Transcript Technology CAD Dept. of Electronics & ECE

Technology CAD
(including Lecture-Tutorial-Laboratory Modules)
Dept. of Electronics & ECE
Indian Institute of Technology-Kharagpur
First R & D Centre in
Information and Communication Technology (ICT)
Development among IITs and Universities in India
PI: Prof. C. K Maiti, Co-PI: Prof A. S Dhar, and Prof A. Halder
Research & Development focus
1. To develop e-learning materials for Technology CAD
(TCAD) Course (including tutorial and laboratory
modules) for final year undergraduates and postgraduate
students and implement Technology CAD (TCAD) online
simulation laboratory — real time simulation laboratory
accessed through the Internet which can expand the range
of simulation experiments in Technology CAD, transmit
online instructions and study materials for anyone,
anywhere and anytime.
2. Development of e-content for an integrated teaching
environment which allows for the provision of online live
lectures (a 40-lecture module with tutorials) and a
laboratory (10-12 simulation experiments) session for
geographically dispersed students.
Steps for
Development of RealTIME Measurement-based
Internet Laboratory
Design of Experiment
Remote Operation of the Instruments
(via LabVIEW, IC/CV lite, Easy Expert, VEE etc)
Conversion to Web Application
Launching on the Internet
Total Budget Outlay
(Rs. in lakhs)
Head
1st
Years
2nd
3rd
Total
Capital Equipment
FE Comp.
Rs.
80.00
-
-
80.00
Consumable stores
Software/License Fee
Rs.
10.00
10.00
10.00
30.00
Duty on import (if any)
Rs.
nil
nil
nil
nil
Manpower (JPA/RS/Eqv.) Rs.
7.00
8.00
9.00
24.00
Travel & Training
3.00
4.00
5.00
12.00
10.00
13.00
16.00
39.00
110.00
35.00
Rs.
Contingencies/Accessories Rs.
Grand Total (FE Comp.)
Grand Total
40.00
185.00
: Rs. 185.00 lakhs
Course Description
Text Book: G. A. Armstrong and C. K. Maiti, "TCAD for Si, SiGe and GaAs
Integrated Circuits“, The Institution of Engineering and Technology (IET), UK,
2008.
40-50 lectures including tutorial based on the
following contents:
Introduction and overview; History and structures; The role of
TCAD for Semiconductor technology development; TCAD
principles; Physics of VLSI fabrication technology; Tool
Integration; Structure editing and mesh generation; CMOS and
Bipolar Process technology Si, SiGe, III-V Semiconductors;
Process modeling and simulation – general; Simulation of
device characteristics;
Device level simulation challenges; Introducing new
device models; Heterojunction device modeling;
Simulation of silicon germanium (SiGe) HBTs;
Simulation of heterostructure FETs (HFETs);
Simulation of AlGaAs/GaAs devices; Virtual Wafer
Fabrication (VWF) automation tools; Example of VWF
methodology; Extraction of DC and SPICE model
parameters; Small signal AC analysis for CMOS
and bipolar transistors; Application of mixed-mode
simulation; TCAD calibration procedure; Process
compact model, Design for manufacturing (DFM),
Integration into the CADENCE design framework.
