IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation

Technical Committee Meeting

At the 8 th IEEE Conference on Automation Science and Engineering (CASE 2012)

Venue:

Namsan II Conference Room, Seoul Grant Hyatt, Seoul, South Korea

Time:

5:30 – 6:00 pm, Wednesday, August 22, 2012

After the session WeC3 entitled “Modeling, Analysis and Operation of High Technology Manufacturing” IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Meeting Overview

• Review of TC facts

– TC data on membership, etc.

– Face-to-face meetings – Publication and conference involvement

• TC leadership

– Roles and responsibilities – New organization/positions

• TC activities

– Special issue associated with CASE and MASM 2012 – “Successful Technical Committees” by Satoshi Tadokoro, IEEE RAS VP, Technical Activities – Other activities per the RAS guidelines 2

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Technical Committee (TC) Brief Data

•

URL:

http://xs3d.kaist.edu/TC-SMA •

Founding Date:

August 1, 2001 •

Scope:

– To promote basic and applied research in semiconductor manufacturing and automation – To provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers – To facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)

•

Membership:

– 286 TC members – All the major institutes and companies across Americas, Europe, and Asia 3

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Committee Board

• • • •

Honorary Chairs

Dr. Simon Yang, Senior Vice President & Chief Technology Officer, Chartered Semiconductor Manufacturing Co. Dr. Douglas Chen-Hua Yu, Senior Director, Advanced Module Technology Development Division, TSMC MuDer JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University MengChu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology

• • •

Co-Chairs

Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC, Taiwan, ROC Mike Tao ZHANG, President, Hoku Materials, USA James R. Morrison, Associate Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea

Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT Industry Chair: Dave Gross, Director, Global Foundries Membership Chair: Chen-Fu Chien, Tsinghua Distinguished Professor, National Tsing Hua University, Taiwan, ROC Conference Chair: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University Publication Chair: Prof. Ruey-Shan Andy Guo, Professor, Dept of Business Administration, National Taiwan University Regional Chair, China: Prof. Han Ding, Professor, School of Mechanical Engineering, Shanghai Jiao Tong University, ROC Regional Chair, Europe: Dr. Arieh Greenberg Regional Chair, Israel: Dr. Adar Kalir, Staff Engineer, Intel Corporation Regional Chair, Japan: Kenji Miyake, PMT Corporation Regional Chair, Korea: Prof. Tae-Eog Lee, Professor and Chair, Dept of Industrial Eng, KAIST, South Korea Regional Chair, Taiwan: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University Regional Chair, U.S.A.: Prof. John W. Fowler, Professor and Chair, Dept of Supply Chain Management, Arizona State

University, USA

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

• •

Face-to-Face TC Meetings

Historically we hold 2 meetings per year

Date

2006/09 2006/10 2007/04 2007/09 2008/08 2008/10 2009/08 2009/12 2010/07 2010/08 2011/08 2011/12 2012/08

Location

Tokyo, Japan Shanghai, PRC Rome, Italy Arizona, USA Washington, DC, USA Tokyo, Japan Bangalore, India Texas, USA California, USA Toronto, Canada Arizona, USA Arizona, USA Seoul, Korea

Conference

IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM) 2 nd IEEE Conference on Automation Science and Engineering (CASE) IEEE Int’l Conference on Robotics and Automation (ICRA) 3 rd IEEE Conference on Automation Science and Engineering (CASE) 4 th IEEE Conference on Automation Science and Engineering (CASE) IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM) 5 th IEEE Conference on Automation Science and Engineering (CASE) 2009 MASM within WinterSim 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conf. (ASMC) 6 th IEEE Conference on Automation Science and Engineering (CASE) 5th Multidisciplinary International Scheduling Conference (MISTA) 2011 MASM within WinterSim 2011 8 th IEEE Conference on Automation Science and Engineering (CASE)

NEXT MEETING:

