Transcript Coventor Tutorial

Very Basic Tutorial on CoventorWare
Today’s Demos
 Create simple 3D structure from process and
layout
 Meshing 3D model
 Run MirrorDesign demo in Coventor
Configure Working Space of Coventor
1. Set Environmental Variables (Temp and TMP) (Both to
C:\Temp)
2. Configure CoventorWare (Tools\User setting parameters)

Work Directory: D:\Design_Files

Scratch Directory: C:\Temp\coventor\”USERNAME”\

Shared Directory: D:\Design_Files\Shared
3. License Server: @128.227.56.90
Knowing CoventorWare
- Lumped Modeling
-Schematic
-System Design
- Structure Design
- FEA, BEA, Verification
What can it do?
Creating 3D Structure
Points:
• Draw in 2D
(layout), thing in
3D (from
processes flow)
• Normally from
bottom to top.
Instance
Home work 4.6 from Senturia’s textbook.
Creating 3D Structure
• Use default
material library
SCF: Sidewall Conformality Factor
Deposition
Types of etch?
SCF  t
d
Creating 3D structure
Negative Mask
Need Boolean algorithm to
generate ‘ring’
Try with other deposition and
etching settings in process
designer
Mirror Design Demo
 Structure creation
 Meshing
 Eletrostatic, Mechanical, Co-Analysis
Mirror Design Demo