Transcript Latching SMA Microactuator
Defined Problem
Divided into research groups (BioMEMS, Materials, Devices, and Circuits) Developed
Stage 1
(Initial Microchannel Design Concept) Developed fluid control device to manipulate fluid flow Developed and tested
Stage 3
(Final Design: Pressure Actuated Valve Design)
Project Development
Modified design to integrate vertical vias for multilevel fluid flow Developed and tested
Stage 2
(Modified Microchannel Design)
Summarized manufacturing and experimental results of final design