December 2012, Berlin, Germany (

2012 MASM within WinterSim 2012

) 5

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Most Recent TC Meeting (during CASE 2012, Seoul, South Korea)

Attending (from left to right):

Thomas Ponsignon (Staff Engineer, Infineon, Germany), Gottfried Schmid (IT Director, Infineon, Germany), Claude Yugma (Professor, EMSE, France), Lars Moench (Professor, University of Hagen, Germany), Chengbin Chu (Professor, Ecole Centrale Paris, France), Gloria Rodrigues (Research Engineer, STMicroelectronics, PhD candidate, EMSE, France), James R. Morrison (Professor, KAIST, Korea), Fan-Tien Cheng (Professor, NCKU, Taiwan), Tae-Eog Lee (Professor, Chair, Dean, KAIST, Korea), Mengchu Zhou (Professor, NJIT, USA), Todor Dimitrov (Engineer, Franhofer IOSB, Germany), Naiqi Wu (Professor, Guangdong University fo Technology, China), Adar Kalir (Principal Engineer, Intel, Israel), Gian Antonio Susto (PhD candidate, University of Padova, Italy), Jingshan Li (Professor, University of Wisconsin-Madison, Kyungsu Park (PhD candidate, KAIST, Korea), Woosung Kim (PhD candidate, KAIST, Korea), Byungduk Song (PhD candidate, KAIST, Korea), Hong Yue Jin (MS candidate, KAIST, Korea), Jungho Park (MS candidate, KAIST, Korea) 6

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

TC Meeting

(during MASM 2011)

TC Meeting

(during MISTA 2011) Attending (from left to right): 1 st Row: James Morrison (Professor, KAIST, South Korea), G1, G2, John Fowler (Professor, ASU, USA), G3, Attila Lengyel, Young Jae Jang (Professor, KAIST, South Korea), G4, Shekar Krishnaswamy (AMAT, USA) 2 nd Row: G5, G6, G7, G8, Claude Yugma (Professor, EMSE, France), Tobias Uhlig (PhD Candidate, Dresden University of Technology, Germany), G9, Jingshan Li (Professor, UW-Madison, USA), Pascal Etman (Professor, TU/e, Netherlands), 3 rd Row: G10, G11, G12, G13, G14, G15, Lars Monch (Professor, University of Hagen, Germany), G17, Oliver Rose (Dresden U Tech., Germany), Stéphane Dauzère-Pérès (Professor, EMSE, France) Attending (from left to right): Detlef Pabst (Engineer, Global Foundaries, PhD Candidate ASU, USA), Felix Cheng (PhD Candidate, ASU, USA), Todor Dimitrov (Engineer, Franhofer IOSB, USA), Tobias Uhlig (PhD Candidate, Dresden University of Technology, Germany), John Fowler (Professor, ASU, USA), Ken Fordyce (Engineer, IBM, USA), Lars Monch (Professor, University of Hagen, Germany), James Morrison (Professor, KAIST, South Korea), Ketan Khowala (Engineer, Apple, PhD Candidate, ASU, USA)

TC Meeting

(during IEEE CASE 2010)

TC Meeting

(during IEEE/SEMI ASMC 2010) Attending (from left to right): Wei (Victor) Feng (Ph.D. candidate, Tsinghua University) , Li Zheng (Prof., Tsinghua University), Jingshan Li (Prof., University of Wisconsin-Madison), Chandresh Mehta (Prof., University of Michigan), Gentleman #1, Andrea Schirru (Ph.D. candidate, University of Pavia, Italy), Fan-Tien Cheng (Prof., National Cheng Kung University), James Morrison (Prof., KAIST), Gentelman #2,

http://xs3d.kaist.edu/TC-SMA

Attending (from left to right): Zubin Mevawalla (Ph.D. candidate, Georgia Tech), Jan Rothe (Global Foundries), Haim Albalak (Head, Tefen), James Morrison (Prof., KAIST), Brett Williams (Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph.D. (Sr. Engineer, Intel), Darryl Peters (Confluence), Fan-Tien Cheng (Prof., National Cheng Kung University), Dave Gross (Director, Global Foundries), Claude Yugma (Prof., Ecole Nationale Superieure des Mines de Saint-Etienne), Agnes Roussy (Prof., Ecole KAIST), Gyoungwon Park, Ph.D. (Manager, Finisar)

