Transcript PowerPoint Template

The status of academic and industrial force
metrology below 1 N and the corresponding
strategy at KRISS
TC3 Round Table Discussion Meeting
Speaker: Min-Seok Kim
Korea Research Institute of Standards and Science
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Micro- or nano mechanical testing – Newton
Micro tensile testing in KRISS
1.2
1.0
Load, P (N)
0.8
Micro tensile tester (ESPI)
0.6
Col 1 vs Copper
Col 2
foil
thickness : 18m
width : 500m
length : 3mm
0.4
0.5
0.018
0.2
Speed d/dt=50m/min
0.0
2
0
(Unit : mm)
50
100
150
200
250
Displacement,  (m)
Specimen (Copper)
By courtesy of Dr. Yong-Hak Huh
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Micro- or nano mechanical testing: micro-Newton
Nanoindentation experiments in KRISS
0.045
ZnO thin film
0.040
0.035
Load (mN)
0.030
Nanoindenter (MTS)
0.025
Loading
0.020
0.015
Unloading
0.010
0.005
0.8 m
0.000
0
1
2
3
4
5
6
7
8
9
10
Indentation Depth (nm)
Specimen (ZnO thin film, 0.8 m)
By courtesy of Dr. Jun-Hee Hahn
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Micro- or nano mechanical testing: nano Newton
Measurement of tensile properties of carbon nanotube in KRISS
80
Nano-manipulator & force sensor
Force(nN)
60
40
20
MWCNT
Tip
0
0
Specimen (MWCNT)
50
100
150
200
250
Displacement(nm))
By courtesy of Dr. Seung-Hun Nam
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Micro- or nano mechanical testing: pico-Newton
Mechanical testing of stem cells in PSIA Corp. (AFM company)
Force-Distance curve of the stem cell
Atomic force microscope (PSIA)
Adhesion effect between tip and sample
Step force: ~ 300 pN
Young’s modulus of the stell cell from the F-D curve
: 10 ~ 18 kPa
Specimen (embryonic stem cell)
By courtesy of Dr. Sang-Jun Cho
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Problems due to the lack of force traceability (1)
Young’s modulus measurements in AFM
Different cantilever
Same specimen
Data by courtesy of Dr. Sang-Jun Cho, PSIA Corp.
For the reasonable data
Needs Force Calibration or Stiffness Calibration!
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Problems due to the lack of force traceability (2)
Mechanical testing of “Spacers” for TFT-LCD display panels
60
Glass
MTS (L.R. = 4.5 mN/s)
ITO
TFT
Spacer
Glass
Schematic diagram of a TFT-LCD panel
Flat Punch Tip
40㎛ x 40㎛
Load (mN)
50
B company (L.R. = 4.4 mN/s)
40
30
Loading
20
Unloading
10
0
0
100
200
300
400
500
600
700
800
Displacement (nm)
Testing setup
Load-displacement diagrams of the same spacer
from two different indentation instruments
By courtesy of Dr. Jun-Hee Hahn
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Status in KRISS – AFM cantilever calibration
Nano Force Calibrator
 Calibration of micro cantilevers and force sensors
 Uncertainty evaluation reported (Metrologia, Vol. 43, pp. 389-95)
 Force measuring capability of the balance below 10 N is under test
 Calibration service will be available next year
Spring constant calibration
of a rhombus-shaped
cantilever that is specially
designed for mechanical
testing in AFM
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Status in KRISS – Transfer standards
Nano Force Sensor
 Piezoresisitive cantilever to be used as transfer standards
 Sensor properties are under test
 Developing force balancing cantilevers is scheduled next year
PCB pad
Gold wires
Force sensor
Fabricated piezoresistive cantilever
Sensor assembly
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Status in KRISS – New standards
Quantized force realization in pico-and femto-Newton range
 Based on magnetic flux quantization of a superconducting annulus
 Step size ~0.2 pN (at 10 T/m); range ~ 0.2 - 40 pN
 Target uncertainty: less than 1 %
 Project launched in 2006
Visit us in poster session for details
Magnetic moment steps (n = 0,1, 2…)
Superconducting
loop or SQUID
Super-currents
400 um× 4 um
× 0.34 um
dBext
dz
Ultra-soft cantilever
Stepwise force
Optic interferometer
z-gradient
magnet
F = n  184 fN
Fabricated ultra-soft cantilever
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Small force standards development strategies
Applications
Micro thrusters for satellites
Magnetic resonance force microscope
Optical tweezer
Nano indentation
Force
1 fN
Standard
Micro mechanical testing
Nano mechanical testing based on AFM
1 aN
1 pN
Quantized magnetic force
Superconducting ring
1 mN
Electrostatic force
Nano-balance
Deadweight force
Electromagnetic compensation balance
10 N
Superconducting ring
Ultrasoft cantilever
Nano Force
Calibrator
50 mN
Magnet for z-gradient
100 N
1N
10 N
10 pN
Realization
1 N
1 nN
5N
200 N Deadweight
Force Standard
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006
Closing Remarks
 Industrial needs for traceable small force metrology will be emerging
 However, when ??
 What would be the uncertainty level of small force metrology which
industries require ?
 Accurate force metrology would be a solid foundation of reliable and
high-qualified production of nanotechnology-based goods
IMEKO XVIII World Congress
Metrology for a sustainable development
Rio de Janeiro, Brazil, Sept. 17-22, 2006