Process Control Using Compact Field Point/Labview Real-time Michael Tockstein Microelectronics Technology Department
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Transcript Process Control Using Compact Field Point/Labview Real-time Michael Tockstein Microelectronics Technology Department
Process Control Using Compact
Field Point/Labview Real-time
Michael Tockstein
Microelectronics Technology Department
Electronics Photonics Laboratory
June 20th, 2006
LabView Users Group Meeting June 20th, 2006
Outline
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Furnace Bank Control Application Overview
Requirements of our System
Compact Fieldpoint (cFP) Overview
Connecting to cFP
Labview Real-Time code structure
Remote Panels
Shared Variables
Things to Remember about Real-Time Software
LabView Users Group Meeting June 20th, 2006
Our Control Project
• Wafer Processing
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2
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Gas Flow
LabView Users Group Meeting June 20th, 2006
Furnace Bank
LabView Users Group Meeting June 20th, 2006
Requirements
• Adaptable to Existing System
• Single cFP Control Unit Covers:
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Process Sequence Controller
Gas Flow Controllers
Boat Loaders
Four Three-Zone Furnace Tubes
Programmable for new Process
Graphical User Interface
Remote Access from Office
Technician Friendly
LabView Users Group Meeting June 20th, 2006
What is Real-Time?
• Independently Run Controllers
• Real-Time = Real Reliable
LabView Users Group Meeting June 20th, 2006
Why cFP/LV Real-Time For Our System?
• Eliminates need for separate controllers for
each aspect of the process (i.e. gas flow,
temp control, etc…)
• Very customizable through both hardware
and software
• Best interface for our “individual” channels
• Very reliable since VI runs independently
from PC
• Network Ready
LabView Users Group Meeting June 20th, 2006
Compact FieldPoint Assembly
• Includes:
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CPU and Process Control Module
Backplane
Digital and Analog I/O Modules
Connector Blocks
LabView Users Group Meeting June 20th, 2006
cFP Backplane
• 4 or 8 channel backplanes available
• I/O modules receive power directly from
backplane
• NI data bus protocol
LabView Users Group Meeting June 20th, 2006
cFP Control Module
• Labview Real-Time code runs in
on-board controller, not your PC
• Ethernet port
• Serial port
• 11-30 VDC input. (20W power
supply recommended)
• Provides power to backplane
• “cFP-2000”
LabView Users Group Meeting June 20th, 2006
Discrete Output Module
• 16 Channels, 2A sinking per
channel
• Used for control of gas flow
• “cFP-DO-403”
LabView Users Group Meeting June 20th, 2006
Pulse Width Modulator (PWM)
Module
• 8 channels of PWM
• Used for control of Watlow
100A Solid State Relay Firing
• Pulse period parameters set
through “Measurement and
Automation Explorer” (MAX)
• “cFP-PWM-520”
LabView Users Group Meeting June 20th, 2006
Thermocouple Input Module
• 8 channels of any type T/C
• Used for temperature monitoring
of the three zone heaters
• Selection of T/C and Cal through
MAX
• Uses isothermal connector blocks
• “cFP-TC-120”
LabView Users Group Meeting June 20th, 2006
Discrete Input Module
• 32 digital input channels
• Compatible with 24VDC
sourcing-output devices
• Used to read important
indicators, (e.g. vacuum seal,
etc…)
• “cFP-DI-304”
LabView Users Group Meeting June 20th, 2006
Connector Blocks
• Connected to corresponding
module through backplane
• Used to physically wire
devices to cFP unit
• Two types:
– “cFP-CB-1”
– “cFP-CB-3”
LabView Users Group Meeting June 20th, 2006
cFP Hardware Setup
• NI Measurement and Automation Explorer
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Will “see” any NI hardware on the network
Assign IP address
Set parameters
Ready to Go!