VLSI Engineering Laboratory Module
will consist of the following experiments
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
Doping Profile Determination
Bipolar Device Characterization
MOS Capacitor Characterization
MOSFET Characterization
High Frequency Characteristics of BJT
MOSFET SPICE Parameter Extraction
Bipolar Transistor SPICE Parameter Extraction
1/f Noise Characterization in Transistors
Low Temperature Characterization of Transistors
LNA Characterization
Noise Modeling in MOSFETs
Cutoff Frequency Determination
What is Technology CAD (TCAD)
Rising Technological Complexity
Gate insulator
•SiO2/HiK
•Leakage
•Trapping
Gate
•Work function
•Depletion
Channel
•Mobility
Raised S/D
•Material
•Activation
•Diffusion
S/D extension
•Activation
•Junction (USJ)
Device Scaling = More Simulation Needed
Application: Design, analyze and optimize semiconductor
technologies and devices
Full TCAD Flow
Defect effect on
device/circuit
Materials
Process variations
Process effect
on device/circuit
Process
Device
Process/structural variations
Parameter extraction
Technology
development
Transistor optimization
Circuit
Compact Model (BSIM, PSP, PCM)
Subcircuit expansion
System performance
Gate
Analog/Digital
Design
Block
TCAD Optimization and
Manufacturability
TCAD Simulations
PCM
Generate
new data
Manufacturing
Visual querying &
Visual optimization
Sensitivity, uncertainty & yield analysis
Determine the most stable process condition
Marked process conditions indicate low sensitivity of the device characteristics to
the variations in corresponding Set of process (RED marked)
Yield analysis
Device spec limits
Some Strained-Engineered Devices
0
(a)
(b)
SiGe
SiGe
0.1
Silicon substrate
0.2
0
0.1
Silicon substrate
0.2
-0.1
0
X (um)
Cap layer
-0.1
X (um)
Y (um)
-0.1
0.1
-0.1
0
X (um)
0.1
Some available facilities
Hardware facilities
NetLAB Server
Software Server
Noise Figure Analyzer
Spectrum Analyzer
Network Analyzer
DC Probe station
AFM Setup
Agilent Semiconductor Test Analyzer
Software facilities
• Instrument Control software
LabVIEW, VEE, VSA, IC-CAP, IC/C-V
light, EasyExpert, Microsoft Inst., etc.
• TCAD software
SILVACO, Sentaurus, MEDICI, TSupreme,
Taurus, Monte Carlo, HSPICE, Nanosim,
PCM studio, PARAMOS, etc.
Requirements: List of Equipment
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
17.
Four Probe Resistivity Meter (25 lakhs)
Mask Aligner (75 lakhs)
Clean Air station (20 lakhs)
Rapid Thermal Annealing System (45 lakhs)
Semiconductor Test System (35 lakhs)
Microwave/ECR Plasma System (55 lakhs)
DC/RF Sputtering System (45 lakhs)
Probe station (50 lakhs)
Programmable power supply (20 Lakhs)
Thickness Measurement system (30 lakhs)
AFM/STM (30 lakhs)
Spectrum analyzer (10 Lakhs)
LCR Meter (10 lakhs)
Semiconductor Parameter Analyzer (50 lakhs)
Noise Figure Analyzer (55 lakhs)
Network Analyzer up to 26 GHz with calibration kits (200 lakhs)
Parameter extraction and device/process modeling software tools (45 lakhs)
Achievement in ICT Area
1.
2.
3.
4.
5.
NetLAB based Measurement and Analysis
First On Line Laboratory Demonstration at Andhra
University (AU)
First short term course on Information Communication
Technology (ICT) on Hardware Laboratory at IITKharagpur
Arranged several short term courses on Technology CAD
(TCAD) at IIT-Kharagpur
Arranged several short term courses on Technology CAD
(TCAD) outside IIT-Kharagpur
Book Published
1. Applications of Silicon-Germanium Heterostructure
Devices, Institute of Physics Publishing (IOP), UK, 2001.
2. Silicon Heterostructures: Materials and Devices, Institute
of Electrical Engineers (IEE), UK, 2001.
3. Selected Works of Professor Herbert Kroemer, Edited,
World Scientific, Singapore 2008.
4. Strained-Si Heterostructure Field-Effect Devices, CRC
Press, London, 2007.
5. TCAD
for Si, SiGe and GaAs Integrated
Circuits, IET, UK, 2008.
OUR Publications on INTERNET
LABORATORY on MICROELECTRONICS
• A. Maiti and S. S. Mahato, Online Semiconductor Device Characterization and
Parameter Extraction Using World Wide Web, Proc. NCNTE, Feb. 29 – Mar. 01,
pp.160-163, 2008.
• A. Maiti and S. S. Mahato, Web-based Semiconductor Technology CAD
(TCAD) Laboratory, 50th Intl. Symp. ELMAR-2008, Zadar, CROATIA, 10-12
September 2008.
• A. Maiti and S. S. Mahato, Web-based Semiconductor Process and Device
Simulation Laboratory, Proc. of ICEE2008, Intl. Conf. on Engineering
Education, "New Challenges in Engineering Education and Research in the
21st Century", PÉCS-BUDAPEST, HUNGARY, JULY 27-31, 2008.
