CONFOCAL MICROSCOPY IN A NEW LIGHT Introduction to Confocal Microscopy Title: Introduction to Confocal Microscopy Presented by: Dr.
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Slide 1
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 2
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 3
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 4
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 5
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 6
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 7
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 8
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 9
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 10
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 11
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 12
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 13
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 14
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 15
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 16
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 17
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 18
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 19
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 20
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 21
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 22
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 23
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 24
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 25
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 26
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 27
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 28
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 29
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 30
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 31
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 32
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 33
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 34
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 35
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 36
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 37
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 38
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 39
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 40
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 41
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 42
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 43
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 44
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 45
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 46
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 47
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 48
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 49
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 50
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 51
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 52
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 53
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 54
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 55
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 56
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 57
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 58
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 59
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 60
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 61
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 62
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 63
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 64
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 65
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 66
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 67
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 68
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 69
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 70
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 71
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 72
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 73
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 74
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 75
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 76
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 77
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 78
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 2
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 3
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 4
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 5
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 6
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 7
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 8
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 9
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 10
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 11
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 12
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 13
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 14
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 15
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 16
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 17
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 18
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 19
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 20
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 21
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 22
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 23
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 24
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 25
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 26
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 27
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 28
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 29
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 30
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 31
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 32
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 33
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 34
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 35
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 36
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 37
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 38
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 39
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 40
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 41
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 42
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 43
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 44
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 45
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 46
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 47
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 48
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 49
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 50
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 51
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 52
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 53
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 54
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 55
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 56
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 57
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 58
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 59
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 60
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 61
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 62
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 63
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 64
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 65
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 66
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 67
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 68
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 69
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 70
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 71
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 72
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 73
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 74
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 75
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 76
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 77
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78
Slide 78
CONFOCAL MICROSCOPY
IN A NEW LIGHT
Introduction to Confocal Microscopy
Title: Introduction to Confocal Microscopy
Presented by: Dr. Andrew Dixon
Date: May 2009
An Introduction to Confocal Microscopy
•
•
•
•
•
•
•
3
What is the problem?
Marvin Minsky’s idea
The confocal principle
The power of confocal imaging
Increasing imaging speed
Imaging in 3-D
Summary of key points
What is the Problem?
Optical microscope images contain both in-focus and out-of-focus detail
How can one produce an image which only includes the in-focus detail?
4
All-in-Focus
True color information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
5
Marvin Minsky’s Idea
Instead of collecting the complete
image at one time, Minsky
proposed to build up the image
‘point by point’.
In this way one can introduce
additional optical components in
the light collection path to block the
out-of-focus light from contributing
to the image.
6
Marvin Minsky
Inventor of the confocal
microscope
Harvard (1955)
US Patent 3,013,467
The Confocal Principle
The sample is illuminated with a focused spot of
light.
detector
Confocal aperture
Light from the sample is re-focused at the confocal
aperture.
Only in-focus signal reaches the detector
illumination
X
X/Y Image
Y
Focus Cone
sample
7
Specimen
The Optical Section
optical section - micron
18
16
14
12
10
8
6
4
2
0
0
0.5
1
1.5
lateral resolution - micron
Optical section ‘thickness’ depends on
objective lens NA. Lateral and axial
resolution are related.
8
The Power of Confocal Imaging
Conventional image
In the mid 80’s mirror scanning
systems were developed that
adapted a conventional microscope
for confocal imaging.
(Dr. W.B. Amos,
MRC Cambridge)
Confocal image
Scientists became very excited by
the images they could obtain,
without having to prepare very thin
section samples.
Bio-Rad MRC-500
Example images show tubulin
structure in fertilized sea urchin egg
immuno-labelled for fluorescence
contrast. (scale bar 50 micron)
9
Increasing Imaging Speed
Scanning a focused illumination spot,
point by point is relatively slow.
Several alternative schemes have
been developed to increase imaging
speed.
One approach is to illuminate the
sample simultaneously with multiple
spots of light.
Another approach is to illuminate
the sample with a focused line of
light. This is the system used in the
Axio CSM 700 from Carl Zeiss.
10
From Optical Section to 3-D image
A series of optical section images can be combined
into a single ‘all in focus’ image, or manipulated to
provide quantitative information about surface
profile, surface roughness etc.
