Transcript No Slide Title

ITRS 2003 Factory Integration Chapter
Facilities Backup Section
Details and Assumptions for Technology
Requirements and Potential Solutions
2015/7/21
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Backup Outline
 Contributors
 Facility Scope
 How Metrics were Selected
 Facilities Technology Requirements Table
 Translating Facilities Technology Requirements to
Reality
 Supporting Material for Facilities Technology
Requirements
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Contributors to this Section
 Bill Acorn (ACS)
 Carl Garrison (Hoffman Const)
 Mike Alianza (Intel)
 Ken Goldstein (CCI)
 Hal Amick (Colin Gordon & Assoc)  Abbie Gregg (AGI)
 Jim Ammenhaeuser (ISMT)
 Dave Jones (Air Products)
 Todd Bird (CSCI)
 John Lake (DPR)
 Arnold Canales (TriMega)
 Charlie Lynn (Fluor Corp)
 Al Chasey (ASU)
 Joe Mattrey (M-W Zander)
 Theron Colvin (IM&AGE)
 Mike Ohalloran (IDC)
 Anne Elder (Intel)
 Jim Wermes (HDR)
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Facilities Scope
 Facilities Definition
 All buildings and infrastructure directly associated with manufacturing
 “The biggest tool in the factory”
 Scope
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Building (Fab, E-Test, Probe, Labs)
Clean room
Plumbing, HVAC, Utilities and piping
Facilities support space – Subfab, Utility, CUB
Direct manufacturing people space
EHS space – scrubbers, showers, emergency response areas
Life Safety Systems – LSS
Factory Management System or BAS
Waste treatment
UPS and Power and Power Generation (outside US)
All infrastructure up to the back of the production equipment (pipes, power lines,
etc.)
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Pictorial of the Facility
Filters, Airflow
and HVAC
Production Equipment (not included)
Material Handling Equipment (not included)
Labs
Labs
EHS Support
Mfg People Space
Telecom
Network
Cleanroom
Pipes,
Gases,
Plumbing
Central Utility Building (CUB)
Support space for boilers, chillers,
Ultrapure water, gases, exterior tanks,
waste treatment, emissions, etc.
Factory Management
Systems
Sub-Fab
UPS & Electrical
Service Mains
Specialty support
Utility
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Support
Equipment
Power
Generation
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How Metrics were selected
 Almost every metric is a best in class or close to best in class
 Sources are: Rob Leachman’s published 200mm benchmarking data,
individual IC maker feedback, Trecenti/UMC 300mm joint venture published
data, and I300I Factory Guidelines for 300mm tool productivity
 It is likely a factory will not achieve all the metrics outlined in the
roadmap concurrently
 Individual business models will dictate which metric is more important than
others
 It is likely certain metrics may be sacrificed (periodically) for attaining other
metrics (Example: OEE/Utilization versus Cycle time)
 The Factory Integration metrics are not really tied to the
technology nodes as in other chapters such as Lithography
 However, nodes offer convenient interception points to bring in new
capability, tools, software and other operational potential solutions
 Inclusion of each metric is dependent on consensus agreement
We think the metrics provide a good summary of stretch goals for
most companies in today’s challenging environment.
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Construction, Equipment, and Manufacturing Timeline
Metrics
• Facilities: Ground Break to Area ready for 1st tool
• Facilities: Ground Break to all facilities systems go
• Equipment: From PO to move-in
• Equipment: Area ready to 1st tool move-in
• Equipment: 1st tool move-in to tool qual complete
• Equipment: Qual complete to full throughput capable
• Operations: 1st tool move-in to 1st full loop out
Ground Break
Ground Break to Area
ready for 1st tool
Tool install and facility
systems operational
PE Purchase Order to 1st
tool move-in
1st tool move-in to tool qual
complete
Qualify complete to full
throughput capable
Pilot Line operating
Factory Ramp
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Translating Facilities metrics to Reality (1)
Metrics
Key Issue or Challenge
Manufacturing
(Cleanroom) area as a
% of Total site building
area
 Equipment and support elements
are getting larger which is
increasing the size of clean room
and sub-fab space
 New and different support
equipment is moving into the nonclean room area
 Robust Design and Factory Modeling tools
 Reduce move-in size of equipment to
minimize isle widths
 More efficient and smaller support
equipment (match tool footprint in
manufacturing area)
Manufacturing
(Cleanroom) area/Wafer
starts per month
(m2/WSPM)
 Cleanroom size is increasing faster
than WSPM due to increased
equipment size and more/different
process steps
 Scalability implications to meet
large 300mm factory needs
 Reduce move-in size of equipment to
minimize isle widths
 More layout density / Vertical layout
optimization.
