Transcript CKD MKS - USS Global Co.

Solutions for Fab Cost Reduction
CKD/MKS(HPS) Valve
and others
Refurbishment
Confidential
Solutions for Fab Cost Reduction
Contents ( Short Version )
Refurb. Models for CKD and MKS9HPS valve
Valve structure
Valve pictures
Confidential
2
Solutions for Fab Cost Reduction
1. Part numbers
– CKD , MKS(HPS)
System №
Valve №
Controller №
VEC – S8 – X0113
VEC – V8 – X0107
VEC – V8 – X0109
VEC – C8 – X0101
VEC – C8 – X0111
VEC – S8 – X0133
VEC – V8 – X0109
VEC – C8 – X0111
VEC – S8 – X0201
VEC- V8 – X0201
VEC- C8 – X0201
VEC – SHA8 – X0301
VEC – VH8 – X0301
VEC – CA8 – X0301
VEC – SHA8 – X0302
VEC – VH8 – X0302
VEC – CA8 – X0302
VEC – SH8G – X0301
VEC – VH8G – X0301
VEC – CA8G – X0301
VEC – SH8G – X0302
VEC – VH8G – X0302
VEC – CA8G – X0302
VEC – SHA8 – X0305
VEC – VH8 – X0305
VEC – CA8 – X0305
VEC – SHA8G – X0305
VEC – VH8G – X0305
VEC – CA8G – X0305
VEC – SHA8 – X0307
VEC – VH8 – X0307
VEC – CA8 – X0307
VEC – SHA8 – X0307-1
VEC – VH8 – X0307-1
VEC – CA8 – X0308-1
Model
MKS (HPS) Valve
MKS Main Valve
remarks
Normal
High temperature
Part number(spec)
remarks
93-8646
Heater Jacket Type
99D0835
100996194 / DU12L-3 / DT33 22 / DT5 33 / 58806 / 65798
Confidential
Normal Type
3
Solutions for Fab Cost Reduction
2. CKD Valve & CTRL’ Structure
Signal
Connector
Air CTRL
Sensor
P1
Air Vent
Sensor
P2
APC
CONTROLLER
변위센서
LS1,LS2
Confidential
4
Solutions for Fab Cost Reduction
10. Valve & Part picture (CKD – Valve)
Valve Control
Valve
BF Diaphragm
Valve Bellows
Sol -Valve
Heater Jacket
Actuator Shaft
Valve
Potentiometer
Confidential
5
Solutions for Fab Cost Reduction
10. Valve & Part picture (MKS - HPS)
Confidential
6