Thermoplastic NIL of P(VDF-TrFE-CFE) Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF-TrFE-CFE) on OmniCoat The Si stamp is silanized Optical.
Transcript Thermoplastic NIL of P(VDF-TrFE-CFE) Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF-TrFE-CFE) on OmniCoat The Si stamp is silanized Optical.