Transcript 超伝導磁気シールドを設けたTES型マイクロカロリメータの性能評価

C08: Effect of on-chip magnetic shielding for
TES microcalorimeters
SII-182
Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi,
T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),,
K. Tanaka 3)
Department of Physics, Tokyo Metropolitan Univ.
2) ISAS/JAXA, 3) SII Nano-Technology
a
350 µm
Cross Section
a
TES calorimeter needs
a magnetic shield
to work stably.
b
Au Abs.
b
Ti/Au
Nb
SiO2 membrane
Al
Current
SiNx membrane
Si
On-chip Mag shield
SII-14b
(no shield)
SII-14b
0mT
6mT
SII-182
0mT
SII-182
On-chip
shield
26mT
300mT
100mT
300mT