Transcript TCS Strategy Meeting

PerfecTest MSA (Measurement System Analysis)
09/23/2005
COLLECT & ANALYZE DATA
Measurement Systems Analysis (MSA):
MSA Plan for PerfecTest:
Goal:
Understand PerfecTest Capability to Report Registration Defects
 10 SAMPLES (Frames)
 All 10 frames from Cat #8363 Lucent ModCell
 3 OPERATORS ACROSS 2 SHIFTS
Operators ran System Test (calibration template prior to MSA)
Each operator probed the PerfecTest coupons in all four corners of each frame.
Once done a report is generated listing expansion X/Y and Shift X/Y. The values on
this report were used for the MSA data.
 USE OF (1) CALIBRATED PROBE
Fortier 07/11/05
Company Confidential - 1
COLLECT & ANALYZE DATA
Measurement Systems Analysis – PerfecTest X-Expansion – Variable Data
PROGRAM (APPLICATION): X-Expansion (2-11) CS
INSTRUMENT#: PerfecTest
PART NUMBER:
8363
POINT OF MEA.: Coupon
OPERATOR #1 NAME: Andy Fortier
OPERATOR #2 NAME: Smiley
OPERATOR #3 NAME: Ken
DATE:
9/23/2005
OPERATOR #1 TRIALS
SAMPLES
#1
#2
#3
Sample #1
0.002
0.0021 0.0021
Sample #2 0.0018 0.0018 0.0018
Sample #3 -0.0003 -0.0003 -0.0003
Sample #4 -0.0004 -0.0004 -0.0004
Sample #5 -0.0008 -0.0008 -0.0008
Sample #6 0.0001 0.0001 0.0001
Sample #7 0.0003 0.0003 0.0003
Sample #8 0.0002 0.0002 0.0002
Sample #9 0.0011 0.0011 0.0011
Sample #10 0.001
0.001
0.001
Averages
0.001
0.001
0.001
Overall Range Average (R1, R2, R3)
Range of Operator Means (S1, S2, S3)
# Parts
# Trials
# Appraisers
Upper Control Limit
Lower Control Limit
Mean
Oper #1
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.0010
OPERATOR #2 TRIALS
Range
#1
#2
#3
0.0001
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0021
0.0018
-0.0004
-0.0004
-0.0008
0.0001
0.0003
0.0003
0.0011
0.0009
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.0009
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.001
0.001
0.001
0.001
0.001
0.000
Avg(S1) Avg(R1)
#1
0.0000
0.0000
0.0001
0.0000
0.0000
0.0000
0.0000
0.0001
0.0000
0.0001
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.001
0.001
0.000
Avg(S2) Avg(R2)
#2
#3
0.0021 0.0021
0.0018 0.0018
-0.0003 -0.0003
-0.0004 -0.0004
-0.0008 -0.0008
0.0001 0.0001
0.0003 0.0003
0.0002 0.0002
0.0012 0.0011
0.0011
0.001
0.001
0.001
0.001
Range
Mean of
All Trials
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0001
0.0001
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.0010
0.001
0.000
Avg(S3) Avg(R3)
0.0005
0.0029
Mean
Oper #3
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.0010
0.0025
1
0.76%
0.43%
0.87%
58.51%
As % of
Total Variation
1.30%
0.73%
1.49%
99.99%
2
3
4
5
6
P/T Ratio
0.87%
94
A
v
e
r
a
g
e
8
9
0.0015
0.0010
0.0005
0.0000
Oper #1
Oper #2
-0.0010
Sample #
TOTAL % R&R
1.49%
Rev B
Fortier 07/11/05
7
0.0020
-0.0005
# Distinct Categories
Avg(T)
Range(T)
Part by Appraiser Plot
As % of
Tolerance
0.00001
0.00001
0.00001
0.00091
0.00091
0.008
OPERATOR #3 TRIALS
Range
0.0000
0.0000
10
3
3
0.0001
0.0000
Measurement Unit Analysis
Equipment Variation
Appraiser Variation
Repeatability & Reproducibility
Part Variation
Total Variation
Mean
Oper #2
0.0021
0.0018
-0.0003
-0.0004
-0.0008
0.0001
0.0003
0.0002
0.0011
0.0009
SPECIFICATION
TOLERANCE
Company Confidential - 2
Oper #3
