Transcript 2012-09-06 xBSM meeting, problems with C-line CA C: RD_25270 0.53 μm Au

2012-09-06 xBSM meeting, problems with C-line CA
C: RD_25270
0.53 μm Au
σimage=1.8552 pixel
C: RD_25270
0.53 μm Au
σimage=1.5 pixel
C: RD_25270
0.53 μm Au
σimage=1.3 pixel
D: RD_16105
σimage ~ ? 1.30 pixel
C: RD_25270
0.53 μm Au standard CA
σimage=1.879 pixel
C: RD_23653
0.53 μm Au standard CA
σimage=0.871 pixel
C: RD_25270
0.47 μm Au standard CA
σimage=1.854 pixel
C: RD_25270
0.40 μm Au standard CA
σimage=1.634 pixel
σ beam reduced by 4.4 μm
C: RD_23653
0.40 μm Au standard CA
σimage=0.886 pixel
C: RD_25270
0.53 μm Au standard CA
+ add background equivalent to transmission
through about 0.3 μm Au , areaG(12)=2.0
+ narrow background
from σ=24.988 pixels to σ=18 pixels
σimage=1.305 pixel
RMS of fit is improved
C: RD_23653
0.53 μm Au standard CA
+ add background equivalent to transmission
through about 0.3 μm Au
+ narrow background
from σ=25 pixels to σ=18 pixels
σimage=0.583 pixel
RMS of fit is worse
0.53 μm Au standard CA
0.40 μm Au standard CA
0.53 μm Au standard CA
low/high model: 0.212 , data:0.205
0.40 μm Au standard CA
low/high model: 0.299 , data:0.205