Transcript Document

IIIV Fabrication – Cleanroom induction
IIIV Cleanroom Induction
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IIIV Fabrication – Cleanroom induction
Clean air in – temp/hum
Cleanroom technology?
• A room in which the
airborne particle level is
controlled to a specific
limit
• This limit is generally
defined as the
‘classification’ of the
room
• Three standards exist US Federal, British and
European.
Fan filter units
Plenum
Return
air
Laminar flow
downwards
Cleanroom
Sub Fab
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IIIV Fabrication – Cleanroom induction
Class Limits in Particles per Cubic Foot of Air of size equal
to or greater than the sizes shown
Class
0.1um
0.2um
0.3um
0.5um
5.0um
1
35
7.5
3
1
NA
10
350
75
30
10
NA
100
NA
NA
300
100
NA
1000
NA
NA
NA
1000
7
10000
NA
NA
NA
10000
70
100000
NA
NA
NA
100000
700
U.S. Federal Standard 209(E)
Cleanroom Classification
1000
Particle per cu-ft
Classification is maintained by
regulating
a) the air supply
b) air distribution
c) filtration of the air supply
d) materials of construction
and
e) operating procedures
0.1
100
Class 1
Class 10
Class 100
10
0.2
0.3
0.5
1.01
Particle Size (um)
Ballroom – Class 10,000 …currently ~100 particles/cu. ft
Yellow room – Class 100 …currently ~10 particles/cu. ft
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IIIV Fabrication – Cleanroom induction
What is a particle?
Minute quantity of dust, or other material, not visible to the human eye
Human hair
50 microns
Dust 25
microns
Other 0.5
microns
Device yield and/or
reliability can be
affected by
particles smaller
than 1/10 of the
minimum feature
size
Ballpoint pen
Skin Flake
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IIIV Fabrication – Cleanroom induction
Particle sources
• Process equipment
• Processing environment, including
people in the environment
• Raw materials
People
• Skin Flakes
• Hair
• Saliva
• Perspiration
• Clothes
• Fingerprints
• Handling
• Cosmetics
• Smokers – tar particles
>0.5m/min
Types of movement
100,000
Standing or sitting still
1,000,000
Sitting with medium body and arm movement
5,000,000
Walking slowly
7,500,000
Walking normally
10,000,000
Walking Briskly
15-30 Mil
Free exercise
Particle emissions by humans
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IIIV Fabrication – Cleanroom induction
Gowning procedure
• Enter the gowning area by using your swipe card.
• Immediately inside the door, pull on blue overshoes over your street shoes.
• Walk on the tak-mat with both feet.
• If you are a smoker you must drink the equivalent of a cup of water from the
cooler.
• Gowns are stored on hangers, boots in the cubby holes. Frequent users will
have a named hanger. Do not take gowns from the storage bins only from the
hangers.
• Put on the cleanroom garments in the following order. If you have a beard or
moustache, put on a beard mask or a yashmak.
• Put on the hood, the fasteners at the neck of the hood should be fully closed.
• Then put on the gown, ensuring to close the fasteners at the wrist and neck.
• Put on the boots, pulling them up outside the legs of the gown, tie by
tightening the adjustable buckle.
• Lastly fit a pair of disposable gloves and a pair of safety glasses - You must
provide your own safety glasses.
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IIIV Fabrication – Cleanroom induction
(cont)
• On leaving the cleanroom take off the cleanroom garments in reverse order,
boots, gown and hood.
• Return the gown to the correct hanger, and boots to correct cubby hole.
• On the way out of the cleanroom place the disposable items in the bin by the
door, gloves, beard mask and overshoes. The swipe card will open the door.
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IIIV Fabrication – Cleanroom induction
Entering the cleanroom
• Walk with both feet on the tak-mat in front of the airshower door.
• Open the airshower door, no more than two people should enter the
airshower together.
• Step into the airshower, close the door and stand between the air
nozzles.
• The shower will activate automatically, turn around at least once in
the air stream, arms should be held out from the body.
• After the airstream has ceased, push open the inner door to enter the
cleanroom.
Leaving the cleanroom
• Pull open the airshower door and enter.
• Allow the door to close then push open the exit door and proceed to
the gowning area.
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IIIV Fabrication – Cleanroom induction
Evacuation
• If an alarm sounds while you are working in the cleanroom, leave
immediately via the nearest exit.
• Once safely outside please remove your over boots and carry in your
hands as concrete damages the soles.
• Walk around to the assembly area on the Mardyke.
• When you return to the building please bring all cleanroom garments
back to the gowning area and place in the laundry locker. Clean suits
will be provided to replace.
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IIIV Fabrication – Cleanroom induction
Geography
Emergency exit
Emergency exit
Emergency exit
Block C Atrium
Emergency exit
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IIIV Fabrication – Cleanroom induction
IIIV wet benches – CG.06
Wave etch tool
Chemical Thinning
Equipment
bench
Plating
Etch / Aqueous
Lift-off / solvent
Hexafluorine &
Diphoterine
Emergency
shower
Emergency
shower
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IIIV Fabrication – Cleanroom induction
IIIV wet benches – Lithography CG.11
Hexafluorine &
Diphoterine
Emergency
shower/eyewash
Develop / Aqueous
Spin coat / solvent
• Full face visors must be worn
at all times when working at
wet benches.
• Hexafluorine for HF/BOE
exposure.
• Diphoterine for all other
chemicals.