11
…A World of Possibilities
Biological Research
Neurons in a Brainbow transgenic
mouse, labeled with multiple hues
of fluorescent proteins. Extended
focus image
(Dr. J. Livet Harvard University)
12
Material Sciences
True color information in 3D topography
Surface profiling. Surface roughness
In Conclusion…
•
Exceptional contrast optical section images
•
Non-contact probing and profiling
•
Not restricted to single color imaging
•
Imaging at high speed
•
Qualitative and quantitative 3-D characterization
•
High resolution surface profiling
Confocal microscopy delivers…
13
End
14
Advanced Confocal Microscopy:
Axio CSM 700
Title: Advanced Confocal Microscopy: Axio CSM 700
Presented by: Dr. Franz Reischer
Date: May 2009
Axio CSM 700 – System Overview
Xe illuminator, conf. microscope, controller, user PC
16
Innovative Confocal Method
1
1
Xe illuminator
2
Multi slit grid for scanning
instead of scan mirrors
3
Beam splitter
4
Sample / focal plane
5
Digital detector which also
2
5
3
provides digital confocal
apertures
17
4
3D Image Acquisition
3D topographies, height maps, profilometry,
and roughness analysis are all based on the
acquisition of Z stacks.
Axio CSM 700 always measures the current
position of the stage using a laser linear scale
with 10 nm increments and 24 bit.
18
Advantages
•
High acquisition speed (up to > 100 fps)
•
True colour confocal microscopy
•
High resolution
Optical 3D profilometer
19
Optical resolution: XY
I
No resolution
No contrast
20
x,y
Optical resolution: XY
I
No resolution
No contrast
21
x,y
Cut-off distance reached,
but contrast is equal to zero
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
22
Strictly
confocal
Classical
Optical resolution: XY
I
x,y
No resolution
No contrast
Cut-off distance reached,
but contrast is equal to zero
d(x,y) ~ f * l / NA
f= 0.37 … 0.61
Maximum resolution
Rayleigh criterium
23
Strictly
confocal
Classical
Resolution
Maximum contrast
Lateral Resolution Limit: Grid
Sample:
Nanoscale critical dimension standards (supracon AG Jena)
Colour channel: blue
Objective:
Epiplan-APOCHROMAT 150x/0.95
200 nm L&S
24
Resolution limit
150 nm L&S
Axial Detection Limit
Test Sample:
Validated depth measurement
sample with 80 nm steps
Objective:
EC Epiplan-APOCHROMAT 100x/0.95
True height:
Measured height:
Difference:
25
80 nm
87 nm
7 nm
High Range of Samples
•
Surfaces with low as well as high reflectivity, incl. polished metals &
totally smooth glass.
26
•
Top surface of coatings and substrates under transparent layers.
•
Film thickness measurement of transparent layers starting at ~ 1 µm
Comparison of confocal microscopy
Typical light
microscope
Without
preparation
High resolved
viewing with
large depth of
field
Display in true
colour
3D measurements
in submicrometer
range
27
Scanning electron
microscope
Tactile instruments
for roughness
measurement
True colour
confocal
microscope
Axio CSM 700 …
… opening up
new worlds of microanalysis.
28
Applications for Topographic Measurements in Materials Engineering
Title: Applications for Topographic Measurements in Materials
Engineering
Presented by: Ralf Loeffler
Date: May 2009
Application Examples
•
•
•
30
Geometry inspection on cutting plate.
Failure analysis on turbine blade.
Tribology on high performance steel.
Geometry Inspection – Cutting Plate
31
•
Turning and milling are the most important machining steps in
metal processing / machining
•
Cutting plates consist of coated (TiCN) hard-metal (WC)
•
Important factors on wear behaviour: plate material and geometry
of cutting edge, but also material of workpiece
•
Empirical approach to improve wear properties of cutting plates
mostly qualitative characterization of tool wear
•
Quantitative characterization enables accurate measurement of
important parameters influencing tool performance
(roughness and geometry of cutting edge, e.g. honing and erosion)
•
Goal: high tool life / endurance at high feed rates
Geometry Inspection – Cutting Plate
top view
3D-µCT surface rendering
side view
resolution: 10 µm/vx
Functional parameters influencing performance: angle and radius of cutting edge
32
Geometry Inspection – Cutting Plate
Definition of functional parameters
rake
honing 1 (r1)
chamfer
honing 1 (r1)
honing 2 (r2)
honing 2 (r2)
tool flank
33
Geometry Inspection – Cutting Plate
r1
r2
focus image
rake angle
34
Geometry Inspection – Cutting Plate
only one cutting edge radius (honing)
approx 200 µm
wear groove
height: approx. 11 µm
width approx. 49 µm
35
Geometry Inspection – Cutting Plate
Quantitative Measurement: new plate
Roughness - along cutting edge
36
Rz = 2.2 µm
Ra=0.3 µm
Geometry Inspection – Cutting Plate
Quantitative Measurement: worn plate
Roughness - along cutting edge
