Nancy’s Personal Fancy Presentation of … SEM Pictures of Wafers Without Photoresist Wafers from dates 7/22/08 and 5/20/08

Download Report

Transcript Nancy’s Personal Fancy Presentation of … SEM Pictures of Wafers Without Photoresist Wafers from dates 7/22/08 and 5/20/08

Nancy’s Personal Fancy Presentation of …
SEM Pictures of Wafers Without Photoresist
Wafers from dates 7/22/08 and 5/20/08
Wafer from
7/22/08
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
7/22/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Center
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
The sides of all these dots are straighter than they appear in the pictures. A
combination of the angle of the wafer and a very slow slide (due possible to the
wafer slowly charging up?) makes the dots look shorter and the sides more
tapered than they acutally are.
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
7/22/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Right
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
7/22/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Top
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
7/22/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Left
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
7/22/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Bottom
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
Wafer from
5/20/08
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
5/20/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Center
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
5/20/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Right
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
5/20/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Top
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
5/20/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Left
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments:
SEM Image
Dots for Nancy
User:
Date:
Lili Hsu
7/25/08
Sample ID:
5/20/08
Sample Description:
Etched, no photoresist
DEEP 10 min
Location on Wafer:*
Bottom
* All orientations given
assuming the flat of the wafer
is down, or facing you
Comments: