Transcript Slide 1

SEMICON West 2006 STEP
Methods to Measure/Improve
Equipment Productivity
SEMI Software Standards Enabling
Equipment Productivity &
Performance Data Collection
Blaine Crandell
Blaine Crandell & Associates
[email protected]
Information & Control Committee
Charter
SEMI software standards developed by Information &
Control Committee, whose charter is:
To explore, evaluate, discuss, and formulate consensus
based specifications that, through voluntary compliance, will
enhance the manufacturing capability of the semiconductor
industry. Its scope is limited to exploring and developing
standards that pertain to the interface of manufacturing tools
to each other, to control computers, or to human operators,
for the purpose of transferring commands and data used
during the manufacturing process.
July 12, 2006
SEMICON West 2006 STEP
2
Key Software Standards
Standards Supporting Equipment
Performance Data Collection
• E4 – SEMI Equipment Communications Standard 1 Message
Transfer (SECS-I)
• E5 – SEMI Equipment Communications Standard 2 MESSAGE
CONTENT (SECS-II)
• E30 – Generic Model for Communications and Control of
Manufacturing Equipment (GEM)
• E37 – High-Speed SECS Message Services (HSMS) Generic
Services
• E39 – Object Services Standard: Concepts, Behavior, and
Services
• E58 – Automated Reliability, Availability, and Maintainability
Standard (ARAMS): Concepts, Behavior and Services
• E116 – Specification for Equipment Performance Tracking
• E120 – Specification for the Common Equipment Model (CEM)
July 12, 2006
SEMICON West 2006 STEP
3
Generic Data Collection System
Architecture
User
Interfaces
Manufacturing
Execution System
Host
Controller
MES
User
Interfaces
Host
Controller
E5 (SECS-II) /
E37 (HSMS)
Production
equipment
July 12, 2006
SEMICON West 2006 STEP
E5 (SECS-II )/ E4 (SECS-I)
Production
equipment
4
E39 - OSS
E39 – OBJECT SERVICES STANDARD:
CONCEPTS, BEHAVIOR, AND SERVICES
(OSS)
• Originally published in 1995
• Developed by a task force under the
SEMI Information & Control Committee
• Last revised in 2003 (SEMI E39-0703)
July 12, 2006
SEMICON West 2006 STEP
5
E39 - OSS
• Provides general terminology, conventions, and
notation for describing behavior and data in terms
of objects and object attributes.
• Provides basic services for reading object
attributes, setting their values, and for asking for an
object's contents.
• Intended to be referenced by other standards
which define specific objects to reduce
redundancy.
July 12, 2006
SEMICON West 2006 STEP
6
E120 - CEM
E120 – SPECIFICATION FOR THE
COMMON EQUIPMENT MODEL (CEM)
• Originally published in 2003
• Developed by a task force under the
SEMI Information & Control Committee
• Last revised in 2006 (SEMI E120-0706)
July 12, 2006
SEMICON West 2006 STEP
7
E120 - CEM
• Provides a generally applicable object model of
semiconductor equipment structure.
• Intended Usage
– Guide to equipment suppliers on how to represent the
external view of their equipment to the factory host
– Base model to be used and extended by other SEMI
equipment communication standards
– Reference for the creation of technology-specific object
model definitions, such as XML schema
July 12, 2006
SEMICON West 2006 STEP
8
E5 – SECS-II
E5 – SEMI EQUIPMENT
COMMUNICATIONS STANDARD 2
MESSAGE CONTENT (SECS-II)
• Originally published in 1982
• Developed by a task force under the
SEMI Information & Control Committee
• Last revised in 2006 (SEMI E5-0706)
July 12, 2006
SEMICON West 2006 STEP
9
E5 – SECS-II
• Specifies a message protocol defining the details of the
messages exchanged between semiconductor equipment
and host control systems
• Gives form and meaning to messages exchanged between
equipment and host using a message transfer protocol, such
as SECS-I (E4) or HSMS (E37)
• Enables the semiconductor manufacturer to develop
standard, reusable “host control” systems to:
– Automate equipment control (to prevent misprocessing
due to human error)
– Provide automated data collection
– Provide alarm handling
• Creates categories (streams) of messages to support similar
or related activities
July 12, 2006
SEMICON West 2006 STEP
10
E5 – SECS-II
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Stream 1 Equipment Status
Stream 2 Equipment Control and Diagnostics
Stream 3 Material Status
Stream 4 Material Control
Stream 5 Exception Handling
Stream 6 Data Collection
Stream 7 Process Program Management
Stream 8 Control Program Transfer
Stream 9 System Errors
Stream 10 Terminal Services
Stream 11 Host File Services (Deleted)
Stream 12 Wafer Mapping
Stream 13 Data Set Transfers
Stream 14 Object Services
Stream 15 Recipe Management
Stream 16 Processing Management
Stream 17 Equipment Control and Diagnostics
Stream 18 Subsystem Control and Data
July 12, 2006
SEMICON West 2006 STEP
11
E30 - GEM
E30 – GENERIC MODEL FOR
COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
• Originally published in 1992
• Developed by a task force under the
SEMI Information & Control Committee
• Last revised in 2003 (SEMI E30-1103E)
July 12, 2006
SEMICON West 2006 STEP
12
E30 - GEM
• E30 defines a Processing State Model for semiconductor
equipment, and standard automated messages that can used
by a host computer to control equipment activity and receive
equipment processing data.