5/20/2004
10
COLLECT & ANALYZE DATA
Measurement Systems Analysis – PerfecTest Y-Expansion – Variable Data
PROGRAM (APPLICATION): Y-Expansion (2-11) CS
INSTRUMENT#: PerfecTest
PART NUMBER:
8363
POINT OF MEA.: Coupon
OPERATOR #1 NAME: Andy Fortier
OPERATOR #2 NAME: Smiley
OPERATOR #3 NAME: Ken
DATE:
9/23/2005
OPERATOR #1 TRIALS
SAMPLES
#1
#2
#3
Sample #1
Sample #2
Sample #3
Sample #4
Sample #5
Sample #6
Sample #7
Sample #8
Sample #9
Sample #10
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0012
0.0006
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0012
0.0007
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0007
Averages
0.000
0.000
0.000
Overall Range Average (R1, R2, R3)
Range of Operator Means (S1, S2, S3)
# Parts
# Trials
# Appraisers
Upper Control Limit
Lower Control Limit
Mean
Oper #1
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0012
0.0007
OPERATOR #2 TRIALS
Range
#1
#2
#3
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0001
0.0001
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.000
0.000
0.000
0.000
0.000
Avg(S1) Avg(R1)
OPERATOR #3 TRIALS
#1
#2
#3
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0015
0.0007
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.000
0.000
0.000
Range
Mean of
All Trials
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0002
0.0001
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
0.000
0.000
Avg(S3) Avg(R3)
0.0004
0.0039
Mean
Oper #3
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0014
0.0006
0.0025
0.95%
0.29%
0.99%
78.98%
As % of
Total Variation
1.20%
0.37%
1.26%
99.99%
0.0020
1
2
3
4
5
6
P/T Ratio
0.99%
112
8
9
0.0015
-0.0010
Oper #1
Oper #2
-0.0020
Sample #
TOTAL % R&R
1.26%
Rev B
Fortier 07/11/05
7
A
v 0.0010
e 0.0005
r
a 0.0000
g -0.0005
e
-0.0015
# Distinct Categories
Avg(T)
Range(T)
Part by Appraiser Plot
As % of
Tolerance
0.00001
0.00000
0.00002
0.00123
0.00123
0.008
Range
0.000
NA()
Avg(S2) Avg(R2)
0.0000
0.0000
10
3
3
0.0001
0.0000
Measurement Unit Analysis
Equipment Variation
Appraiser Variation
Repeatability & Reproducibility
Part Variation
Total Variation
Mean
Oper #2
0.0024
0.0016
-0.0004
-0.0004
0.0003
0.0003
-0.0015
-0.0007
0.0013
0.0006
SPECIFICATION
TOLERANCE
Company Confidential - 3
Oper #3
5/20/2004
10
COLLECT & ANALYZE DATA
Measurement Systems Analysis – PerfecTest X-Shift – Variable Data
PROGRAM (APPLICATION): X-Shift (2-11) CS
INSTRUMENT#: PerfecTest
PART NUMBER:
8363
POINT OF MEA.: Coupon
OPERATOR #1 NAME: Andy Fortier
OPERATOR #2 NAME: Smiley
OPERATOR #3 NAME: Ken
DATE:
9/23/2005
OPERATOR #1 TRIALS
SAMPLES
#1
#2
#3
Sample #1
Sample #2
Sample #3
Sample #4
Sample #5
Sample #6
Sample #7
Sample #8
Sample #9
Sample #10
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.0004
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
Averages
-0.001
-0.001
-0.001
Overall Range Average (R1, R2, R3)
Range of Operator Means (S1, S2, S3)
# Parts
# Trials
# Appraisers
Upper Control Limit
Lower Control Limit
Mean
Oper #1
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
OPERATOR #2 TRIALS
Range
#1
#2
#3
0.0001
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.001
0.000
Avg(S1) Avg(R1)
-0.001
-0.001
-0.001
OPERATOR #3 TRIALS