• Dispose of chemicals and
rinse out glassware after use.
• Wear thick rubber gloves and
apron when using acids or
bases (includes BOE), nitrile
for solvents.
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IIIV Fabrication – Cleanroom induction
Prohibited materials
• Toolboxes other than those kept inside the fab by the maintenance
group.
• Aerosols.
• Brushes.
• Pencils/Erasers.
• Chalk.
• Sandpaper.
• Polishing compounds.
• Lubricants other than those approved. (Approved lubricants are silica
based grease specifically for use in cleanrooms).
• Velcro.
• Cardboard/Wood/Paper (other than approved cleanroom paper).
• Drills/Sanders/Cutting Tools, other than by special arrangement.
• Tissues.
• Dirty wafer or sample boxes.
• Dry chemicals
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IIIV Fabrication – Cleanroom induction
Prohibited Activities
• Removing cleanroom garments inside the cleanroom.
• Bringing prohibited materials into the room.
• Removing items from beneath cleanroom garments while inside the
cleanroom, e.g. mobile phone.
• Wearing of any cosmetics.
• Drinking, eating, or smoking.
• Wearing dirty cleanroom garments.
• Bringing uncleaned tools or equipment into the room.
• Wearing cleanroom garments outside the cleanroom.
• Placing tools on product work surfaces or tables
• Entering the cleanroom by routes other than through the air shower
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IIIV Fabrication – Cleanroom induction
Cleanroom procedures
Safety
Alarms
–
–
–
Fire and/or high level gas – voice evac – leave cleanroom and building.
Gas low level - siren/blue flashing beacon – leave cleanroom.
DI water quality – green flashing beacon.
•
•
•
•
•
Safety eyewear to be worn at all times except at microscopes.
Full face protection must be worn at all chemical wetbenches.
Emergency showers, Hexafluorine, Diphoterine, as in 1.05.
First aid kit in gowning area.
New chemicals must be approved by Dan O’Connell before being
brought into cleanroom. MSDS must be given to Dan. The chemical
must be labelled with your name and expiry date.
• All accidents must be reported to the Fab manager or Safety Officer.
• Risk assessments for chemicals & equipment are available in the
Material zone.
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IIIV Fabrication – Cleanroom induction
Bringing samples into the cleanroom
• Clean down sample container in gowning area with IPA before
entering the fab.
• Do not open container unless processing/measuring sample.
• If in doubt – ask.
Bringing items, tools, fittings into the cleanroom
• All items, tools, and fittings must be wiped down with IPA wipes prior
to being brought into the cleanroom, this must be done on each
occasion.
• If power tool then the cable and plug must also be cleaned down. A
tub of wipes is available in the gowning area.
• Wear disposable gloves when wiping down.
• The Material zone and service chases still require full gowning at all
times and compliance with cleanroom disciplines.
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IIIV Fabrication – Cleanroom induction
Cleanroom procedures
• No paper! Includes labels on sample boxes, lab books, etc.
• Manuals available in material zone.
• Cannot enter cleanroom from material zone, wipe down area, or
service chase, you must pass through airshower.
• Any manual scribing or wafer breaking to be done in clean air hood.
• No grinding in cleanroom, can be done in material zone.
• Chemical thinning on thinning wet bench.
• Hotplates must not be left on and unattended.
• Clean up equipment after use such as spinners.
• Do not leave chemicals in beakers etc., rinse out and leave to dry.
• Clean up all minor spills yourself.
• Repeated abuse of procedures will mean suspension of access. Access
to the fab will be suspended after the third warning.
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IIIV Fabrication – Cleanroom induction
• Contamination issues – Microsystems & IIIV sharing same space,
therefore no traffic from IIIV tools to Microsystem tools, includes wet
benches!
• Tweezer protocols – tweezers are tool specific not person specific.
Microsystems tweezers are teflon coated (green).
• Glassware
–
–
Do not use Microsystem’s glassware for IIIV processing. MS glassware is
marked.
IIIV glassware not be used for substrates that may be processed on
Microsystem tools-use MS glassware.
• Wafer boxes
–
Do not use Microsystem’s wafer boxes for IIIV substrates. MS wafer boxes
are marked blue or with blue sticker.
• Chemical storage
–
Do not use chemicals from MS either wet bench or storage. Storage
marked accordingly.
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IIIV Fabrication – Cleanroom induction
Facility usage charge
• Currently €657/month
• Or daily €62/day
• Full list of charges available on \\File1vs\Documents\john.pike\My Documents\Shared
• You must log your usage of the Lithography and/or daily use
• Three pc’s in cleanroom that run the lab database can be used for logging
usage, accessing your process details etc. Please return the logon to
casper.user (Pa$$w0rd).
• Form ‘Tyndall-035F16’ needs to be completed before access can be
granted.
• Finally – if in doubt ask first!
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IIIV Fabrication – Cleanroom induction
LIMS
• Laboratory management system
• Web based, easy to use
• Data is stored offsite
• Initially will be used for equipment booking, training, etc.
• Aim – will replace current system and be used for lab charges.
• LIMS currently on a trial basis
• You must be a ‘user’ to log on and book equipment or request training
• Start here … http://lims.tyndall.ie
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IIIV Fabrication – Cleanroom induction
Changes in lab charges
• All tools now charged by hour (previously by run)
• Lithography charged by tool
• Charges will be by booked slots
• 1st April for charging
• Projects current over the last two months are in the system. Please
notify me of any new projects.
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