• E30 proposed as Equipment Utilization enabler by Jerry
Secrest in “Using GEM to measure Equipment Utilization”
[Solid State Technology, June 1998].
– Use E30 with a simple spreadsheet to provide
straightforward method to measure equipment utilization
• E30 is not largely used for equipment performance tracking.
– Does not specify standard messages that indicate state
transitions in the Processing State Model
July 12, 2006
SEMICON West 2006 STEP
13
E30 – GEM
Processing State Model
July 12, 2006
SEMICON West 2006 STEP
14
E30 – GEM
The GEM standard defines which SECS-II messages
should be used, in what situations, and what the
resulting activity should be.
July 12, 2006
SEMICON West 2006 STEP
15
E30 – GEM
•
Equipment Capabilities and Activities
–
–
–
–
–
–
–
–
–
–
–
–
July 12, 2006
Establish Communications
Data Collection
Alarm Management
Remote Control
Equipment Constants
Process Program Management
Material Movement
Equipment Terminal Services
Error Messages
Clock
Spooling
Control
SEMICON West 2006 STEP
16
E58 - ARAMS
E58 – AUTOMATED RELIABILITY,
AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS,
BEHAVIOR, AND SERVICES
• Originally published in 1997
• Developed by a joint task force under the SEMI
Information & Control Committee (primary) and
the SEMI Metrics Committee
• Last revised in 2003 (SEMI E58-0703)
July 12, 2006
SEMICON West 2006 STEP
17
E58 - ARAMS
• Maps automated equipment messages to E10 states
• Provides a method for production equipment to report
E10 state changes to a host computer
• Provides standard equipment codes for representing
substates of the six E10 equipment states
• Provides a method, through the human interface, for
a user to select a state and substate combination,
that results in an ARAMS substate code
– The equipment then determines the appropriate ARAMS
state/substate based on this code.
July 12, 2006
SEMICON West 2006 STEP
18
E58 - ARAMS
ARAMS State Model
TOTAL TIME
OPERATIONS TIME
MANUFACTURING
TIME
PRODUCTIVE
UPTIME
ENGINEERING
NONSCHEDULED
TIME
STANDBY
UNSCHEDULED
DOWNTIME
July 12, 2006
SCHEDULED
DOWNTIME
SEMICON West 2006 STEP
19
E58 - ARAMS
Substates
PRODUCTIVE
1000 “PRD” (default productive code)
1100 “PRD/Regular production”
1200 “PRD/Work for third parties”
1300 “PRD/Rework”
1400 “PRD/Engineering runs”
1500 “PRD/Reserved*”
1600 “PRD/Reserved”
1700 “PRD/Reserved”
1800 “PRD/Reserved”
1900 “PRD/Reserved”
July 12, 2006
SEMICON West 2006 STEP
20
E58 - ARAMS
Substates
STANDBY
2000 “SBY” (default standby code)
2100 “SBY/No operator”
2200 “SBY/No product”
2300 “SBY/No support tool”*
2400 “SBY/Associated cluster module down”
2500 “SBY/No host”
2600 “SBY/Reserved”
2700 “SBY/Reserved”
2800 “SBY/Reserved”
2900 “SBY/Reserved”
July 12, 2006
SEMICON West 2006 STEP
21
E58 - ARAMS
Substates
ENGINEERING
3000 “ENG” (default engineering code)
3100 “ENG/Process experiments”
3200 “ENG/Equipment experiments”
3300 “ENG/Reserved”
3400 “ENG/Reserved”
3500 “ENG/Reserved”
3600 “ENG/Reserved”
3700 “ENG/Reserved”
3800 “ENG/Reserved”
3900 “ENG/Reserved”
July 12, 2006
SEMICON West 2006 STEP
22
E58 - ARAMS
Substates
SCHEDULED DOWNTIME
4000 “SDT” (default scheduled downtime code)
4100 “SDT/User maintenance delay”
4200 “SDT/Supplier maintenance delay”
4300 “SDT/Preventive maintenance”
4400 “SDT/Change of consumables”
4500 “SDT/Setup”