Facility Life (in 3 year
nodes)
 Reuse of Facilities across multiple
technology nodes
 Ability to convert 200mm facilities
to 300mm wafer size
 Complexity of integrating NGL into
the factory
 Standard facility concepts and system
designs
 Improved factory layout
Tool maintenance level
and Facility level
classification of air
cleanliness in the
manufacturing
(cleanroom) area
 Thermal energy management and
tool backside maintenance, (not
wafer level cleanliness) are now
preventing cleanliness class and
airflow reduction
 Reuse of Buildings across multiple
technology nodes
 Coordinate with Production Equipment
suppliers to reduce facility cleanliness
 Process cooling water vs Air cooling
 Tool Vendor design-in for maintenance
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Potential Solutions
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Translating Facilities metrics to Reality (2)
Metrics
Key Issue or Challenge
Potential Solutions
Production Equipment
Installation and
qualification cost as a
% of capital cost
 Lack of consistency between
equipment, constantly changing
equipment design, incorrect
documentation,
 Increasing gas and chemical
connections, and ESH compliance
 Reduce time to ramp factories
 Rapid and frequent factory plan
changes
 Minimize downtime to ongoing
operations while converting
factories to new technologies
 Earlier involvement with new technology
tool designers
 Base construction "design for tool install"
emphasis.
 Standard / consistent equipment
connections
 Correct documentation and improved
change control
Facility operating cost
including utilities as a
% of total fab operating
cost
 Higher depreciation from
construction costs
 Higher cost and consumption of
utilities (power, water, gases and
chemicals)
 Higher labor costs
 Reduced makeup air and exhaust
requirements, wider variation in facility
humidity and temperature control
specifications.
 Heat reclaim
 Water reclaim/recycle
 Alternative power solutions
Utility cost per Total fab
operating cost
(percent)
 Higher consumption of power,
water, gases and chemicals
 Lack of good data to measure
factory effectiveness for
optimization and improvement
programs
 Higher voltage power for equipment to get
more efficient distribution
 Water reclaim/recycle
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Translating Facilities metrics to Reality (3)
Metrics
Key Issue or Challenge
Potential Solutions
Utility Utilization
(demand/installed)
 High initial construction cost and
high operating cost due to under
utilization of Mechanical, Electrical,
and Plumbing utilities.
 Increasing process complexity due
to increasing number of utility
requirements
 New Material Introduction
 Matching production equipment operating
loads with installed system capacities.
 Earlier and more accurate identification of
tool installation demand requirements (e.g.
Pressures, flows, loads, consumptions)
 Standardized measuring and reporting of
power utilization at equipment [Applies to
water and gas systems also]
Vibration criteria for
Facility Critical and non
Critical areas
 Complexity of integrating NGL
equipment into the factory
 Understand the upfront costs to
incorporate EFS
 Standardized facility concepts to reduce
custom factory designs
 Robust Design and factory modeling tools
Fab to sub fab ratio
 Scalability implications to meet
large 300mm factory needs (50K
wspm)
 Improve factory layout density/vertical
layout optimization
Reliability
 Overall reliability is not an issue
 Continuous improvement for
issues like power quality
 Standalone and Integrated
Reliability required to keep
factories operating
 Increased impacts that single
points of failure have on highly
complex factories
 Benchmarks to understand best known
methods for the industry
 Develop Risk Assessment tools for
understanding economic impact of facility
designs
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Translating Facilities metrics to Reality (4)
Metrics
Key Issue or Challenge
Potential Solutions
Factory Construction
Time from Ground
break to first tool
move-in (months)
 Reduced time to ramp factories
 Lack of sufficient resources
 Limits on total number of people
able to work in a limited space…
 Variation of global code
regulations
 Increasing ESH/Code requirements
 Process complexity driving
facilities complexity and less than
optimal scope clarity.
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Gas, Water, and
Chemical Purity
 Increasing complexity and
construction costs from more and
different types of gases and
chemicals
 Comprehend increased purity
requirements
 Innovative, yet cost effective, point-of-use
and/or factory-wide abatement and
reclaim/recycle technologies
Power, Water, and
Chemical Consumption
 More stringent EHS regulations
 Understanding Upfront costs to
incorporate EFS
 Chemical and Material restrictions
 Earlier involvement with new technology
tool designers to incorporate innovative,
yet cost effective, point-of-use and/or
factory wide abatement and reclaim/recycle
technologies
 Risk assessment tools to understand
economic impact of design for ESH
regulations
 Power and water reduction protocols
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Standardized design concepts
Minimize change allowed
Design tools including e-tools
More off-site fabrication
Improved collaboration between the IC
maker and factory design/builders
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Prod Equipment – Backup slides based on Facilities WG inputs
Design tools to operate within
mainstream facilities services
capabilities
Heat load removal by
increased use of Process
Cooling Water
Drive 3-5 most important tool
installation standards including
pass/fail criteria test methods
Predictable & consistent tool connections
for Utilities, Drains, Exhaust, Interconnects
Production equipment must
Not be affected by
use of mainstream wireless
technologies (cell phones, pagers,
PDA, etc)
Side view
(Prod Equip)
Use higher efficiency (higher Voltage
not current) power distribution.
