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Microelectronic Engineering 86 (2009) 920–924
3D replication using PDMS mold for microcoil
a Core Research for Evolutional Science and Technology (CREST), Japan Science and Technology Agency (JST), Japan
b Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1, Namiki,
Tsukuba, Ibaraki 305-8564, Japan
Paper Survey
Feng-Fu Chuang
Institute of Mechanical Engineering
Date ﹕2011/05/23
Outline
 Pre-process
 Post-process: microcoil fabrication results
 Conclusion
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Pre-process
Fig. 1. Schematic illustration of the pre-process procedure for the fabrication of UV
resin replica pattern of a spiral structure by the 3D replication method.
Table 1
Dimensions of the master and replica patterns measured by a noncontact depthmeasuring microscope.
Pitch: 250mm
Thread height:155mm
Inner diameter:850mm
Outer diameter:1.159 mm
Fig. 2. SEM microphotographs of the master pattern and UV resin replica pattern: (a) is the
image of the master pattern; (b)–(d) are the partial magnified images of UV resin replica
pattern corresponding to the outer diameters (uouter) of 0.8–1.00 mm, respectively.
Post-process: microcoil fabrication results
Fig. 3. SEM microphotographs of the master pattern (a) and UV resin replica pattern (b);
UV resin replica pattern was fully photopolymerized along the surface of the
sputterdeposited Ti layer.
Fig. 4. Schematic diagram for the dimensions and shape change of threads
by the compressive force resulting from the inserted Al wire with the
lager diameter than that of mold cavity.
Fig. 5. SEM microphotographs of Ni electroplating result between threads of UV
resin replica pattern, (a) is the partial magnified image of UV resin replica pattern,
(b)–(d) are the partial magnified images of Ni electroplating results after 3 min, 6 min,
and 9 min 30 s, respectively.
Fig. 6. SEM microphotographs of the deformed Ni microcoil structure before Au wet
etching (a), after Au wet etching (c), and Ni microcoil structure (e). (b) and (d) are the
partial magnified images of the deformed Ni microcoil structure of (a) and (c),
respectively.
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Conclusions
1.
The development of a 3D replication method using PDMS mold
for the fabrication of microcoil structures was successfully
conducted by combining with Ni electroplating.
2.
An easier separation method of the UV resin replica pattern (coil
width 10 lm) from the PDMS mold cavity is imperative for simpler
and low-cost fabrication.
Thanks For You Attention!!!