4600 “SDT/Production test”
4700 “SDT/Facilities-related”
4800 “SDT/Reserved”
4900 “SDT/Reserved”
July 12, 2006
SEMICON West 2006 STEP
23
E58 - ARAMS
Substates
UNSCHEDULED DOWNTIME
5000 “UDT” default unscheduled downtime code)
5100 “UDT/User maintenance delay”
5200 “UDT/Supplier maintenance delay”
5300 “UDT/Repair”
5400 “UDT/Out-of-spec input material”
5500 “UDT/Change of consumables”
5600 “UDT/Facilities-related”
5700 “UDT/Reserved”
5800 “UDT/Reserved”
5900 “UDT/Reserved”
July 12, 2006
SEMICON West 2006 STEP
24
E58 - ARAMS
Substates
NON-SCHEDULED TIME
6000 “NST” (default non-scheduled downtime code)
6100 “NST/Unworked shifts”
6200 “NST/Equipment installation”
6300 “NST/Equipment modifications” (modify, rebuild, upgrade)
6400 “NST/Off-line training”
6500 “NST/Shutdown/startup”
6600 “NST/Reserved”
6700 “NST/Reserved”
6800 “NST/Reserved”
6900 “NST/Reserved”
July 12, 2006
SEMICON West 2006 STEP
25
E58 - ARAMS
• Some IC Makers have reported success in using ARAMS to
obtain accurate E10 data.
• ARAMS’ requirement that equipment automatically transition
to unscheduled downtime for even insignificant alarm
conditions may be inappropriate in some factories.
• ARAMS is complex and difficult for equipment suppliers to
implement.
• Concerns exist regarding the accuracy of user input required
to transition between ARAMS states. Many IC Makers do not
want to rely on error-prone human input that results in
erroneous equipment performance data.
• Few IC Makers include E58 in their equipment purchase
specifications.
• Few equipment suppliers have implemented E58.
July 12, 2006
SEMICON West 2006 STEP
26
E116 - EPT
E116 - SPECIFICATION FOR EQUIPMENT
PERFORMANCE TRACKING (EPT)
• Originally published in 2002
• Developed by a joint task force under the SEMI
Information & Control Committee (primary) and
the SEMI Metrics Committee
• Last revised in 2006 (SEMI E116-0706)
July 12, 2006
SEMICON West 2006 STEP
27
E116 - EPT
• Defines equipment behavior states
• Tracks and reports basic equipment states
in a modular manner, for both major
modules and the overall equipment
• Enables tracking of equipment’s time in
state, at both module and equipment level
• Reports reasons to a host computer for why
equipment is blocked from performing its
task, at both module and equipment level
July 12, 2006
SEMICON West 2006 STEP
28
E116 - EPT
July 12, 2006
SEMICON West 2006 STEP
29
E116 - EPT
Key Points
• Concentrates solely on data collected from the
equipment without manual intervention
• Key Requirements
– Modularization
– Idle, Busy, and Blocked events (time-stamped) with
reason for transition from one state to another
• Does not focus on E10 state information
– IC Maker can calculate E10 accurately from
equipment data combined with MES information.
July 12, 2006
SEMICON West 2006 STEP
30
E116 - EPT
• E116 is the preferred standard for
tracking equipment performance data.
• Some IC Makers are requesting E116
compliance in equipment purchase
specifications.
• Some equipment suppliers have
implemented E116 in their equipment.
July 12, 2006
SEMICON West 2006 STEP
31
Summary
Software standards enabling equipment
performance monitoring are available
now. They are improving and can
provide reliable and accurate equipment
performance data.
July 12, 2006
SEMICON West 2006 STEP
32