Transcript Team Corrosion EE412 Week 3 Alex and Joey Mentor: J Provine This Week • Corrosion fundamentals • Transparency mask layout • Fabrication/testing results so far.

Team Corrosion
EE412 Week 3
Alex and Joey
Mentor: J Provine
This Week
• Corrosion fundamentals
• Transparency mask layout
• Fabrication/testing results so far
Corrosion fundamentals
Anode reaction:
Cathode reaction:
1) Oxidation and proton production at the anode
2) Hydroxide ions produced at cathode
Pourbaix diagram for Al
anode
cathode
Al cathode reaction:
Aluminum will corrode at the anode or cathode
-> coat with an inert, defect free dielectric
Not unique to metals or aluminum:
The ions matter: KCl = bad
Measurement Concept
Mold 20:1 PDMS to structure to
form reusable, sticky gaskets
Multiple sizes in case larger/smaller structures don’t work
(film defects or measurement resolution limits)
Minimum line width: 100um
Resistors: ~5 ohms (100nm Al)
5mm cleaving lanes shown
Fabrication and Testing Progress
• Oxidized and coated test wafers
– 1um oxide, 100nm Al
• Patterned, etched, and ALD coated another
test wafer
– 100 cycles HfO2, 400nm thick Al
PDMS Gasket
Testing Setup
Edge of gasket
-5V ... +5V
GND
Testing area
Results
Unpassivated
Passivated
Up Next
• Order transparency mask
– Check reference electrode size first
• Design of experiments
– Plan timing and start prioritizing
• Pattern wafers and start ALD coating
– AlO and HfO in April, ZrO in May