Cressington 208 HR Sputter coater

08/18/06 mgbersch Overview

Argon On  Check to see if the Argon tank (bottle) main valve is on.

 Do NOT turn the pressure adjust needle valve on the regulator.

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Argon On Number 2  Normally the specimen chamber is left under vacuum.

 Open the inline valve on the argon line. This will vent the chamber. Give it a few seconds.

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Open Sample Chamber  Open chamber by lifting the Target Assembly. Do not place your fingers on the target.

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Remove Glass Jar  To load samples, remove the glass cylinder and place it on clean aluminum foil.

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Place samples in chamber  The stage has a various holders for the different types of samples stubs  Load samples on stage.

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Close Chamber    Replace the glass jar making sure that the o-ring is clean.

Close Chamber top (target assembly) making sure that the top is seated properly on the glass jar. DO NOT DROP THE TARGET ASSEMBLY, lift slightly and pull gently outward to fit top on jar.

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Power Up  Flip the POWER toggle switch.

 The unit will start up in the AUTO mode.

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Move Shutter  Move the shutter out of the way.

 The shutter is used for deposition onto thermally sensitive samples.

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Presets for AUTO Mode - 1  Preset the deposition time by pressing the PAUSE/TEST button and adjusting the SET buttons in the TIMER/current area.

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Presets for AUTO Mode - 2  Preset the plasma current by pressing the SETma button and adjusting the SET buttons in the TIMER/current area.

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Starting the Sputter Cycle  Press the CYCLE/STOP button in the AUTO area  This will start the sputter cycle.

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What does the Cycle Do?

 The Cycle mode will then:  Pump the chamber to 0.05 mbar;  Open argon flush then close;  Pump to 0.15 mbar;  Open argon flush then close;  Open leak valve  Pump to 0.15 mbar  Switch on HV;  Sputter at preselected current for preselected time/thickness 08/18/06 mgbersch

Remove samples  Lift the Target assembly.

 CAREFUL the glass jar may stick to the top O-ring. HOLD THE GLASS while lifting the target assembly.

 Remove samples 08/18/06 mgbersch

Shutdown  Replace glass jar;  Close lid (target assembly)  Close inline valve on argon line  Turn on Power and let chamber pump for a minute.

 Turn off Power  Close Valve on top of Argon Bottle.

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Film Thickness Monitor (FTM)  Coatings can also be deposited using the FTM.

 Density and Tooling factors currently in memory can be displayed by pressing the relevant button.

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FTM - 2  To adjust a value, hold the button for 2 seconds until the period begins to flash. Scroll up or down with the arrow buttons.

 Zero resets the display to zero after a measurement 08/18/06 mgbersch

FTM - 3  To display the current FTM termination thickness, press TERMINATOR and hold for two seconds. To adjust use the arrow buttons.

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08/18/06 mgbersch FTM – Target Density

08/18/06 mgbersch FTM - Tooling Factor

Other  Cressington has a number of options.

 Multi targets  Different size jars.

 Check with CAF personnel before using these.

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