37
Rz = 10.9 µm
Ra=1.0 µm
Geometry Inspection – Cutting Plate
New cutting plate
Roughness (Ra)
(along cutting edge)
•
0.3 µm
•
1.0 µm
Roughness (RZ)
(along cutting edge)
•
2.2 µm
•
10.9 µm
rake angle
•
18 deg
•
19 deg
cutting edge radius
•
•
not determined
•
47 µm
100 µm
•
no wear
•
mechanism:
adhesive wear
Features
38
Worn cutting plate
Geometry Inspection – Cutting Plate
Conclusion
• Complex sample geometry limits accessibility
positioning of sample essential
•
Standard methods limited to qualitative evaluation
Confocal Axio CSM 700 allows qualitative and quantitative
analysis
•
Wear can be quantified by means of roughness, flattening
(erosion) and angle widening
39
Failure Analysis – Turbine Blade
40
•
Sample:
blade of compressor unit (turbine)
•
Status:
failed, surface wear detected
•
Material:
austenitic steel
•
Manufacturing:
milling in one piece, blades not welded
on ring
•
Environment:
rotation speed approx. 300 m/s in
hot vapour atmosphere
Failure Analysis – Turbine Blade
Top view: sections with distinct surface wear
no wear
high wear
intermediate wear
section 1
section 2
section 3
section 1
41
section 2
section 3
Failure Analysis – Turbine Blade
no wear
Roughness Measurement
Note milling marks
area measurement
Ra = 0.7 µm
Rz = 27.3 µm
topography profile
42
Failure Analysis – Turbine Blade
intermediate wear
Roughness Measurement
area measurement
Ra = 1.4 µm
43
Rz = 21.7µm
Note wear and milling marks
topography profile
Failure Analysis – Turbine Blade
high wear
R1= 630 µm
Depth = 65 µm
Note deep wear marks
Roughness Measurement
area measurement
Ra = 2.7 µm
44
Rz = 109.4 µm
Failure Analysis – Turbine Blade
1
2
R1 = 530 µm
Depth = 65 µm
1
3
4
5
high wear
R1 = 550 µm
1
Depth = 65 µm
3
4
3
2
4
5
5
Note aligned wear marks
Roughness Measurement
area measurement
Ra = 4.0 µm
45
Rz = 45.4 µm
2
3
4
5
Failure Analysis – Turbine Blade
high wear
R1 = 450 µm
Depth = 70 µm
2D topography profile
Image acquisition: 50x
46
Failure Analysis – Turbine Blade
Section 1
No wear
Section 3
Intermediate wear
Roughness (Ra)
•
0.7 µm
•
4.0 µm
•
1.4 µm
Roughness (RZ)
•
27.3 µm
•
45.4 µm
•
21.7 µm
Features
•
Milling marks
dominate
No wear marks
•
Deep, round
wear marks
Milling marks
barley visible
•
Small, rather
round wear
marks
Milling marks
clearly visible
•
47
Section 2
High wear
•
•
Failure Analysis – Turbine Blade
Conclusion
•
•
•
48
Wear can be quantified by means of Ra-value
Due to large spherical defects Rz-value increases in areas with
“coarse” defect structure
Shape of defect may be linked to prevailing mechanism, either
erosion or cavitation
Tribology – Maraging Steel Composites
•
Tribology testing of new, exceptionally hard
Metal-Matrix-Composites fuel injection systems
•
Wear depth < 2 µm white light interferometer
•
Need: reliable, accurate and fast measurement system with high precision
and visual presentation of the data
Pin on disc testing by 1500 MPa
need for materials with
excellent wear properties
49
Tribology – Maraging Steel Composites
Wear mark virtually absent (depth < 2 µm) limited analytical methods available
Note: only ceramic exhibits
signs of wear and tear outs
SEM micrograph of a steel-ceramic
composite before testing
50
SEM micrograph of a steel-ceramic
composite after testing
Tribology – Maraging Steel Composites
Wear mark on a steel-ceramic composite excellent graphical representation
LOM (bright field) micrograph of a wear 3D visualization of a wear mark on a
mark on a steel-ceramic composite
steel-ceramic composite using the
Axio CSM 700
51
Tribology – Maraging Steel Composites
Axio CSM 700 analysis with all-focus image
•
Excellent visualization
•
Wear mechanism: only by
leveling ceramic particles
•
Axio CSM 700 data in accordance
with SEM micrograph observation
•
Scanning of entire wear mark
at high magnification
width = 300 µm
height ≤ 1 µm
52
Tribology – Maraging Steel Composites
Axio CSM 700 vs. White Light Interferometer
Identical results to the WLI analysis method
Advantages of the Axio CSM 700 are its speed and visual representation of
data as all-in-one snapshots with height, focus and true color images
WLI 2D-profile
Axio CSM 700 (20x)
53
End
54
Exotic Applications in Confocal Microscopy
Title: Exotic Applications in Confocal Microscopy
Presented by: Dr. Steve Metcalfe
Date: May 2009
Example Applications
•
•
•
•
•
•
•
•
•
•
•
•
56
Foam
Paper
CCD array
Polymer Film on Metal Substrate
Electronics PCB
Electronics sub assemblies
Solar Cell (Photo Voltaic Materials)
SiC Wafers
Light Guide
MicroLens Arraay
Fresnel lens
Precision Assembly STFC
Foam
Dynamic processes like foam can be accessed, (as long as they stay still long enough to
collect the images) The high speed frame mode can help here.