LabView Users Group Meeting June 20th, 2006
User Specified Inputs
For cFP System
LabView Users Group Meeting June 20th, 2006
Components of the Real-Time
Software
• “Drivers” for each cFP module
• PID control blocks
– Needed to control temperature
• Program “step” code
– Needed to take program through the logical sequence of
events required for a specific process
• Safety shutdown code
– Temperature Overshoot
– Zone Differential Exceeded
– Manual Shutdown
LabView Users Group Meeting June 20th, 2006
cFP Module “Drivers” in LV 7.1
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“Drivers” in Labview 8
• “Drivers” are much easier to implement in
Labview 8.
• Labview 8 has “drag and drop” features
which allow you to drag a specific
channel of a device (along with it’s
“drivers”) over to your VI from the
project window.
LabView Users Group Meeting June 20th, 2006
Drag and Drop “Drivers” For Each
Device Channel
Source: [1]
LabView Users Group Meeting June 20th, 2006
What is PID?
• Proportional-Integral-Derivative
Desired Setpoint
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PID
Compensator
LabView Users Group Meeting June 20th, 2006
SYSTEM
PID Control Blocks
• Necessary for each zone of our temperature controller
LabView Users Group Meeting June 20th, 2006
High Level Program Flow Chart
False
User Enters
Table Values
Compare Delay
Counter to Zero
Set Delay
Counter
True
Start Program
Increment Row
Counter
Increment
Column Counter
Read Inputs
From cFP
Reset Column
Counter
Set Center Zone
Temperature
Compare Inputs
False
To Table
Increment
Column Counter
True
Increment
Column Counter
LabView Users Group Meeting June 20th, 2006
Activate Desired
Outputs
Outer Zones
Track Center
Zone Temperature
Program
Step
Code
• Reads Table
• Determines if
input requirements
are met
• Activates desired
outputs
• Sets new temp
• Waits a desired
time before next
step
LabView Users Group Meeting June 20th, 2006
Program Table
LabView Users Group Meeting June 20th, 2006
Program Table Values
• Decimal numbers correspond to a binary value which
represents I/O ports.
• Example for a particular output step:
Actual = N2 NH3 H2SiCl2 GateValve A B C D
Want = On OFF
OFF
On
On Off On On
Binary = 1
0
0
1
1
0 1 1
10011011b = 155d
Tech enters 155 into table.
• Independent number conversion needed to save memory
space onboard real-time controller.
LabView Users Group Meeting June 20th, 2006
Control Panel
• Available on host PC and remote window.
LabView Users Group Meeting June 20th, 2006
Remote Panel
• Built in Web server.
• Monitor/control your application from a
Web browser
• Advantage to user running a long duration
process
LabView Users Group Meeting June 20th, 2006
Shared Variables
• Allows easy communication of data between RealTime target VI and Host VI
• Save program memory onboard Real-Time target
by conducting most processing tasks on board PC
using Host VI
• Available only in Labview 8
LabView Users Group Meeting June 20th, 2006
Things To Remember About The
Real-Time Software
• When you execute your program, it is
downloaded and run on the Real-Time
controller, not your PC!
– This effects the size of your program and
ultimately limits the number of “bells and
whistles” you can have
LabView Users Group Meeting June 20th, 2006
Summary
• Advantages of using cFP w/ LV Real-Time:
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Very Flexible
Expandable
Relatively Easy to Understand
Simple Network Interface
• Disadvantages:
– Limited Memory
– Expensive
LabView Users Group Meeting June 20th, 2006
References
[1]
NI LabView Real-Time Hands-On Seminar Manual. February
2006 Edition. Part Number 351171C-01
Additional Resources
I.
II.
III.
National Instruments: www.ni.com
Compact Field Point: http://www.ni.com/compactfieldpoint/
Labview Tour: http://www.ni.com/swf/labview/us/tour
LabView Users Group Meeting June 20th, 2006
Thank You!
Questions, Comments, and Suggestions Welcome!
LabView Users Group Meeting June 20th, 2006