Transcript LSCO/PNZT Data using Precision Premier

Piezoelectric Displacement
Results of Measuring Pt/PNZT/Pt
Capacitor on Seiko Instruments
SPA400 AFM.
Radiant Technologies, Inc.
August 7, 2001
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier
Sample Description
•
•
•
•
Capacitor Area:
Construction:
Composition:
PNZT Thickness:
12µ x 12µ
Pt/PNZT/Pt
4/20/80 PNbZT
1µm
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier
Displacement at 40V
40V Displacement Loop
30
25
20
40V
Angstroms
15
10
5
0
-60
-40
-20
1u 4/20/80 PNZT w/
Pt electrodes
measured w/SII
-5 0
20
40
60
-10
-15
Volts
Displacement measured at 40Vwith a measurement period of 1
second.
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier
Displacement at 40V
Displacement in Angstroms Corrected for Chuck Drift
30
25
20
Angstroms
15
Displacement
10
5
0
-60
-40
-20
1u 4/20/80 PNZT w/ Pt
electrodes measured
w/SII SPA400 AFM.
-5 0
-10
-15
Vdrive
20
40
60
Average of 10
loops.
Displacement loop averaged 10 times.
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier
Nested Displacement Loops
Nested Displacement Loops
Angstroms
30
25
20
40V
15
10
20V
30V
10V
5
0
-60
-40
-20
1u 4/20/80 PNZT w/
Pt electrodes
measured w/SII
-5 0
-10
20
40
60
-15
Volts
Displacement measured at 40V, 30V, 20V, and 10V.
Measurement period is 1 second.
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier
Conclusion
• Precision Premier integrates with the Seiko
Instruments AFM family to collect displacement
measurements of thin ferroelectric films.
• The 1µm thick Radiant 4/20/80 PNbZT film
displaced 23Å at 40V giving the film a d33 value
of 57.5.
• The measured value is the not the true d33 value of
the film due to strong clamping by the substrate.
• Piezoelectric fatigue, frequency response, and
imprint can also be measured using the Vision
software.
Radiant Technologies, Inc.
Pt/PNZT/Pt Data using Precision Premier