The structures of foam are very important for a number of disciplines.
57
Paper & Fabrics
These days all materials come
under scrutiny and fibrous
materials like Paper and Fabrics
cannot escape the quest for
knowledge in the development of
new materials.
For example, ink penetration is used to examine ink quality as well as counterfeit material
compared to original writings.
Fabrics can also be examined for penetration of spray on coatings and surface
contamination
Examination of filters for particles and particle volume are also examples
58
Ink on Paper
Pigment ink keeps on the surface and dye ink penetrates into the paper.
SEM also can detect the same phenomenon but the SEM could not
visualize colour information.
59
CCD with Bayer Mask Sensor
Objects which are arrays can be inspected.
Image analysis measurements can be made by thresholding out based on colour. It is then
possible to measure individual features, Counting sizing and volume data are all available.
Out of interest, note that there are more green pixels than read or blue.
This is due to the colour response of the human eye
60
Polymer Film on Metal Substrate
61
•
Laminate. Using advanced techniques both surfaces or a laminate can be inspected.
•
2 individual scans are completed one for the top surface and one for the lower.
•
Both of these scans can then be superimposed and viewed on the 3D display.
•
Layer thickness can then be ascertained.
PCB Track - Conductive strip
It is easy to see the 3D topography of this sample.
62
Rendered PCB Track
The surface image can be rendered with a true colour image as above or
colour coded in height.
A combination of these display techniques help to reveal the surface structures in their true
form.
63
Measurements
Data relating to the angle and radius can be obtained. Also distance and height at the
same time.
Compared to tactile methods we can see both the small and large surfaces.
64
Solder Bumps
No noise but true colour information in 3D topography
Bump dimension: 13.8 µm height and 79 µm width
65
TFT Spacer – Touch Panel Spacer
Measurements and images are presented for these common electronic spacers.
A touchscreen is a display which can detect the presence and location of a touch within
the display area. The term generally refers to touch or contact to the display of the
device by a finger or hand. (Wikipedia)
Now a common place technology used on games, mobile phones and many other
electronic devices.
66
Photo Voltaic
Advanced thin-film photovoltaic cells are multi layer structures.
Surface topography, roughness and form are all important to the performance of the material
67
Laser Scribes on Thin Film Solar Cells
Reports and data are assembled from
all the data sources.
Namely topographical data from the
Z scan.
Rendered data in full colour.
A horizontal scan across the laser
scribe is overlaid and the
corresponding with measurements
presented.
The entire length of the scribe can be
measured and resulting data for
average, min, max and Standard
Deviation can be found.
68
Photo Voltaic at 100 x Objective
Full colour data is available at high magnifications
69
Pattern on SiC wafer
Grooved pattern on SiC coated with
SiO2.
In normal reflection mode distances
are measured too short because of the
SiO2 coating.
New first peak method and knowledge
of refraction index gives correct
distances between SiC top surface and
grooves.
70
Metal Mold for Light Guide Panel
These complex surfaces can be visualised readily with confocal techniques.
71
Micro Lens Array
Microlenses are small lenses, generally with diameters less than a millimetre (mm) and often as small as
10 micrometres (µm). The small sizes of the lenses means that a simple design can give good optical
quality but sometimes unwanted effects arise due to optical diffraction at the small features.
Microoptics in nature. Examples of microoptics are to be found in nature ranging from simple structures
to gather light for photosynthesis in leaves to compound eyes in insects. As methods of forming
microlenses and detector arrays are further developed then the ability to mimic optical designs found in
nature will lead to new compact optical systems
72
Fresnel lens
A Fresnel lens is a type of lens invented by French physicist Augustin-Jean Fresnel.
Originally developed for lighthouses.
Measurements of surface properties are easily achieved.
73
Topography of cosmetics materials
3D image of human skin,
silicone replica
Lipstick
Collected images can be used to
measure skin replica
blending condition of lipstick,
manicure and foundation.
3D image of human hair
74
Precision Assembly & Manufacture
STFC have extensive expertise in the process of micro-fabrication at the
sub-mm level and an understanding of the problems that this poses
75
Precision Assembly & Manufacture
Laser targets assembled under a microscope.
Some items are conical in shape.
Roughness of curved surfaces will be measured.
A difficult task for other instruments due to the conical shape of the part.
76
Acknowledgements
77
•
Wikipedia for historic information.
•
Chris Spindloe STFC Rutherford for his help with the Laser Target images.
Last 2 slides
End
Questions and Answers
78