Transcript BSAC Research Review Individual Project

Berkeley Sensor & Actuator Center
JV Clark, N Zhou, D Bindel
SUGAR 2.0 beta
KSJ Pister, J Demmel
KP15
Project description
 Simulation Program for
Microsystems
Needle piercing pig skin
Recent results
 Model functions
extensible by user
 Parameterized netlist and
subnets
Work next 6 months
 Genetic Algorithms
 Adaptive Modeling
 Millennium Web Service
Berkeley Sensor & Actuator Center
Transient Analysis of Pull-In
Smooth ramp V(t) = 0V to 20V.
Pulls in at about 2/3 of gap.
Stepped ramp V(t) = 11V to 15V.
Nonlinear oscillation before pull-in.
Berkeley Sensor & Actuator Center
Subnets used for serpentines
La,b
w=1.8u
SUGAR 3032Hz *
FEA 3032Hz *
Experimental 2697Hz
* No damping was used in FEA and SUGAR simulations.
Berkeley Sensor & Actuator Center
Serpentine Parameterization
Level curves of serpentine stiffness
Dependence on DL & Dw
K=0.0013N/m
Within 1.2% of experimental
Measured by Fedder
K=0.0146N/m
K=0.27N/m
Dw
Berkeley Sensor & Actuator Center
Heatuator Optimization
w
gap
T=150C
T=600C
This geometry was given by B. Allen [Hilton Head ‘98]. SUGAR comes within
0.5% of experimental.
However, this geometry can be optimized for maximum deflection with SUGAR.
DY
Berkeley Sensor & Actuator Center
Heatuator Optimization
Deflection dependence on Dgap & Dw
Within 0.5% error
Measured by B. Allen et al.