Transcript 1 - PTB

Dynamic reference vacuum system for calibration
and characterization of
Quadrupole Mass Spectrometers
TUBITAK UME
Rifat Kangi
Bled, Slovenia -12.04.2012
www.ptline.com
Dynamic Reference Vacuum System
Q  C  p a  p b 
Mass Flow:
-Variable Leak Valve
-Orifice
Orifice Method
Throughput Method
Mass Flow:
- MFC
C 
 RT
D
32 M
S 


1

1 L
d



d


Q
P  P0
 Pa  Pa 0

S  C
 1
 P  P

b0
 b

2
System design information and examination (ISO 21360, 5302, 27892)
Dynamic Reference Vacuum System
Single Chamber System
Throughput Method
Double Chamber System
Orifice Method
Dynamic Reference Vacuum System
Mass flow traceability chain needed in the future
Space Environment Simulation: generation, measurement & control
4
-1
10
10
500 slm
2
30 slm
1
2000 sccm
10
Throughput [mbar-L/s]
10
0
10
Effective Area: Low Vacuum Pumps
-3
10
Under Establishment:
[>110-2 mbar.L/s]
5 sccm
-2
-5
10
-6
10
-7
10
1 sccm: min. commercially available
-3
-8
10
10
-4
-9
10
-5
-6
10
-7
10
-8
-5
MFP [m] = 5x10 /P(Torr)
Effective Area: High Vacuum Pumps
10
iQDP80 Vendor
iQDP80a Experiment
V1000A Vendor
V1000HT Vendor
WS 600 L/min Vendor
E02k150 Vendor
iQMB250 Vendor
VacIonPlus500 Vendor
STP H1303C Vendor
Ebara 30000L/min Vendor
10
10
± 0.2 %
-4
-1
10
Sonic
Nozzle
10
100 sccm
10
-2
10
-10
10
Mass, N2 [kg/s]
3
10
CVF
± 2M
%
CPFM
±5%
-11
10
-12
10
-13
10
-9
Orifice
Method
-14
10
10
-12
10
-11
10
-10
10
-9
10
-8
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
10
Pressure [mbar]
The MFC system is not enough to cover the mass flow traceability chain necessary in the
vacuum metrology field. Must design and build other mass flow standard in UME.
System can be used for
•
Gas Flow Measurement [Q=C×∆P] (Double Chamber System)
•
TMP Evaluation (High Vacuum Pumps)
•
Scroll Pump Evaluation (Low Vacuum Pump)
•
Mass Flow Rate Measurement [dP/dt] at Constant Volume Chamber
•
System can be improved to continuous expansion system
•
QMS Evaluation
Long Term Stability Results of Leak Valve
Long term stability of leak valve (MDC/ULV-150)
8.192E-06
4.096E-06
2.048E-06
1.024E-06
5.12E-07
2.56E-07
1.28E-07
6.4E-08
3.2E-08
1.6E-08
8E-09
4E-09
2E-09
1E-09
Base Pressure
Pressure (mbar)
5.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
0
300
600
Time (s)
900
Pressure (mbar)
Base Pr.
5,00E-09
1,00E-08
1,00E-07
1,00E-06
1,00E-05
St.Dev.
1,2E-11
8,8E-11
1,0E-10
1,1E-09
8,2E-09
3,2E-08
Long Term Stability Results of Leak Valve
1.2E-06
1.1E-08
1.00E-08
1E-08
Pressure (mbar)
Pressure (mbar)
1.2E-08
1.00E-06
1E-06
9E-07
9E-09
0
300
Time (s)
600
0
900
300
600
900
Time (s)
1.2E-07
1.2E-05
1.1E-07
1.00E-07
1E-07
Pressure (mbar)
Pressure (mbar)
1.1E-06
0.000011
1.00E-5
0.00001
9E-06
9E-08
0
300
600
Time (s)
900
0
300
600
Time (s)
900