TC Meeting

(during IEEE CASE 2009)

TC Meeting

(during ISSM 2008) First Row (from left): Gentleman #1, Prof.Jingshan Li (U Kentucky) , Prof. Fan-Tien Cheng (NCKU, Taiwan), Prof. James R. Morrison (KAIST), Prof. Min-Hsiung Hung (National Defense U, Taiwan), Prof. Shi-Chung Chang (National Taiwan U), Prof. Argon Chen (National Taiwan U), Prof. Chih-Min Fan Please send e-mail to [email protected]

yourself (we’ll update the photo caption).

to identify

TC Meeting

(during IEEE CASE 2008) First Row (from left): Gentleman #1, Gentleman #2, Prof. James R. Morrison (KAIST), Mike Zhang (Sr. Manager, Spansion), Peter van der Meulen (Chairman and Founder, Blue Shift Technologies), Gentleman #3, Prof. Shi-Chung Chang (National Taiwan University) Please send e-mail to [email protected]

(we’ll update the photo caption).

to identify yourself

TC Meeting

(during IEEE CASE 2007)

http://xs3d.kaist.edu/TC-SMA

Second Row (from left): Prof. Jiangshan Li (U Kentucky), a gentleman coming late, Prof. Oliver Rose (Dresden U Tech., Germany), Prof. Leon McGinnis (Georgia Tech), Kan Wu (Georgia Tech), President van der Meulen (Blueshift), General Manager David Aires (Intel), Vice President John Behnke (Spansion), Lance Rist (ISMI/SEMATECH), Naiping Keng (Intel), First Row (from left): 8 Director Eric Englhardt (Applied Materials), Prof. Fan-Tien Cheng (NCKU, Taiwan)

• • • • • •

Publication Involvement

Special Issue on Automation Science and Engineering,

IEEE Robotics and Automation Magazine

– Mike Tao Zhang (Guest Editor); Published in Dec 2006; 3 articles on semiconductor manufacturing Special Issue on eManufacturing in the Semiconductor Industry,

IEEE Transactions on Automation Science and Engineering (T-ASE)

– Thomas Chen, Mike Tao Zhang, Chen-Fu Chien, John Fowler, and George Shanthikumar (Guest Editors); 37 papers submitted; published in Oct 2007 Special Issue on Equipment and Operations Automation in the Semiconductor Industry,

IEEE Transactions on Automation Science and Engineering (T-ASE)

– Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato, Jingang Yi (Guest Editors) – 32 papers submitted; published Jan 2011 Special Issue on Automation in Green Technology for

IEEE Transactions on Automation Science and Engineering (T-ASE)

– Jingshan Li, James R. Morrison, Mike Tao Zhang, Masaru Nakano, Stephan Biller, Bengt Lennartson (Guest Editors) – Publication scheduled October 2012 Planning a Special Issue of C&OR or T-ASE on Selected Papers from CASE 2012 and MASM 2012 – Publication target in 2013 Planning a Special Issue on Automation for Next Generation High Technology Manufacturing (with a focus on 450 mm wafer manufacturing) – Publication target early 2014 9

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

• • • • • • • • •

Conference Involvement (1)

IEEE Conference on Automation Science and Engineering

, Shanghai, 2006 – Invited Session on Semiconductor Manufacturing: Fan-Tien Cheng, CC Huang, Naiqi Wu, and Mike Tao Zhang (Session Co-Chairs); 14 papers accepted – Tech tours to Intel and Semiconductor Manufacturing Int'l Company (SMIC): Mike Tao Zhang (Organizer); 30 people joined – Tutorial/Workshop on eManufacturing for the Semiconductor Industry: Fan-Tien Cheng, Min-Hsiung Hung, Jonathan Chang, and Mike Tao Zhang (Organizers)

18th IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

, Stresa, Italy, June 11-12, 2007 – Dave Gross (Conference Co-Chair).

