Transcript ALD Growth of Highly Ordered ZnO Nanotube Arrays

Surface Nano-Structuring Group
Prof. Dr. Yong Lei
[email protected]
Institut für Materialphysik and
Center for Nanotechnology
Universität Münster
A new hybrid three-dimensional surface nano-patterning technology for nano-device applications
Hui Sun, Liaoyong Wen, Kin-Mun Wong, Fabian Grote, Huaping Zhao, and Yong Lei*
Surface nano-patterning has been intensively investigated for wide
applications in different nano-devices. Existing surface patterning
techniques have application restrictions . Realizing a surface nanopatterning with a process featured by flexibility, high throughput, low
cost, and high structural controllability presents an important issue.
We proposed the UTAM (ultra-thin alumina mask) surface nanopatterning technique to fabricate large-scale ordered arrays of
surface nano-structures (dots, holes, wires, and tubes).
Recently, the UTAM technique is advanced to realize a threedimensional surface nano-patterning technique to prepare highperformance nano-devices.
Ordered quantum-sized nanodot arrays
(Inside cover page of Journal ‘Small’)
Highly ordered ZnO nanotube arrays
using atomic layer deposition
Nano-device demonstration
UTAM
ordered nanodots
(d1) Nanodots (top view)
(d2) Nanoholes (top view)
(b)
Schematic outline of the fabrication processes of nanodot (a-b1-c1-d1) and
nanohole (a-b2-c2-d2) arrays on Si substrates.
Shape and Size Tuning
The size of the UTAM-prepared nanodots can be adjusted from about 10
to 200 nm while the shapes of the nanodots can be adjusted from
nanometer-sized discs, hemispheres, hemiellipsoids, to conics.
ZnO nanowire Schottky diode fabrication
ZnO nanotube gas sensing response
Features and Applications
Nanodisc arrays
The controllability of the size, spacing, and shape allows tuning the
properties of the UTAM-prepared ordered surface nanostructures.
The UTAM technique is a general applicability in fabricating a wide range
of ordered surface nanostructures.
UTAM surface patterning can be advanced to three-dimensional surface
nano-structuring.
Highly ordered quantum sized nanodot arrays and free-standing onedimensional surface nanostructure arrays can be prepared using the
UTAM surface nano-patterning technique.
Flexible nanowire diodes were demonstrated.
Nanotube based gas sensors with high sensitivity were shown.
Multi-layer metallic nanodot (Fe/Pt) arrays were prepared using the UTAM
technique and can be used for magenetic memory devices.
UTAM-prepared nanowire/nanohole composite structure could be used to
realize a high-efficient nano-generator to power implantable bio-medical
devices.
Nanohemisphere arrays
Nanoconic arrays
Nano-hemiellipsoid arrays
(a)
(b1)
(b2)
Three-dimensional UTAM nano-patterning to prepare free-standing 1D
surface nanostructures: Ni nanowire (a) and carbon nanotube arrays (b).
References:
1. Lei Y., et al., Chemical Society Reviews, 40, 1247-1258 (2011).
2. Wen L.Y., Lei Y., et al., Journal of Materials Chemistry, 21, 7090 (2011)
3. Ostendorp S, Lei Y., and Wilde G., Chemical Physics Letters, 513, 99 (2011).
4. Wu M.H., Wen L.Y., Lei Y., et al., Small, 6, 695-699 (2010).
5. Wen L.Y., Lei Y., et al., Applied Physics Letters, 97, 053106 (2010)
6. Lei Y., Cai W.P., Wilde G., Progress in Materials Science, 52, 465-539 (2007).
7. Lei Y., Jiao Z., Wu M.H., Wilde G., Advanced Engineering Materials, 9, 343 (2007).
8. Lei Y., Chim W.K., Chemistry of Materials, 17, 580 (2005).
9. Lei Y., Chim W.K., Journal of the American Chemical Society, 127, 1487 (2005).
10. Lei Y., Chim W.K., Sun H.P., Wilde G., Applied Physics Letters, 86, 103106 (2005).
11. Lei Y., Yeong K.S., Thong J.T. L., Chim W.K., Chemistry of Materials, 16, 2757 (2004).
12. Ellrich J., Lei Y., Hahn H., German Patent (2009).