請說明CRYO Pump - 結構,工作原理,建構真空壓力範圍(30%)

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Transcript 請說明CRYO Pump - 結構,工作原理,建構真空壓力範圍(30%)

真空Pump - Homework
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請說明 真空等級分類,壓力範圍,氣流特性 (20%)
請說明 CRYO Pump - 結構,工作原理,建構真空壓力範圍 (30%)
請擇一說明 “BOC Dry Pump” 或 “STP Turbo Pump” –
結構,工作原理,建構真空壓力範圍 (30%)
請說明 Dry Pump & Turbo Pump 抽氣原理的差異性 (20%)
• Given the following information for a centrifugal compressor, answer the
following questions.
Operating conditions:
P1=750 psia, p2=1046.4 psia, T1=529.7 °R, T2=582.6 °R, Q=349 MMRCFD
Gas Property:
SG=0.6, k=1.3, Zave=0.95
1. What is the isentropic efficiency?
2. What is the power requirement (assume a 98% mechanical efficiency)?
• Pump抽氣過程中常會通入適量的氮氣,(1)
試解釋通入氣體的用途,(2)通入氮氣的溫
度高低又對Pump有什麼影響?
• Try to design a dry pump for a 10-5 vacuum
level chamber.