IEEE/SEMI eManufacturing Symposium

, Taipei, Taiwan, June, 2007 – Thomas Chen and MuDer Jeng (Steering Committee members)

IEEE Conference on Automation Science and Engineering

(IEEE CASE 2007), Phoenix, USA, Sept 2007 – Mike Tao Zhang (Program Chair); Intel Fellow Dev Pillai (Keynote Speaker) – John Fowler, Chen-Fu Chien, Oliver Rose, and James Wuerfel (Co-Chairs): The 2007 Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2007) – as a part of IEEE CASE 2007

4th IEEE Conference on Automation Science and Engineering

, Washington DC, USA, August 2008. – Mengchu Zhou (General Chair). Mike Tao Zhang (Steering Committee member)

2008 International Symposium on Semiconductor Manufacturing

, Tokyo, Japan, Oct.2008.

– Shi-Chung Chang (Program Committee) Joint symposium of "

AEC/APC-Asia 2008

" and "

e-Manufacturing & DFM Symposium 2008

", HsinChu, Taiwan, Nov. 2008. – Thomas Chen (Steering Committee member)

4th Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing

, Miami, Florida, USA, Dec. 2008. – John Fowler and Chen-Fu Chien (Conference Chairs). Mike Tao Zhang (Int’l Advisory Committee member).

Joint

20 th Advanced Semiconductor Manufacturing Conference

and

2009 International Symposium on Semiconductor Manufacturing

, Berlin, Germany, May 2009.

– Shi-Chung Chang (Program committee) 10

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

• • • • • • • •

Conference Involvement (2)

10th International Conference on Automation Technology (Automation 2009)

, Tainan (Taiwan), June 2009.

– Meng-Chu Zhou and Mike Tao Zhang (Int’l Advisory Committee members)

5 th

– – –

IEEE Conference on Automation Science and Engineering

, Bangalore, India, Aug 2009 Mike Tao Zhang, MengChu Zhou (Steering Committee). Tae-Eog Lee (Track Co-Chair), James Morrison (Track Co-Chair).

Shi-Chung Chang, MuDer Jeng, Wai Kin Victor Chan, Shengwei Ding, Fei Qiao, Naiqi Wu, Jingang Yi (Program Committee).

Shi-Chung Chang and Argon Chen, organize special session on Yield Symptom Identification

2009 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM)

, Austin, Texas, Dec 2009 – – Shekar Krishnaswamy, Scott Mason (Conference Organizers) Lars Mönch, Stephane Dauzere-Peres, Oliver Rose (Track Chairs)

IEEE International Conference on Robotics and Automation

, Anchorage, Alaska, May 2010 – James Morrison (Program Committee) 21 st – – Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, USA, July 2010 Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison Shi-Chung Chang (Technical Committee) 6 th – – Annual IEEE CASE 2010 Special session on Green Tech Automation, chairs James Morrison and Jingshan Li Semiconductor Manufacturing session chaired by James Morrison and Jingshan Li 5 th – – – MISTA John Fowler (Conference Organizer) Ken Fordyce (Plenary Speaker) Focus session on Semiconductor Scheduling chaired by James Morrison 7 th – – MASM (within Wintersim 2011) Stephane Dauzere-Peres, John Fowler (Conference Organizers) Lars Monch, James Morrison (Track Chairs) 11

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Conference Involvement (3)

