Transcript Introduction of NMIJ Gas Flow Standards Section

Introduction of
NMIJ Gas Flow Standards Section
Toshihiro Morioka
Gas Flow Standards Section
Flow Standards Division
NMIJ/AIST
Outline of GFSS
Flow Rate
Low Gas Flow
(various gases)
Medium Gas Flow (air only)
Air Speed
Low Air Speed
Medium Air Speed
List of Facilities
Flow Rate
Low Gas Flow
Medium Gas Flow
・CVT System
・Weighing System
・Calibration Facility based
on CFVNs
・CVT System
・Closed-Loop Calibration
Faccility
Air Speed
Low Air Speed
Medium Air Speed
・Tow Carriage
in Underground Tunnel
・Rotating Disk to Calibrate
LDV
・Calibration Wind Tunnel
Flow Rate Ranges
Low Gas Flow
Medium Gas Flow
(various gases)
(air only)
5 m3/h
10 μg/min
5 mg/min
200 m3/h
180 g/min
CVT
Weighing System
Flowmeters vs. CVT
CFNVs vs. Tank
CVT
CFVNs vs. CVT
1000 m3/h
Closed-Loop Calibration Facility
Flowmeters vs. CFVNs
Calibration Facility
Multi-Nozzle
Chamber
Flowmeters vs. CFVNs
5 m3/[email protected] MPa - 1000 m3/[email protected] MPa
10 μg/min - 180 g/min
8 mm3/h
245 cm3/h
5 m3/h
9 m3/h
1000 m3/h
Flow Rate converted into Atmospheric Condition
5000 m3/h
Air Speed Ranges
Low Air Speed
5 cm/s
Medium Air Speed
1.5 m/s
Tow Carriage
in Underground Tunnel
1.3 m/s
40 m/s
Rotating Disk, LDV, Wind Tunnel
Low Gas Flow : Weighing System
10 μg/min - 5 mg/min - 180 g/min
Flow Rate converted into 1 bar : 245 cm3/h - 5 m3/h
Uncertainty : 0.05 % - 0.25 % (k=2)
Vacuum Pump
Test Gases :
Air, N2, H2, CH4, ...
Exhaust
Filter
High-Flow Line
Low-Flow Line
Balance Systems
Supply Gas
Automatic Pressure
Controller
Three-Way Valve
Cylinder
Nozzle Holder
DUT : CFVNs
Calibration Lines
Electric Balance
Resolution : 0.01 mg
Mechanical Balance
Resolution : 0.1 mg
Low Gas Flow : CVT System
10 μg/min - 5 mg/min - 180 g/min
Flow Rate converted into 1 bar : 8 mm3/h - 245 cm3/h
Uncertainty : 0.42 % (k=2)
Vacuum Chamber
Vacuum Pump
Vacuum Pump
Exhaust
Exhaust
DUT
Constant Volume Tank
Three-Way Valve
Supply Gas
Test Gases :
Air, N2, H2, CH4, ...
Automatic Pressure
Controller
Calibration Lines
CVT in Vacuum Chamber
Volumes : 0.1 L and 0.3 L
Low Gas Flow : Calibration Facility
10 μg/min - 5 mg/min - 180 g/min
Flow Rate converted into 1 bar : 245 cm3/h - 5 m3/h
Uncertainty : 0.07 % - 0.26 % (k=2)
Reference Standard
Test Gases :
Air, N2, H2, CH4, ...
DUT
Supply Gas
Nozzle Holder
Automatic Pressure
Controller
Exhaust
Expand Flow Rate
Range
Ref. : CFVNs
Calibration Lines
Multi-Nozzle Chamber
Parallel Connection of 5 CFVNs
Medium Gas Flow : CVT System
5 m3/h - 200 m3/h - 1000 m3/h @ 0.1 - 0.5 MPa
Flow Rate converted into 1 bar : 5 m3/h - 1000 m3/h
Uncertainty : 0.17 % (k=2)
Test Gases : Air
Constant Volume Tank 11 m3
Double-Walled, Water Circulation
for Quick-Stabilization of Temperature
Medium Gas Flow : Closed-Loop CF
5 m3/h - 200 m3/h - 1000 m3/h @ 0.1 - 0.5 MPa
Flow Rate converted into 1 bar : 5 m3/h - 5000 m3/h
Uncertainty : 0.28 % (k=2)
Test Gases : Air
Closed-Loop Calibration Facility
Ref. : Parallel Connection of 12 CFVNs
Low Air Speed : Tow Carriage
5 cm/s - 1.5 m/s
Total Length : 45 m
Uncertainty : 7 mm/s - 9 mm/s (k=2)
Double-Walled
Velocity Measurement by Laser Interferometer
Tow Carriage
Unmanned Space, Stable Temperature, No Wind
Tow Carriage in Underground Tunnel
Medium Air Speed : Rotating Disk, etc.
1.3 m/s - 40 m/s
Rotating Disk
Rotating Disk
LDV
Uncertainty : 0.1 % - 0.5 % (k=2)
Ref. : Ultrasonic Anemometer
Uncertainty : 0.3 % - 0.7 % (k=2)
Rotating Disk, LDV, and Wind Tunnel