Transcript Nanofabrication Breakout Session Results

Nanofabrication Breakout
Session Results
Vision Elements
• Ability to fabricate, by directed or self assembly methods,
functional structures or devices at the atomic or
molecular level.
• Ability to probe individual nano devices by either scaled
contact methods or more sophisticated optical/electrical
non-contact approaches.
• Nanofabrication is infrastructure to enable revolutionary
bottoms-up (assembly from atomic/molecular
constituents) solutions, including some that will enable
top-down, high-volume solutions.
• Top-down approach: push resolution to nanometer scale.
Potential Fabrication
Technologies/Methodologies
•
Direct atom molecular manipulation w/
scanning probe.
–
•
•
•
•
•
•
•
•
Array technology essential and needs
to be extended to wide variety of
materials
Need: scanning probe position
accuracy
Beam technology (e-beam, serial,
parallel)
Directed self assembly (involving
guidance & capture)
Templating (e.g., molecular, surface,
etc.)
Film deposition methods
Biological/bioassembly techniques (all
self-directed assembly)
Structured light/optical lattices/atom
optics
Continuous flow systems (microfluidic)
•
•
•
•
•
•
•
•
•
•
•
Nanoimprint
In-situ analytic tools
Light-based lithography
Laser tweezer
Atomic ink jet
Micro tweezers
Mixed mode lithography
Decoration + super selective trap
Controlled surface reactivity
Nanopositioning (repeatable, accurate,
linear)
Self-aligning metrology
Top Priority Gaps in Basic Nanoscale Science &
Technology and Manufacturing, Implementaion, &
Manufacturability of Nanodevices
•
•
•
Control of 3D synthesis of nanostructures
Methods to attach single molecules on surfaces w/ specific orientations &
density (aka directed assembly)
Global navigation to a nanofabricated structure (“picometer GPS”)
– Index referencing system
•
•
•
•
•
•
•
•
Higher throughput metrology capable of near atomic resolution
Ultra high accuracy 3D positioning (picometer scale) over large volumes
(1 cm3) or length scale
Lack of atomically precise tips for AFM, STM
Theory, modeling, & simulation in support of nanofabrication & metrology
for nanofabrication
Surface science for biological materials, soft systems
Monitoring dynamics of assembly
Interfacing atomic-scale devices (i.e., electrical, chemical)
Transition from the micro or nano to the atomic scale (interconnect
problem)
Scientific & Technological
Infrastructure Needs
Infrastructure Needs
• Need educational/ training
opportunities
• Establish local/ regional
research centers
• Need access to research
centers (i.e., national labs,
NIST)
• Funding for developing better
tele-operation
• Coordination of research centers
• Standardization of fabrication
perspective packages
General Recommendations
& Issues
• Create special SBIR topic
areas for basic
nanotechnology studies
• Target funding for small
application development
• Don’t duplicate international
efforts regarding research
centers
– Use tele-operation
Gaps in manufacturing,
implementation, &
manufacturability
Gaps in nanometer scale science and
technology
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Ultra high accuracy 3d positioning (picometer) over
large volume (1 cm3) or length scale [7]
Environmental impact management [2]
Higher throughput metrology capable of near atomic
resolution [3]
Nanoscale test sites as reporters/functionality
beacons [2]
Global navigation to a nanofabrication structure [4]
Methods of controlling large (1000x1000) arrays of
tips [1]
Precise CD standards at nanometer scale
Methods to attach single molecules on surfaces w/
specific orientation and density (directed assembly)
[5]
Batch fabricate nanoparticles w/ low degree of
polydispersity
Software for design, control, modeling [2]
Control of 3D synthesis of nanostructures [3]
Stablizing nano structures (passivation) [1]
Scatterometry
•
•
•
•
•
•
•
•
•
•
Lack of atomically precise tips for AFM, STM [4]
Monitoring dynamics of assembly [3]
Surface science for biological materials [3]
Theory, modeling, and simulation in support of
nanofabrication and metrology for nanofabrication
[4]
Interfacing atomic scale devices [3]
Link/bridge inorganic material to biological material)
[1]
Component interconnectivity [4]
Bridging from the microscale to the nanoscale [3]
Inability to etch/sculpt features on a nanometer
scale [2]
Simulation and physics-based models to interpret
metrology data [1]
Intrinsic atomic length scales (self-referencing)
Detect fluorescence signal at a single photon level
and convert to image
Non contact inspection of device performance
Non contact standing way methods (electron, xray)
for wireless contact to nano devices [1]