Thermoplastic NIL of P(VDF-TrFE-CFE) Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF-TrFE-CFE) on OmniCoat The Si stamp is silanized Optical.

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Transcript Thermoplastic NIL of P(VDF-TrFE-CFE) Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF-TrFE-CFE) on OmniCoat The Si stamp is silanized Optical. 

Thermoplastic NIL of P(VDF-TrFE-CFE)
Si chips are cleaved and cleaned
Spin-coating of OmniCoat on Si
Spin-coating of P(VDF-TrFE-CFE) on
OmniCoat
The Si stamp is silanized
Optical alignment performed
Heating and compression
The upper chip is removed
Release in water of free standing
micro patterned membrane
(a)
(b)
(c)
(d)
(e)
(f)
(g)
(h)
J. Shklovsky, L. Engel, Y. Sverdlov, Y. Shacham-Diamand, S. Krylov, Microelectronic Engineering, 2012
Thermoplastic Nano-Imprinting Lithography of
P(VDF-TrFE-CFE)
Silicon
Stamp
Patterned
polymer
Silicon
Stamp
Patterned
polymer
J. Shklovsky, L. Engel, Y. Sverdlov, Y. Shacham-Diamand, S. Krylov, Microelectronic Engineering, 2012