(> 480V, 3 phase, today most are
208V, single phase, very high current)
Raised floor
Physical Separation of
waste streams
See Next Page for
Additional Details
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Shadow footprint
in sub-fab
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Sub-fab space:
support equipment must
fit into shadow footprint
as determined by prime
manufacturing area
(Fab/Subfab ratio <1)
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Feedback to Prod Equip Team from Facilities
# Process Tool Focus Area
1 Process tool heat load removal
by increased use of process
cooling water (PCW) versus
today’s convention air cooling
methods.
Rationale
Today, in many functional areas,
large volumes of HEPA air is
used to remove the heat radiating
from the process tool.
Water-cooling is much more cost
effective.
2 Process tools to use higher
Higher efficiency power (480V, 3
efficiency power distribution
F) is more cost effective that
systems (increase usage of
208V, single F. (by a factor of
480V, 3 F and reduce the usage 1.732?)
of 208V, single F)
3 Physical separation of (liquid)
Some tools being delivered with a
waste-streams at the tool
single waste-stream manifold
design
4 Sub-fab support equipment
Today, there are several support
must fit into the shadow
equipment such as powerfootprint as determined by
supplies & point of use devices
footprint consumed by prime
that is starting to consume more
manufacturing area (in the
footprint in sub-fab than in
cleanroom)
cleanroom. (Tee Pee)
5 Process and metrology tools
must be immune to mainstream
wireless technologies usage in
cleanroom
If the tool is a very high KW tool,
investigate change to 480V, 3F
power.
Proceed with extreme caution as some
suppliers have put step down transformers
within tool footprint and made it worse than
208V approach L
Each waste stream must be
separatable at the tool depending on
process chemistry needs.
Tool supplier must consider sub-fab
footprint designs rather than just
cleanroom footprint. Better packing
density of equipment in the
cleanroom enables the maximum
number of tools that can be installed
in the cleanroom and improve factory
output.
Develop environmental RF parameter
specs that tool suppliers agree to.
Should be based on waste steam type
versus a blanket approach to avoid unnecessary lines being installed.
Must not make cleanroom footprint larger to
accommodate the subfab size. Also, when
growing tool height, it must stay within
height restriction of 200mm fabs if possible
to support reuse
Tool drawings must be consistent
with as-built configurations to allow
use of 3-D prefacilitization jigs.
Tool designs to comprehend “design
for maintenance” focus when
operating in a less clean environment
to allow lower cost Facilities. This
also is critical to allow reuse of older
CRs.
Certain tools such as EUV
Design tools to spread loads to stay
Scanner could likely stress most within the 250 # typical live load
facility’s live load carrying
design criteria.
capacity.
Leverage IC maker and Supplier connectivity
e-Manufacturing solutions for this capability
Manufacturing equipment
performance should not be
negatively impacted if wireless
devices (cell phones, pagers,
PDA, etc)
6 Predictable and consistent tool As-built configurations of delivered
connections for utilities, drains, tools do not often match the tool
exhausts and interconnects
drawings
7 Select tools should accomodate Fab cleanliness spec of ISO
reduced CR air cleanliness
Class 5 and higher may not
need resulting from FOUPS and support certain kinds of
mini-environments.
maintenance when the chamber
is opened and serviced.
8 Tool weights approaching the
limits of the facility’s live load
carrying capacity
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What this means
Issues/Caution/Next Steps
High KW tool designs optimized
Should be modeled and verified to validate
around PCW heat removal methods
contention
versus current convective designs will
allow significant Facility CR HVAC
cost reductions.
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Parameter specs and testing methods
needed.
Provide tool-based cleanliness for preventive
maintenance. Need to coordinate with
Production Equipment suppliers to produce
most cost effective solution.
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Facilities Standards
Work access
standards to eliminate
Ergo issues
Ceiling level
Cleanroom Noise
Criteria standards
Cleanroom
Temperature
& RH ranges
Environment/
stds
Cleanroom height
standards
Utility, fluids,
exhaust, drains
hook-up
standards
Rear of production
equipment
Wall interface
standards
Rear
U/I
Standards for install
pedestals, jigs/fixture
for alignment
Fab levels
Vibration stds
Raised floor
height standards
Max
Global
Maximum
weight
Construction
move-in
standard size stds
Codes
Sub-fab standards
Sub-fab level
Standards for facilities systems
safety counter-measures
Facility electrostatic
levels stds
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Legend:
-> Standards Exist
-> Standards Are Under Development
-> Standards Are Needed
Materials supply
container standards
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Vibration Criteria Curves
Ref: IEST RP-CC012.1, Considerations in Cleanroom Design, Institute of Environmental Sciences
and Technology, Mt Prospect, IL, pg 38
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Ref: IEST RP-CC012.1,
Considerations in
Cleanroom Design,
Institute of Environmental
Sciences and Technology,
Mt Prospect, IL, pg 39
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