contd…..
• Human Resources
– Employee of the year award
– Bonus given to top performers
– 2 employees have completed part time Bachelors
degree
– New Technologists
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Anitha
Chandrasekhar
Karthik
Gajendra
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Jan 28, 2014
Misses
• Technologists who left NNfC
– Srinivas
– Radha
– Pavan
– Suman
• Employee Medical Insurance
• Equipment reservation system improvement
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Jan 28, 2014
Opportunities and Plans for 2014
• Improve and enhance equipment reservation and
invoicing system
– Outsource development (User spec by end March 2014)
• Optimize equipment utilization and increase availability
• Full 2nd shift operation, to cater to increased external
demand
• Install new equipment (RTP, Vapor HF etcher, Asher)
• Establish the process for employee medical insurance
(target end February 2014)
• Explore savings
– 2nd source spares and indigenization
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Jan 28, 2014
Estimated Annual Budget
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Jan 28, 2014
TUMS MURTHY
Jan 28, 2014