#1
#2
#3
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0005
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.001
NA()
Avg(S2) Avg(R2)
-0.001
-0.001
-0.001
Range
Mean of
All Trials
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0001
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
-0.001
0.000
Avg(S3) Avg(R3)
-0.0006
0.0004
Mean
Oper #3
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
1
0.38%
0.21%
0.44%
8.10%
As % of
Total Variation
4.69%
2.63%
5.38%
99.86%
2
3
4
5
6
7
8
9
-0.0004
A
v
e
r
a -0.0007
g
e
Oper #1
# Distinct Categories
P/T Ratio
0.44%
26
Oper #2
-0.0009
Sample #
TOTAL % R&R
5.38%
Rev B
Fortier 07/11/05
Avg(T)
Range(T)
Part by Appraiser Plot
As % of
Tolerance
0.00001
0.00000
0.00001
0.00013
0.00013
0.008
Range
0.0000
0.0000
10
3
3
0.0000
0.0000
Measurement Unit Analysis
Equipment Variation
Appraiser Variation
Repeatability & Reproducibility
Part Variation
Total Variation
Mean
Oper #2
-0.0005
-0.0006
-0.0007
-0.0007
-0.0008
-0.0004
-0.0006
-0.0005
-0.0007
-0.0004
SPECIFICATION
TOLERANCE
Company Confidential - 4
Oper #3
5/20/2004
10
COLLECT & ANALYZE DATA
Measurement Systems Analysis – PerfecTest Y-Shift – Variable Data
PROGRAM (APPLICATION): Y-Shift (2-11) CS
INSTRUMENT#: PerfecTest
PART NUMBER:
8363
POINT OF MEA.: Coupon
OPERATOR #1 NAME: Andy Fortier
OPERATOR #2 NAME: Smiley
OPERATOR #3 NAME: Ken
DATE:
9/23/2005
OPERATOR #1 TRIALS
SAMPLES
#1
#2
#3
Sample #1
Sample #2
Sample #3
Sample #4
Sample #5
Sample #6
Sample #7
Sample #8
Sample #9
Sample #10
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
Averages
0.000
0.000
0.000
Overall Range Average (R1, R2, R3)
Range of Operator Means (S1, S2, S3)
# Parts
# Trials
# Appraisers
Upper Control Limit
Lower Control Limit
OPERATOR #2 TRIALS
Mean
Oper #1
NA()
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.0010
0.0002
0.0001
Range
#1
#2
#3
NA()
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0.000
0.000
0.000
0.000
NA()
Avg(S1) Avg(R1)
OPERATOR #3 TRIALS
#1
#2
#3
NA()
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0
0.0001
0
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.001
0.0002
0.0001
0.000
0.000
0.000
Range
Mean of
All Trials
NA()
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0000
0.0002
0.0000
NA()
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.0010
0.0002
0.0001
0.000
0.000
Avg(S3) Avg(R3)
-0.0002
0.0013
Mean
Oper #3
NA()
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.0010
0.0001
0.0001
Part by Appraiser Plot
0.0005
1
As % of
Tolerance
0.00001
0.00000
0.00001
0.00041
0.00041
0.008
Range
0.000
NA()
Avg(S2) Avg(R2)
0.0000
0.0000
10
3
3
0.0001
0.0000
Measurement Unit Analysis
Equipment Variation
Appraiser Variation
Repeatability & Reproducibility
Part Variation
Total Variation
Mean
Oper #2
NA()
-0.0005
-0.0003
-0.0005
0.0003
0.0001
-0.0002
-0.0010
0.0002
0.0001
SPECIFICATION
TOLERANCE
0.85%
0.20%
0.87%
26.33%
As % of
Total Variation
3.21%
0.74%
3.29%
99.95%
2
3
4
5
6
7
8
9
10
0.0003
A 0.0000
v
e -0.0003
r
a -0.0005
g
e -0.0008
-0.0010
# Distinct Categories
P/T Ratio
0.87%
42
Oper #1
-0.0013
TOTAL % R&R
3.29%
Sample #
Oper #2
Oper #3
Rev B
Fortier 07/11/05
Company Confidential - 5
5/20/2004