Latching SMA Microactuator

Download Report

Transcript Latching SMA Microactuator

Defined Problem

Divided into research groups (BioMEMS, Materials, Devices, and Circuits) Developed

Stage 1

(Initial Microchannel Design Concept) Developed fluid control device to manipulate fluid flow Developed and tested

Stage 3

(Final Design: Pressure Actuated Valve Design)

Project Development

Modified design to integrate vertical vias for multilevel fluid flow Developed and tested

Stage 2

(Modified Microchannel Design)

Summarized manufacturing and experimental results of final design

Summary