Effects of target current on the mechanical properties of Cr-C coatings by using the Unbalanced Magnetron Sputtering Professor： Dr.
Download ReportTranscript Effects of target current on the mechanical properties of Cr-C coatings by using the Unbalanced Magnetron Sputtering Professor： Dr.
Slide 1
Effects of target current on the mechanical
properties of Cr-C coatings by using the
Unbalanced Magnetron Sputtering
Professor： Dr. Yu-Sen Yang
Speaker：Jia-Hau Lin
Date ： 2011.05.20
Metallography Lab.
0
Slide 2
Outline
Introduction
Experiment
Results and discuss
Conclusion
Metallography Lab.
1
Slide 3
Introduction
1.The chromium carbide (Cr-C) films have excellent
properties including chemical stability, oxidation
resistance, low coefficient of friction and wear
resistance.
2. The excellent anti-wear performance of Cr-C films
can be attributed to the large content of carbide.
3. Cr-C coatings have been known to protected tools
which may be damaged by high thermal load (high
cutting speed).
Metallography Lab.
2
Slide 4
Experiment (equipment)
Equipment: Unbalance magnetron sputtering
Substrate: high speed steel(SKH51)
Closed unbalanced magnetron sputtering system
Cathode
Top-view
N
S
Magnets
N
Reactive gas
(nitrogen,argon,
Acetylene)
Front-view
550 mm
Closed
magnetron field
S
Cr
N
Cr
N
330 mm
S
Cr
S
S
z
y
o
Cr
Specimen
Work
distance
Rotor
Target
Specimen
holder
Shield
x
N
S
o
x
N
Metallography Lab.
3
Slide 5
Experiment (parameter)
1.Ar cooling time after deposition
20 Min
2.Substrate bias
-100 V
3.Chromium target current
1A,2A,3A,4A,5A,6A
4.C2H2 flow rate ratio
30 %
5.Ion bombardment voltage
-300 V
6.Work distance
13 cm
7.Frequency of substrate
100 KHz
8.Rotation speed of substrate holder
5rpm
資料來源:黃文毅，2010，利用非平衡磁控濺鍍Cr-C薄膜機械性
質之研究，國立高雄第一科技大學，碩士論文
Metallography Lab.
4
Slide 6
Experiment (Properties test )
1.Component Analysis: EDS
2.Morphology: FE-SEM
3.Microstructure: Raman Analysis
4.Friction coefficient: Ball-on-disc
Metallography Lab.
5
Slide 7
Experiment (Properties test )
5.Wear rate estimation: Calculated after measuring wear
track by Alpha-step
(1)Alpha-Step量測磨痕斷面面積
(2)計算磨耗體積及磨耗率
V 2 RA
1
r ( x
n
n 1
3 y i 1 y i y i 1
6y
i 1
i 1
3 y i y i 1
x)
n 1
( y i y i 1 ) x
i 1
V:體積，R:質心半徑，A:不規則形狀面積
Metallography Lab.
6
Slide 8
Results and discuss (Component Analysis)
Cr靶電流
Cr( at.%)
C ( at.%)
1A
5.8
94.2
2A
22.2
77.8
3A
47.3
52.7
4A
59.3
40.7
5A
63.8
36.2
6A
68.9
31.1
Metallography Lab.
7
Slide 9
Results and discuss( Friction coefficient test)
1A
2A
3A
4A
5A
6A
0.29
0.22
0.39
0.61
0.78
0.66
Against ball
Loading
Rotation diameter
Rotation rate
Length
Cr ball
0.5kg
20mm
286rpm
1000m
Metallography Lab.
8
Slide 10
Results and discuss (Wear rate)
單位:mm3‧N-1‧m-1
1A
2A
3A
6*10-6
24*10-6
142*10-6
4A
5A
270*10-6 303*10-6
6A
423*10-6
Metallography Lab.
9
Slide 11
Results and discuss (friction coefficient)
Metallography Lab.
10
Slide 12
Results and discuss (Wear rate)
Metallography Lab.
11
Slide 13
Results and discuss
1A
6A
Metallography Lab.
12
Slide 14
Results and discuss(Raman)
D band ：1350 cm-1
G band：1580 cm-1
材料及其結構
拉曼波峰位置
(cm-1)
天然鑽石
1332~1334
天然鑽石(C12)
1323
石墨
1350
1580~1600
合成鑽石(C13)
1290
合成鑽石膜
1332
非晶質碳(a-C)
及類鑽碳膜
1350附近
1580附近
Metallography Lab.
13
Slide 15
Conclusions
The experimental results show the carbon content in Cr-C
films increase with decreasing target current when target
current decrease from 6A to 1A,the carbon content increase
from31.1 at.% to at 94.2 at.% .
The friction coefficient of films decrease from 0.66 to 0.22 and
the wear rate is reduced from 423‧10-6 (mm3‧N-1‧m-1) to
6‧10-6 (mm3‧N-1‧m-1) when the current reduced from 6A to
1A.
The lowest wear rate is 6‧10-6 (mm3‧N-1‧m-1) at traget current
1A
The lowest friction coefficient is 0.22 at traget current 2A
The excellent anti-wear performance of Cr-C films can be
attributed to the large content of carbide.
Metallography Lab.
14
Slide 16
The reasons for a low coefficient of friction is the
formation of solid solution carbon in the diamondlike carbon film in the crystal structure, which could
effectively reduce wear and promote the wear
resistance characteristics.