• S. C. Pandey, A. Maiti, T. K. Maiti and C. K. Maiti, Online MOS Capacitor
Characterization in LabVIEW Environment, International Journal of Online
Engineering (iJOE), vol.5, pp.57-60, 2009.
• A. Maiti, M. K. Hota, T. K. Maiti and C. K. Maiti, Online Microelectronics and
VLSI Engineering Laboratory, International Workshop on Technology for
Education, Bangalore, Aug 04-06, 2009.
Currently Available Experiments via
INTERNET from IIT-KHARAGPUR
(RealTIME Online Measurement-based)
1.
2.
3.
4.
5.
6.
7.
8.
9.
Gummel Plot of a BJT
Output Characteristics of a BJT
Threshold Voltage of a MOSFET
Output Characteristics of a MOSFET
MOSFET Parameter Extraction
BJT SPICE Parameter Extraction
Low Noise Amplifier Characterization
Surface Analysis using AFM/STM
Circuit Analysis Using NI-Elvis
NetLAB Webpage
Partner/USER Institutions
Our Current Partners are
VIT, Vellore
NIST, Berhampur
OUR ONLINE LABORATORY
HAS BEEN USED and TESTED BY
More Than
50 ENGINEERING COLLEGES
and
10 UNIVERSITIES
Short Term Course/Workshop
AICTE/MHRD sponsored SUMMER SCHOOL at IIT KHARAGPUR
May 17-23, 2009
Applications of ICT
for Hardware
Laboratory
52 participants from 40 Engineering Colleges
List of Participating Institutions
 VIT University, Vellore
 NIST, Berhampur
 West Bengal University of Technology, Kolkata
 University of Calcutta
 Inst. of Radiophysics and Electronics
 North Bengal University, Siliguri
 NIT, Durgapur
 Bengal Engg. and Science University, Shibpur
 Tezpur (Central) University, Tezpur
IMPS College of Engg. and Technology, Malda
Gurgaon College of Engg., Haryana
Hi-Tech Institute of Technology, Khurda
National Institute of Technology, Warangal
SSN College of Engg., Tamilnadu
Synergy Institute of Engg. and Technology, Dhenkanal
Medi-caps Institute of Technology Management, Indore
Dr. BR Ambedkar National Institute of Technology, Punjab
Jaypee Univ. Of Information Tech., Solan, H.P.
Dronacharya College of Engg., Gurgaon, Haryana
CVR College of Engg., Hyderabad, A.P.
Sai Spurthi Institute of Technology, A.P.
Lingaya's Institute of Mgt and Technology, Faridabad
Purushottam Institute of Engg. Tech., Rourkela, Orissa
National Institute of Science & Technology, Orissa
Hi-Tech Institute of Tech., Orissa
GLAITM, Mathura, U.P.
Dr. B. C. Roy Engg. College, Durgapur
Tradient Academy of Tech., Orissa
Modern Engg. & Management Studies, Orissa
GLA Institute of Tech. & Management, Mathura
Synergy Institute of Engg. & Tech., Orissa
ITER, Bhubaneswar
Synergy Institute of Engg. & Tech., Orissa
DRIEMS, Cuttack
Lingaya’s University, Faridabad
Birla Institute of Technology, Patna
Dr. Sivanthi Aditanar College of Engg., Tamilnadu
PSN Group of Institutions, Tamilnadu
Orissa Engg. College, Bhubaneswar
JIET, Cuttack
Raajdhani Eng. College, Bhubaneswar
World Institute of Technology, Gurgaon
Dept. of Bio-Medical Engg., Andhra University
Andhra University College of Engg., Visakhapatnam
GITAM University, Visakhapatnam
Chaitanya college of Engg., Visakhapatnam
SRKR Engg. College, Visakhapatnam
Govt. Polytechnic, Bheemili
Sanketika Vidya Parishad Engg. College, Visakhapatnam
JNTU College of Engg., Hyderabad
National Engg. College, Tamilnadu
Institute of Technology and Management, Gurgaon