•

8

th

IEEE Conference on Automation Science and Engineering (CASE 2012), Seoul, Korea

– Steering Committee: Mengchu Zhou, Mike Tao Zhang – Organizing Committee: Tae-Eog Lee (Award Chair), James R. Morrison (Workshop Chair) – Technical Program Committee: Fan-Tien Cheng (Information Automation) – Conference Editorial Board: Wai Kin Victor Chan (Editor), Fan-Tien Cheng (Associate Editor), Jingshan Li (Associate Editor), James R. Morrison (Associate Editor), Jingang Yi (Associate Editor), Claude Yugma (Associate Editor), many reviewers – Plenary Talk: Tae-Eog Lee – Special session organization • • • • • “Process Control Automation”, Chair Fan-Tien Cheng, co-Chair James R. Morrison “Petri Nets in Automation”, co-Chair Mengchu Zhou “Scheduling Methods for Semiconductor Manufacturing,” Chair Lars Moench, co-Chair Claude Yugma Modeling, Analysis and Operation of High Technology Manufacturing”, co-Chair Adar Kalir 22 papers in total – Workshop on “Emerging Topics from Special Sessions at CASE 2012”, Presenter Jingshan Li, Presenter Lars Moench, Chair/Presenter James R. Morrison, Presenter Claude Yugma 12

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

TC Leadership

• Roles and responsibilities – About 20 varieties of chairs – Want to ask for certain minimal duties, such as:

• Propose one session (and collect papers for it) per year, • Attend one TC meeting per year, • Submit one paper for a TC event, • And the like…

• New organization/positions – Anticipate requesting nominations for chair positions • Will take your feedback to TC co-chairs and enact starting January 1, 2013

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

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TC Activities

• Special issues – Lars Moench spearheading a special issue for C&OR or T-ASE associated with CASE 2012 (20 candidate papers) and MASM 2012 (40 candidate papers) – Automation for Next Generation High Technology Manufacturing for T-ASE with target publication 2014 • Review “Successful Technical Committees” by Satoshi Tadokoro, IEEE RAS VP, Technical Activities

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

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Discussion Topics (1)

• What can we do?

– Organize conferences, symposiums and special sessions – Organize workshops/tutorials – Organize seminars – Organize summer schools • Future directions or focus areas for the TC?

– Green tech… how to get in?

• Pull MASM into CASE on alternate years? (Happened in the past…) • How can we strengthen the interaction with industry?

– Joint research projects: Share data and know-how – Research funding from industry?

• How can the TC better serve the community?

– Post presentations from our CASE Special Sessions to TC website with link to paper in IEEE Xplore – Others?

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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

Discussion Topics (2)

• How to join?

– Send me an e-mail: [email protected]

• Want to talk later? Have ideas later..

– Contact James Morrison (see e-mail above)

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

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• • • • • • • • •

Discussion Topics: Feedback (1)

Organization/Leadership: TC members in general agreed with periodically refresh of roles/responsibilities IEEE general – Suggested that 50% of TC members be members or planning to join IEEE  Will send e-mail encouraging members to renew their membership – Collaboration with regional IEEE Chapters can be supported by RAS funding Future workshops at CASE – Panel discussion (future directions/needs) – Workshop on emerging research directions Books – Prof. Mengchu Zhou serves IEEE Press in collecting manuscripts for textbooks, monographs, edited volumes on Systems Science and Engineering Competition: Industry post data set and companies/academia try to get best solution TC sponsored awards: – Categories: Best paper, service, etc. – Sponsorship: Companies can donate some small funding?

TC website – Software: Publish your relevant software to TC page (Profs. Tae-Eog Lee, …) – List TC member relevant projects on TC page – – – List TC member accomplishments on TC page List TC member industry-academic projects on TC page Tutorials: Publish your relevant tutorials to TC page (Profs. Fan-Tien Cheng, Mengchu Zhou, Tae-Eog Lee, …) How can we attract more industry participation in activities and foster collaboration between industry-academia?

Post a TC newletter? (Ask a Post-Doc to spearhead the effort) 17

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

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