Metallography Lab.
15
Slide 17
The End
Metallography Lab.
16
Effects of target current on the mechanical
properties of Cr-C coatings by using the
Unbalanced Magnetron Sputtering
Professor： Dr. Yu-Sen Yang
Speaker：Jia-Hau Lin
Date ： 2011.05.20
Metallography Lab.
0
Slide 2
Outline
Introduction
Experiment
Results and discuss
Conclusion
Metallography Lab.
1
Slide 3
Introduction
1.The chromium carbide (Cr-C) films have excellent
properties including chemical stability, oxidation
resistance, low coefficient of friction and wear
resistance.
2. The excellent anti-wear performance of Cr-C films
can be attributed to the large content of carbide.
3. Cr-C coatings have been known to protected tools
which may be damaged by high thermal load (high
cutting speed).
Metallography Lab.
2
Slide 4
Experiment (equipment)
Equipment: Unbalance magnetron sputtering
Substrate: high speed steel(SKH51)
Closed unbalanced magnetron sputtering system
Cathode
Top-view
N
S
Magnets
N
Reactive gas
(nitrogen,argon,
Acetylene)
Front-view
550 mm
Closed
magnetron field
S
Cr
N
Cr
N
330 mm
S
Cr
S
S
z
y
o
Cr
Specimen
Work
distance
Rotor
Target
Specimen
holder
Shield
x
N
S
o
x
N
Metallography Lab.
3
Slide 5
Experiment (parameter)
1.Ar cooling time after deposition
20 Min
2.Substrate bias
-100 V
3.Chromium target current
1A,2A,3A,4A,5A,6A
4.C2H2 flow rate ratio
30 %
5.Ion bombardment voltage
-300 V
6.Work distance
13 cm
7.Frequency of substrate
100 KHz
8.Rotation speed of substrate holder
5rpm
資料來源:黃文毅，2010，利用非平衡磁控濺鍍Cr-C薄膜機械性
質之研究，國立高雄第一科技大學，碩士論文
Metallography Lab.
4
Slide 6
Experiment (Properties test )
1.Component Analysis: EDS
2.Morphology: FE-SEM
3.Microstructure: Raman Analysis
4.Friction coefficient: Ball-on-disc
Metallography Lab.
5
Slide 7
Experiment (Properties test )
5.Wear rate estimation: Calculated after measuring wear
track by Alpha-step
(1)Alpha-Step量測磨痕斷面面積
(2)計算磨耗體積及磨耗率
V 2 RA
1
r ( x
n
n 1
3 y i 1 y i y i 1
6y
i 1
i 1
3 y i y i 1
x)
n 1
( y i y i 1 ) x
i 1
V:體積，R:質心半徑，A:不規則形狀面積
Metallography Lab.
6
Slide 8
Results and discuss (Component Analysis)
Cr靶電流
Cr( at.%)
C ( at.%)
1A
5.8
94.2
2A
22.2
77.8
3A
47.3
52.7
4A
59.3
40.7
5A
63.8
36.2
6A
68.9
31.1
Metallography Lab.
7
Slide 9
Results and discuss( Friction coefficient test)
1A
2A
3A
4A
5A
6A
0.29
0.22
0.39
0.61
0.78
0.66
Against ball
Loading
Rotation diameter
Rotation rate
Length
Cr ball
0.5kg
20mm
286rpm
1000m
Metallography Lab.
8
Slide 10
Results and discuss (Wear rate)
單位:mm3‧N-1‧m-1
1A
2A
3A
6*10-6
24*10-6
142*10-6
4A
5A
270*10-6 303*10-6
6A
423*10-6
Metallography Lab.
9
Slide 11
Results and discuss (friction coefficient)
Metallography Lab.
10
Slide 12
Results and discuss (Wear rate)
Metallography Lab.
11
Slide 13
Results and discuss
1A
6A
Metallography Lab.
12
Slide 14
Results and discuss(Raman)
D band ：1350 cm-1
G band：1580 cm-1
材料及其結構
拉曼波峰位置
(cm-1)
天然鑽石
1332~1334
天然鑽石(C12)
1323
石墨
1350
1580~1600
合成鑽石(C13)
1290
合成鑽石膜
1332
非晶質碳(a-C)
及類鑽碳膜
1350附近
1580附近
Metallography Lab.
13
Slide 15
Conclusions
The experimental results show the carbon content in Cr-C
films increase with decreasing target current when target
current decrease from 6A to 1A,the carbon content increase
from31.1 at.% to at 94.2 at.% .
The friction coefficient of films decrease from 0.66 to 0.22 and
the wear rate is reduced from 423‧10-6 (mm3‧N-1‧m-1) to
6‧10-6 (mm3‧N-1‧m-1) when the current reduced from 6A to
1A.
The lowest wear rate is 6‧10-6 (mm3‧N-1‧m-1) at traget current
1A
The lowest friction coefficient is 0.22 at traget current 2A
The excellent anti-wear performance of Cr-C films can be
attributed to the large content of carbide.
Metallography Lab.
14
Slide 16
The reasons for a low coefficient of friction is the
formation of solid solution carbon in the diamondlike carbon film in the crystal structure, which could
effectively reduce wear and promote the wear
resistance characteristics.
Metallography Lab.
15
Slide 17
The End
Metallography Lab.
16