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日
期：2010.10.04
指導老師：林克默 博士
學
生：陳冠廷
Outline
1. Introduction
2. Experimental
3. Results and discussion
4. Conclusions
1.Introduction
• Sol–gel method is widely used to obtain various kinds of functional
oxide films, including ZnO and doped ZnO thin films
• Generally, two principal routes to obtain oxide thin films are used:
the alkoxide route, using organo-metallic precursors often
expensive and dangerous and the nonalkoxideroute, using water or
alcohol solutions of metal salts such as acetates, nitrates or
chlorides
• The main factors affecting the sol–gel film micro structure and
properties are: solution chemical equilibrium ,substrate-film
interaction during film deposition and thermal processing of the asdeposited gel film
2.Experimental
• Using a sol prepared with Zn(CH3COO)2O2H2O (purity–99.5%),
AlCl3O6H2O (purity–98%), 2-methoxyethanol and
monoethanolamine (MEA).
• The concentration of metal ions in the solution was 0.75 mol/l and
the molar ratio of MEA to metal salts was 1.0.
• Two values of dopant concentration (1 and 2 wt.%) and three postheat-treatments (PT1, PT2, PT3) were used.
• The post-heat-treatments are specified in Table 1. After each postheat-treatment and prior measurements, all the samples have been
heated for final annealing at 450 C for 20 min in forming gas.
3.Results and discussion
Fig. 1. XRD patterns of Al (1 wt.%)-doped
ZnO thin film after PT1 (sample B) and PT2
(sample A).
Fig. 2. XRD patterns of Al (2 wt.%)-doped ZnO
thin films after PT1 (sample C), PT2 (sample D)
and PT3 (sample E).
Fig. 3. SEM micrographs of the surface of the Al (1 wt.%)-doped ZnO thin films after
PT1 (sample B) and PT2 (sample A).
Fig. 4. SEM micrographs of the surface of the Al (2 wt.%)-doped ZnO thin films after PT1
(sample C), PT3 with cooling in N2 (Sample E) and PT3 with cooling in forming gas
(sample F).
Fig. 5. The optical transmittance of Al-doped ZnO thin film after annealing.
4.Conclusions
•
薄膜導電率介於1.3到7.2 X10-3Ωcm且在可見光範圍有
非常好的穿透率(80~90%)。
•
鋁的含量增加1至2％會使高導電性，但效果並不十分明
顯。第一次熱處理在這些大氣（氧化，惰性或還原）下冷
卻會明顯影響薄膜的導電性。
Thank you for your attention