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INTRODUCTION Compared to InGaN-based LEDs, AlGaN LEDs may be subject to more severe self-heating due to higher operation voltage and lower radiative efficiency. The poor electrical conductivity of AlGaN materials was found to exacerbate the current crowding and localized heating problems. In this paper, we report on the temperature-dependent performance of state-of-the-art AlGaN-based LEDswith different Al contents. In contrast to dominant localized stated emission in InGaN LEDs, the UV emission is mainly caused by band-to-band transition, and much more sensitive tothe junction temperature due to smaller carrier-confining and localization potentials. 1 STRUCTURE Chip Size: 7.0*10-4 cm2 P N p+-GaN: Mg cladding p-AlGaN: Mg cladding AlGaN MQW n-AlGaN:Si cladding AlN/AlGaN Superlattice AlN 365, 335, 280, and 265nm @10mA Migration-enhanced MOCVD sapphire (Flip-Chip on PCB) 2